FR2308200A1 - Installation de fabrication de semi-conducteurs et procede pour une telle fabrication - Google Patents
Installation de fabrication de semi-conducteurs et procede pour une telle fabricationInfo
- Publication number
- FR2308200A1 FR2308200A1 FR7539696A FR7539696A FR2308200A1 FR 2308200 A1 FR2308200 A1 FR 2308200A1 FR 7539696 A FR7539696 A FR 7539696A FR 7539696 A FR7539696 A FR 7539696A FR 2308200 A1 FR2308200 A1 FR 2308200A1
- Authority
- FR
- France
- Prior art keywords
- manufacturing
- plant
- semiconductor
- semiconductor manufacturing
- manufacturing plant
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67069—Apparatus for fluid treatment for etching for drying etching
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Drying Of Semiconductors (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US56957575A | 1975-04-18 | 1975-04-18 |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2308200A1 true FR2308200A1 (fr) | 1976-11-12 |
FR2308200B1 FR2308200B1 (fr) | 1980-10-31 |
Family
ID=24275994
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7539696A Granted FR2308200A1 (fr) | 1975-04-18 | 1975-12-24 | Installation de fabrication de semi-conducteurs et procede pour une telle fabrication |
Country Status (2)
Country | Link |
---|---|
FR (1) | FR2308200A1 (fr) |
GB (1) | GB1509135A (fr) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0009558A1 (fr) * | 1978-08-21 | 1980-04-16 | International Business Machines Corporation | Procédé et dispositif de modification d'une surface au moyen de plasma |
WO1981000420A1 (fr) * | 1979-08-09 | 1981-02-19 | Western Electric Co | Appareil d'attaque chimique de grande capacite |
US4298443A (en) * | 1979-08-09 | 1981-11-03 | Bell Telephone Laboratories, Incorporated | High capacity etching apparatus and method |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6037188B2 (ja) * | 1981-08-27 | 1985-08-24 | 三菱マテリアル株式会社 | スパツタリング装置 |
CN102359676B (zh) * | 2011-09-26 | 2015-12-09 | 常州捷佳创精密机械有限公司 | 一种槽底排水管道联接装置 |
-
1975
- 1975-12-24 FR FR7539696A patent/FR2308200A1/fr active Granted
-
1976
- 1976-03-18 GB GB1089976A patent/GB1509135A/en not_active Expired
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0009558A1 (fr) * | 1978-08-21 | 1980-04-16 | International Business Machines Corporation | Procédé et dispositif de modification d'une surface au moyen de plasma |
WO1981000420A1 (fr) * | 1979-08-09 | 1981-02-19 | Western Electric Co | Appareil d'attaque chimique de grande capacite |
US4298443A (en) * | 1979-08-09 | 1981-11-03 | Bell Telephone Laboratories, Incorporated | High capacity etching apparatus and method |
Also Published As
Publication number | Publication date |
---|---|
FR2308200B1 (fr) | 1980-10-31 |
GB1509135A (en) | 1978-04-26 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
CD | Change of name or company name | ||
TP | Transmission of property | ||
ST | Notification of lapse |