FR2321190A1 - Composant semi-conducteur et son procede de fabrication - Google Patents
Composant semi-conducteur et son procede de fabricationInfo
- Publication number
- FR2321190A1 FR2321190A1 FR7613338A FR7613338A FR2321190A1 FR 2321190 A1 FR2321190 A1 FR 2321190A1 FR 7613338 A FR7613338 A FR 7613338A FR 7613338 A FR7613338 A FR 7613338A FR 2321190 A1 FR2321190 A1 FR 2321190A1
- Authority
- FR
- France
- Prior art keywords
- manufacturing process
- semiconductor component
- semiconductor
- component
- manufacturing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
- H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
- H01L21/768—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics
- H01L21/76801—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing
- H01L21/76802—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics
- H01L21/76804—Applying interconnections to be used for carrying current between separate components within a device comprising conductors and dielectrics characterised by the formation and the after-treatment of the dielectrics, e.g. smoothing by forming openings in dielectrics by forming tapered via holes
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/02104—Forming layers
- H01L21/02107—Forming insulating materials on a substrate
- H01L21/02109—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates
- H01L21/02112—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer
- H01L21/02118—Forming insulating materials on a substrate characterised by the type of layer, e.g. type of material, porous/non-porous, pre-cursors, mixtures or laminates characterised by the material of the layer carbon based polymeric organic or inorganic material, e.g. polyimides, poly cyclobutene or PVC
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having at least one potential-jump barrier or surface barrier, e.g. PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic System or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31127—Etching organic layers
- H01L21/31133—Etching organic layers by chemical means
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K1/00—Printed circuits
- H05K1/02—Details
- H05K1/03—Use of materials for the substrate
- H05K1/0313—Organic insulating material
- H05K1/032—Organic insulating material consisting of one material
- H05K1/0346—Organic insulating material consisting of one material containing N
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/0011—Working of insulating substrates or insulating layers
- H05K3/0017—Etching of the substrate by chemical or physical means
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP50098179A JPS5222071A (en) | 1975-08-13 | 1975-08-13 | Method of selective etching of film of polyamide resin |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2321190A1 true FR2321190A1 (fr) | 1977-03-11 |
FR2321190B1 FR2321190B1 (fr) | 1979-08-17 |
Family
ID=14212791
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7613338A Granted FR2321190A1 (fr) | 1975-08-13 | 1976-05-05 | Composant semi-conducteur et son procede de fabrication |
Country Status (5)
Country | Link |
---|---|
JP (1) | JPS5222071A (fr) |
DE (1) | DE2618937C3 (fr) |
FR (1) | FR2321190A1 (fr) |
GB (1) | GB1510944A (fr) |
NL (1) | NL7604652A (fr) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0082417A2 (fr) * | 1981-12-21 | 1983-06-29 | Hitachi, Ltd. | Procédé pour l'attaque chimique sélective d'une couche de résine du type polyimide |
EP0091870A1 (fr) * | 1982-04-14 | 1983-10-19 | Commissariat à l'Energie Atomique | Procédé de positionnement d'une ligne d'interconnexion sur un trou de contact électrique d'un circuit intégré |
FR2537779A1 (fr) * | 1982-12-10 | 1984-06-15 | Commissariat Energie Atomique | Procede de positionnement d'un trou de contact electrique entre deux lignes d'interconnexion d'un circuit integre |
FR2550660A2 (fr) * | 1982-04-14 | 1985-02-15 | Commissariat Energie Atomique | Perfectionnement au procede de positionnement d'une ligne d'interconnexion sur un trou de contact electrique d'un circuit integre |
EP0139549A1 (fr) * | 1983-08-12 | 1985-05-02 | Commissariat A L'energie Atomique | Procédé de positionnement d'une ligne d'interconnexion sur un trou de contact électrique d'un circuit intégré |
EP0511691A2 (fr) * | 1988-07-13 | 1992-11-04 | International Business Machines Corporation | Attaque par voie humide de polyimides durcis par voie chimique |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54106599A (en) * | 1978-02-09 | 1979-08-21 | Hitachi Chem Co Ltd | Preparation of polyamide intermediate for semiconductor processing |
JPS54179102U (fr) * | 1978-06-07 | 1979-12-18 | ||
JPS5515502A (en) * | 1978-07-18 | 1980-02-02 | Hitachi Ltd | Running control system for manless wagon |
JPS557880A (en) * | 1979-04-27 | 1980-01-21 | Hitachi Ltd | Etching solution for organic resin |
JP3586468B2 (ja) | 1995-01-17 | 2004-11-10 | 新日鐵化学株式会社 | 積層体 |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS49120504A (fr) * | 1973-03-16 | 1974-11-18 |
-
1975
- 1975-08-13 JP JP50098179A patent/JPS5222071A/ja active Granted
-
1976
- 1976-04-29 NL NL7604652A patent/NL7604652A/xx not_active Application Discontinuation
- 1976-04-29 DE DE2618937A patent/DE2618937C3/de not_active Expired
- 1976-04-30 GB GB17720/76A patent/GB1510944A/en not_active Expired
- 1976-05-05 FR FR7613338A patent/FR2321190A1/fr active Granted
Non-Patent Citations (1)
Title |
---|
NEANT * |
Cited By (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0082417A2 (fr) * | 1981-12-21 | 1983-06-29 | Hitachi, Ltd. | Procédé pour l'attaque chimique sélective d'une couche de résine du type polyimide |
EP0082417A3 (en) * | 1981-12-21 | 1986-03-26 | Hitachi, Ltd. | Selective etching method of polyimide type resin film |
EP0091870A1 (fr) * | 1982-04-14 | 1983-10-19 | Commissariat à l'Energie Atomique | Procédé de positionnement d'une ligne d'interconnexion sur un trou de contact électrique d'un circuit intégré |
FR2525389A1 (fr) * | 1982-04-14 | 1983-10-21 | Commissariat Energie Atomique | Procede de positionnement d'une ligne d'interconnexion sur un trou de contact electrique d'un circuit integre |
FR2550660A2 (fr) * | 1982-04-14 | 1985-02-15 | Commissariat Energie Atomique | Perfectionnement au procede de positionnement d'une ligne d'interconnexion sur un trou de contact electrique d'un circuit integre |
FR2537779A1 (fr) * | 1982-12-10 | 1984-06-15 | Commissariat Energie Atomique | Procede de positionnement d'un trou de contact electrique entre deux lignes d'interconnexion d'un circuit integre |
EP0112239A1 (fr) * | 1982-12-10 | 1984-06-27 | Commissariat A L'energie Atomique | Procédé de positionnement d'un trou de contact électrique entre deux lignes d'interconnexion d'un circuit intégré |
US4518629A (en) * | 1982-12-10 | 1985-05-21 | Commissariat A L'energie Atomique | Process for positioning an electrical contact hole between two interconnection lines of an integrated circuit |
EP0139549A1 (fr) * | 1983-08-12 | 1985-05-02 | Commissariat A L'energie Atomique | Procédé de positionnement d'une ligne d'interconnexion sur un trou de contact électrique d'un circuit intégré |
US4541892A (en) * | 1983-08-12 | 1985-09-17 | Commissariat A L'energie Atomique | Process for the positioning of an interconnection line on an electrical contact hole of an integrated circuit |
EP0511691A2 (fr) * | 1988-07-13 | 1992-11-04 | International Business Machines Corporation | Attaque par voie humide de polyimides durcis par voie chimique |
EP0511691A3 (en) * | 1988-07-13 | 1993-03-03 | International Business Machines Corporation | Wet etching of cured polyimide |
Also Published As
Publication number | Publication date |
---|---|
DE2618937B2 (de) | 1978-06-29 |
FR2321190B1 (fr) | 1979-08-17 |
NL7604652A (nl) | 1977-02-15 |
DE2618937A1 (de) | 1977-02-17 |
DE2618937C3 (de) | 1979-02-22 |
JPS5222071A (en) | 1977-02-19 |
GB1510944A (en) | 1978-05-17 |
JPS5328342B2 (fr) | 1978-08-14 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse | ||
ST | Notification of lapse |