FR2296504A1 - Procede de fabrication de buses dans une tranche de silicium et buse correspondant notamment pour imprimante a jet d'encre - Google Patents

Procede de fabrication de buses dans une tranche de silicium et buse correspondant notamment pour imprimante a jet d'encre

Info

Publication number
FR2296504A1
FR2296504A1 FR7536645A FR7536645A FR2296504A1 FR 2296504 A1 FR2296504 A1 FR 2296504A1 FR 7536645 A FR7536645 A FR 7536645A FR 7536645 A FR7536645 A FR 7536645A FR 2296504 A1 FR2296504 A1 FR 2296504A1
Authority
FR
France
Prior art keywords
inkjet printer
corresponding nozzle
silicon slice
manufacturing nozzles
nozzles
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7536645A
Other languages
English (en)
French (fr)
Other versions
FR2296504B1 (enrdf_load_stackoverflow
Inventor
Ernest Bassous
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2296504A1 publication Critical patent/FR2296504A1/fr
Application granted granted Critical
Publication of FR2296504B1 publication Critical patent/FR2296504B1/fr
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1628—Manufacturing processes etching dry etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/162—Manufacturing of the nozzle plates
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
    • C03B9/00—Blowing glass; Production of hollow glass articles
    • C03B9/30—Details of blowing glass; Use of materials for the moulds
    • C03B9/32—Giving special shapes to parts of hollow glass articles
    • C03B9/33—Making hollow glass articles with feet or projections; Moulds therefor
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S239/00—Fluid sprinkling, spraying, and diffusing
    • Y10S239/19—Nozzle materials

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Weting (AREA)
  • Nozzles (AREA)
  • Facsimile Heads (AREA)
FR7536645A 1974-12-31 1975-11-21 Procede de fabrication de buses dans une tranche de silicium et buse correspondant notamment pour imprimante a jet d'encre Granted FR2296504A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US537799A US3921916A (en) 1974-12-31 1974-12-31 Nozzles formed in monocrystalline silicon

Publications (2)

Publication Number Publication Date
FR2296504A1 true FR2296504A1 (fr) 1976-07-30
FR2296504B1 FR2296504B1 (enrdf_load_stackoverflow) 1978-05-12

Family

ID=24144139

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7536645A Granted FR2296504A1 (fr) 1974-12-31 1975-11-21 Procede de fabrication de buses dans une tranche de silicium et buse correspondant notamment pour imprimante a jet d'encre

Country Status (7)

Country Link
US (1) US3921916A (enrdf_load_stackoverflow)
JP (1) JPS5516070B2 (enrdf_load_stackoverflow)
CA (1) CA1037519A (enrdf_load_stackoverflow)
DE (1) DE2555462C2 (enrdf_load_stackoverflow)
FR (1) FR2296504A1 (enrdf_load_stackoverflow)
GB (1) GB1492465A (enrdf_load_stackoverflow)
IT (1) IT1054354B (enrdf_load_stackoverflow)

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US4169008A (en) * 1977-06-13 1979-09-25 International Business Machines Corporation Process for producing uniform nozzle orifices in silicon wafers
US4146899A (en) * 1977-10-13 1979-03-27 The Mead Corporation Formed orifice plate for ink jet printing apparatus
US4184925A (en) * 1977-12-19 1980-01-22 The Mead Corporation Solid metal orifice plate for a jet drop recorder
US4239586A (en) * 1979-06-29 1980-12-16 International Business Machines Corporation Etching of multiple holes of uniform size
US4229265A (en) * 1979-08-09 1980-10-21 The Mead Corporation Method for fabricating and the solid metal orifice plate for a jet drop recorder produced thereby
US4282533A (en) * 1980-02-22 1981-08-04 Celanese Corporation Precision orifice nozzle devices for ink jet printing apparati and the process for their manufacture
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NEANT *

Also Published As

Publication number Publication date
CA1037519A (en) 1978-08-29
JPS5184641A (enrdf_load_stackoverflow) 1976-07-24
JPS5516070B2 (enrdf_load_stackoverflow) 1980-04-28
DE2555462C2 (de) 1982-06-03
US3921916A (en) 1975-11-25
GB1492465A (en) 1977-11-23
DE2555462A1 (de) 1976-07-08
FR2296504B1 (enrdf_load_stackoverflow) 1978-05-12
IT1054354B (it) 1981-11-10

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