FR2296504A1 - PROCESS FOR MANUFACTURING NOZZLES IN A SILICON SLICE AND CORRESPONDING NOZZLE, IN PARTICULAR FOR AN INKJET PRINTER - Google Patents
PROCESS FOR MANUFACTURING NOZZLES IN A SILICON SLICE AND CORRESPONDING NOZZLE, IN PARTICULAR FOR AN INKJET PRINTERInfo
- Publication number
- FR2296504A1 FR2296504A1 FR7536645A FR7536645A FR2296504A1 FR 2296504 A1 FR2296504 A1 FR 2296504A1 FR 7536645 A FR7536645 A FR 7536645A FR 7536645 A FR7536645 A FR 7536645A FR 2296504 A1 FR2296504 A1 FR 2296504A1
- Authority
- FR
- France
- Prior art keywords
- inkjet printer
- corresponding nozzle
- silicon slice
- manufacturing nozzles
- nozzles
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 229910052710 silicon Inorganic materials 0.000 title 1
- 239000010703 silicon Substances 0.000 title 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/162—Manufacturing of the nozzle plates
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B9/00—Blowing glass; Production of hollow glass articles
- C03B9/30—Details of blowing glass; Use of materials for the moulds
- C03B9/32—Giving special shapes to parts of hollow glass articles
- C03B9/33—Making hollow glass articles with feet or projections; Moulds therefor
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/14—Structure thereof only for on-demand ink jet heads
- B41J2002/14475—Structure thereof only for on-demand ink jet heads characterised by nozzle shapes or number of orifices per chamber
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S239/00—Fluid sprinkling, spraying, and diffusing
- Y10S239/19—Nozzle materials
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Chemical & Material Sciences (AREA)
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
- Weting (AREA)
- Facsimile Heads (AREA)
- Nozzles (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US537799A US3921916A (en) | 1974-12-31 | 1974-12-31 | Nozzles formed in monocrystalline silicon |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2296504A1 true FR2296504A1 (en) | 1976-07-30 |
FR2296504B1 FR2296504B1 (en) | 1978-05-12 |
Family
ID=24144139
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7536645A Granted FR2296504A1 (en) | 1974-12-31 | 1975-11-21 | PROCESS FOR MANUFACTURING NOZZLES IN A SILICON SLICE AND CORRESPONDING NOZZLE, IN PARTICULAR FOR AN INKJET PRINTER |
Country Status (7)
Country | Link |
---|---|
US (1) | US3921916A (en) |
JP (1) | JPS5516070B2 (en) |
CA (1) | CA1037519A (en) |
DE (1) | DE2555462C2 (en) |
FR (1) | FR2296504A1 (en) |
GB (1) | GB1492465A (en) |
IT (1) | IT1054354B (en) |
Families Citing this family (88)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4007464A (en) * | 1975-01-23 | 1977-02-08 | International Business Machines Corporation | Ink jet nozzle |
US4014029A (en) * | 1975-12-31 | 1977-03-22 | International Business Machines Corporation | Staggered nozzle array |
US4047184A (en) * | 1976-01-28 | 1977-09-06 | International Business Machines Corporation | Charge electrode array and combination for ink jet printing and method of manufacture |
US4106976A (en) * | 1976-03-08 | 1978-08-15 | International Business Machines Corporation | Ink jet nozzle method of manufacture |
US4035812A (en) * | 1976-07-12 | 1977-07-12 | The Mead Corporation | Ink jet recorder and charge ring plate therefor with reduced deplating current |
US4169008A (en) * | 1977-06-13 | 1979-09-25 | International Business Machines Corporation | Process for producing uniform nozzle orifices in silicon wafers |
US4146899A (en) * | 1977-10-13 | 1979-03-27 | The Mead Corporation | Formed orifice plate for ink jet printing apparatus |
US4184925A (en) * | 1977-12-19 | 1980-01-22 | The Mead Corporation | Solid metal orifice plate for a jet drop recorder |
US4239586A (en) * | 1979-06-29 | 1980-12-16 | International Business Machines Corporation | Etching of multiple holes of uniform size |
US4229265A (en) * | 1979-08-09 | 1980-10-21 | The Mead Corporation | Method for fabricating and the solid metal orifice plate for a jet drop recorder produced thereby |
US4282533A (en) * | 1980-02-22 | 1981-08-04 | Celanese Corporation | Precision orifice nozzle devices for ink jet printing apparati and the process for their manufacture |
US4430784A (en) * | 1980-02-22 | 1984-02-14 | Celanese Corporation | Manufacturing process for orifice nozzle devices for ink jet printing apparati |
JPS5764563A (en) * | 1980-10-07 | 1982-04-19 | Fuji Xerox Co Ltd | Ink particle jet apparatus of multi-nozzle ink jet printer |
JPS57182449A (en) * | 1981-05-07 | 1982-11-10 | Fuji Xerox Co Ltd | Forming method of ink jet multinozzle |
JPS57208262A (en) * | 1981-06-18 | 1982-12-21 | Ibm | Drop-on demand type ink jet printing method |
EP0078337B1 (en) * | 1981-10-30 | 1987-04-22 | Ibm Deutschland Gmbh | Contact device for the detachable connection of electrical components |
US4583690A (en) * | 1983-04-05 | 1986-04-22 | Hewlett-Packard Company | Anti-wetting in fluid nozzles |
US4555062A (en) * | 1983-04-05 | 1985-11-26 | Hewlett-Packard Company | Anti-wetting in fluid nozzles |
CA1210067A (en) * | 1983-12-08 | 1986-08-19 | Ronald D. Baxter | Isfet sensor and method of manufacture |
EP0355862B1 (en) * | 1984-09-28 | 1993-01-13 | Matsushita Electric Industrial Co., Ltd. | Ink jet printer |
CA1237020A (en) * | 1984-10-13 | 1988-05-24 | Herbert A. Waggener | Silicon nozzle structure and method of manufacture |
US4733823A (en) * | 1984-10-15 | 1988-03-29 | At&T Teletype Corporation | Silicon nozzle structures and method of manufacture |
US4756508A (en) * | 1985-02-21 | 1988-07-12 | Ford Motor Company | Silicon valve |
US4628576A (en) * | 1985-02-21 | 1986-12-16 | Ford Motor Company | Method for fabricating a silicon valve |
US4647013A (en) * | 1985-02-21 | 1987-03-03 | Ford Motor Company | Silicon valve |
US4768751A (en) * | 1987-10-19 | 1988-09-06 | Ford Motor Company | Silicon micromachined non-elastic flow valves |
WO1989008787A1 (en) * | 1988-03-14 | 1989-09-21 | Baxter International Inc. | Systems having fixed and variable flow rate control mechanisms |
US5176360A (en) * | 1988-03-14 | 1993-01-05 | Baxter International Inc. | Infusor having fixed and variable flow rate control mechanisms |
US5014750A (en) * | 1988-03-14 | 1991-05-14 | Baxter International Inc. | Systems having fixed and variable flow rate control mechanisms |
US5009251A (en) * | 1988-11-15 | 1991-04-23 | Baxter International, Inc. | Fluid flow control |
SG45171A1 (en) * | 1990-03-21 | 1998-01-16 | Boehringer Ingelheim Int | Atomising devices and methods |
DE4112150C2 (en) * | 1990-09-21 | 1998-11-19 | Bosch Gmbh Robert | Perforated body and valve with perforated body |
IL100224A (en) * | 1990-12-04 | 1994-10-21 | Dmw Tech Ltd | Atomising nozzles |
DE4104019C1 (en) * | 1991-02-09 | 1992-04-23 | Robert Bosch Gmbh, 7000 Stuttgart, De | |
ATE173197T1 (en) * | 1992-08-31 | 1998-11-15 | Canon Kk | INK JET HEAD MANUFACTURING METHOD USING ION MACHINING AND INK JET HEAD |
US6007676A (en) | 1992-09-29 | 1999-12-28 | Boehringer Ingelheim International Gmbh | Atomizing nozzle and filter and spray generating device |
IL107120A (en) * | 1992-09-29 | 1997-09-30 | Boehringer Ingelheim Int | Atomising nozzle and filter and spray generating device |
DE69415362T2 (en) * | 1993-02-17 | 1999-06-10 | DENSO CORPORATION, Kariya-city, Aichi-pref. | Liquid injector |
US5569187A (en) * | 1994-08-16 | 1996-10-29 | Texas Instruments Incorporated | Method and apparatus for wireless chemical supplying |
US5908414A (en) * | 1995-05-03 | 1999-06-01 | Tricumed Gmbh | Implantable infusion pump |
DE19515722C1 (en) * | 1995-05-03 | 1996-07-25 | Tricumed Gmbh | Implanted infusion pump for medicament dosing |
US5992769A (en) * | 1995-06-09 | 1999-11-30 | The Regents Of The University Of Michigan | Microchannel system for fluid delivery |
GB2302842B (en) * | 1995-07-03 | 1998-12-30 | Seiko Epson Corp | A nozzle plate, ink-jet head and manufacturing method thereof |
JP3386099B2 (en) * | 1995-07-03 | 2003-03-10 | セイコーエプソン株式会社 | Nozzle plate for ink jet recording head, method of manufacturing the same, and ink jet recording head |
US5658471A (en) * | 1995-09-22 | 1997-08-19 | Lexmark International, Inc. | Fabrication of thermal ink-jet feed slots in a silicon substrate |
US5757400A (en) * | 1996-02-01 | 1998-05-26 | Spectra, Inc. | High resolution matrix ink jet arrangement |
US6352209B1 (en) | 1996-07-08 | 2002-03-05 | Corning Incorporated | Gas assisted atomizing devices and methods of making gas-assisted atomizing devices |
EP0910478A4 (en) * | 1996-07-08 | 1999-09-01 | Corning Inc | Rayleigh-breakup atomizing devices and methods of making rayleigh-breakup atomizing devices |
BR9710223A (en) | 1996-07-08 | 2000-01-18 | Spraychip Systems | Atomization device aided by gas. |
US5901425A (en) * | 1996-08-27 | 1999-05-11 | Topaz Technologies Inc. | Inkjet print head apparatus |
WO1998047712A1 (en) * | 1997-04-18 | 1998-10-29 | Topaz Technologies, Inc. | Nozzle plate for an ink jet print head |
EP0985534A4 (en) * | 1997-05-14 | 2001-03-28 | Seiko Epson Corp | Method of forming nozzle for injectors and method of manufacturing ink jet head |
JP3530744B2 (en) * | 1997-07-04 | 2004-05-24 | キヤノン株式会社 | Method of manufacturing ink jet recording head |
DE19742439C1 (en) * | 1997-09-26 | 1998-10-22 | Boehringer Ingelheim Int | Fluid micro-filter |
EP1044172A4 (en) * | 1997-12-19 | 2005-01-19 | Corning Inc | Burner and method for producing metal oxide soot |
WO2000015321A1 (en) * | 1998-09-17 | 2000-03-23 | Advanced Bioanalytical Services, Inc. | Integrated monolithic microfabricated electrospray and liquid chromatography system and method |
US6363606B1 (en) * | 1998-10-16 | 2002-04-02 | Agere Systems Guardian Corp. | Process for forming integrated structures using three dimensional printing techniques |
US6633031B1 (en) | 1999-03-02 | 2003-10-14 | Advion Biosciences, Inc. | Integrated monolithic microfabricated dispensing nozzle and liquid chromatography-electrospray system and method |
JP2001179987A (en) * | 1999-12-22 | 2001-07-03 | Samsung Electro Mech Co Ltd | Nozzle plate and method for manufacturing the plate |
CN1237572C (en) | 1999-12-30 | 2006-01-18 | 阿德维昂生物科学公司 | Multiple electrospray device, system and methods |
JP2003520962A (en) | 2000-01-18 | 2003-07-08 | アドビオン バイオサイエンシーズ インコーポレーティッド | Separation media, dual electrospray nozzle system and method |
KR100499118B1 (en) | 2000-02-24 | 2005-07-04 | 삼성전자주식회사 | Monolithic fluidic nozzle assembly using mono-crystalline silicon wafer and method for manufacturing the same |
DE10101875B4 (en) * | 2001-01-16 | 2006-05-04 | Infineon Technologies Ag | Electronic component with stacked semiconductor chips and method for its production |
JP3881985B2 (en) * | 2001-12-04 | 2007-02-14 | 株式会社アトック | Quartz glass fluid single-hole nozzle and quartz glass fluid multi-hole burner head |
JP3975272B2 (en) * | 2002-02-21 | 2007-09-12 | 独立行政法人産業技術総合研究所 | Ultrafine fluid jet device |
EP1665353A4 (en) * | 2003-09-09 | 2006-11-29 | Csg Solar Ag | Improved method of etching silicon |
WO2005024920A1 (en) * | 2003-09-09 | 2005-03-17 | Csg Solar, Ag | Improved method of forming openings in an organic resin material |
WO2005024959A1 (en) * | 2003-09-09 | 2005-03-17 | Csg Solar, Ag | Adjustment of masks by re-flow |
WO2005039696A1 (en) * | 2003-10-21 | 2005-05-06 | The Regents Of The University Of Michigan | Intracranial neural interface system |
US7347532B2 (en) * | 2004-08-05 | 2008-03-25 | Fujifilm Dimatix, Inc. | Print head nozzle formation |
US9014796B2 (en) | 2005-06-14 | 2015-04-21 | Regents Of The University Of Michigan | Flexible polymer microelectrode with fluid delivery capability and methods for making same |
EP1931419B1 (en) * | 2005-10-07 | 2016-08-10 | NeuroNexus Technologies, Inc. | Modular multichannel microelectrode array |
US8195267B2 (en) | 2006-01-26 | 2012-06-05 | Seymour John P | Microelectrode with laterally extending platform for reduction of tissue encapsulation |
JP4881126B2 (en) * | 2006-10-25 | 2012-02-22 | 株式会社東芝 | Nozzle plate manufacturing method and droplet discharge head manufacturing method |
US8731673B2 (en) | 2007-02-26 | 2014-05-20 | Sapiens Steering Brain Stimulation B.V. | Neural interface system |
US20100276505A1 (en) * | 2007-09-26 | 2010-11-04 | Roger Earl Smith | Drilling in stretched substrates |
US8958862B2 (en) | 2007-10-17 | 2015-02-17 | Neuronexus Technologies, Inc. | Implantable device including a resorbable carrier |
US8565894B2 (en) * | 2007-10-17 | 2013-10-22 | Neuronexus Technologies, Inc. | Three-dimensional system of electrode leads |
US8224417B2 (en) | 2007-10-17 | 2012-07-17 | Neuronexus Technologies, Inc. | Guide tube for an implantable device system |
US8498720B2 (en) | 2008-02-29 | 2013-07-30 | Neuronexus Technologies, Inc. | Implantable electrode and method of making the same |
US20090240314A1 (en) * | 2008-03-24 | 2009-09-24 | Kong K C | Implantable electrode lead system with a three dimensional arrangement and method of making the same |
US9289142B2 (en) | 2008-03-24 | 2016-03-22 | Neuronexus Technologies, Inc. | Implantable electrode lead system with a three dimensional arrangement and method of making the same |
JP2012507417A (en) * | 2008-10-31 | 2012-03-29 | フジフィルム ディマティックス, インコーポレイテッド | Nozzle outlet molding |
US8197029B2 (en) | 2008-12-30 | 2012-06-12 | Fujifilm Corporation | Forming nozzles |
EP2488098B1 (en) * | 2009-10-16 | 2014-03-19 | Neuronexus Technologies | Neural interface system |
CN102686147B (en) | 2009-11-05 | 2016-01-20 | 格雷特巴奇有限公司 | waveguide neural interface device |
US9155861B2 (en) | 2010-09-20 | 2015-10-13 | Neuronexus Technologies, Inc. | Neural drug delivery system with fluidic threads |
JP6901446B2 (en) | 2018-09-03 | 2021-07-14 | 株式会社東芝 | Wireless communication devices, wireless communication systems, wireless communication methods and programs |
Family Cites Families (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2665946A (en) * | 1951-05-29 | 1954-01-12 | Arthur E Broughton | Spray nozzle |
US2834635A (en) * | 1955-06-22 | 1958-05-13 | Muellermist Irrigation Co | Liquid spray device |
US2987262A (en) * | 1959-11-24 | 1961-06-06 | Lodding Engineering Corp | Removable and replaceable shower device |
US3125295A (en) * | 1960-12-30 | 1964-03-17 | Crystal | |
US3211088A (en) * | 1962-05-04 | 1965-10-12 | Sperry Rand Corp | Exponential horn printer |
JPS5040616B1 (en) * | 1970-03-18 | 1975-12-25 | ||
US3655530A (en) * | 1970-06-15 | 1972-04-11 | Mead Corp | Fabrication of orifices |
US3742230A (en) * | 1972-06-29 | 1973-06-26 | Massachusetts Inst Technology | Soft x-ray mask support substrate |
-
1974
- 1974-12-31 US US537799A patent/US3921916A/en not_active Expired - Lifetime
-
1975
- 1975-10-15 JP JP12333875A patent/JPS5516070B2/ja not_active Expired
- 1975-10-27 GB GB43997/75A patent/GB1492465A/en not_active Expired
- 1975-10-31 IT IT28866/75A patent/IT1054354B/en active
- 1975-11-21 FR FR7536645A patent/FR2296504A1/en active Granted
- 1975-11-21 CA CA240,350A patent/CA1037519A/en not_active Expired
- 1975-12-10 DE DE2555462A patent/DE2555462C2/en not_active Expired
Non-Patent Citations (1)
Title |
---|
NEANT * |
Also Published As
Publication number | Publication date |
---|---|
IT1054354B (en) | 1981-11-10 |
GB1492465A (en) | 1977-11-23 |
JPS5516070B2 (en) | 1980-04-28 |
DE2555462C2 (en) | 1982-06-03 |
JPS5184641A (en) | 1976-07-24 |
US3921916A (en) | 1975-11-25 |
DE2555462A1 (en) | 1976-07-08 |
FR2296504B1 (en) | 1978-05-12 |
CA1037519A (en) | 1978-08-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |