FR2282120A2 - Procede et dispositif d'exposition de couches sensibles a la lumiere avec suppression des lignes fantomes - Google Patents

Procede et dispositif d'exposition de couches sensibles a la lumiere avec suppression des lignes fantomes

Info

Publication number
FR2282120A2
FR2282120A2 FR7521474A FR7521474A FR2282120A2 FR 2282120 A2 FR2282120 A2 FR 2282120A2 FR 7521474 A FR7521474 A FR 7521474A FR 7521474 A FR7521474 A FR 7521474A FR 2282120 A2 FR2282120 A2 FR 2282120A2
Authority
FR
France
Prior art keywords
removal
light
ghost lines
layers sensitive
exposing layers
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7521474A
Other languages
English (en)
French (fr)
Other versions
FR2282120B2 (https=
Inventor
Albert Frosch
Arno Schmackpfelle
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2282120A2 publication Critical patent/FR2282120A2/fr
Application granted granted Critical
Publication of FR2282120B2 publication Critical patent/FR2282120B2/fr
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
FR7521474A 1974-08-16 1975-07-03 Procede et dispositif d'exposition de couches sensibles a la lumiere avec suppression des lignes fantomes Granted FR2282120A2 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19742439208 DE2439208A1 (de) 1974-08-16 1974-08-16 Belichtungsvorrichtung

Publications (2)

Publication Number Publication Date
FR2282120A2 true FR2282120A2 (fr) 1976-03-12
FR2282120B2 FR2282120B2 (https=) 1977-07-22

Family

ID=5923274

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7521474A Granted FR2282120A2 (fr) 1974-08-16 1975-07-03 Procede et dispositif d'exposition de couches sensibles a la lumiere avec suppression des lignes fantomes

Country Status (4)

Country Link
JP (1) JPS5139143A (https=)
DE (1) DE2439208A1 (https=)
FR (1) FR2282120A2 (https=)
GB (1) GB1500959A (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0567558A (ja) * 1991-09-06 1993-03-19 Nikon Corp 露光方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2104273A5 (https=) * 1970-08-12 1972-04-14 Rank Organisation Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2104273A5 (https=) * 1970-08-12 1972-04-14 Rank Organisation Ltd

Also Published As

Publication number Publication date
GB1500959A (en) 1978-02-15
JPS5139143A (https=) 1976-04-01
DE2439208A1 (de) 1976-03-11
FR2282120B2 (https=) 1977-07-22

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