FR2275027B1 - - Google Patents

Info

Publication number
FR2275027B1
FR2275027B1 FR7514039A FR7514039A FR2275027B1 FR 2275027 B1 FR2275027 B1 FR 2275027B1 FR 7514039 A FR7514039 A FR 7514039A FR 7514039 A FR7514039 A FR 7514039A FR 2275027 B1 FR2275027 B1 FR 2275027B1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7514039A
Other languages
French (fr)
Other versions
FR2275027A1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2275027A1 publication Critical patent/FR2275027A1/fr
Application granted granted Critical
Publication of FR2275027B1 publication Critical patent/FR2275027B1/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25F—PROCESSES FOR THE ELECTROLYTIC REMOVAL OF MATERIALS FROM OBJECTS; APPARATUS THEREFOR
    • C25F3/00—Electrolytic etching or polishing
    • C25F3/02—Etching
    • C25F3/12—Etching of semiconducting materials
    • H10P14/6309—
    • H10P14/6322—
    • H10P14/6508—
    • H10P50/00—
    • H10P90/1906—
    • H10P95/00—
    • H10W10/061—
    • H10W10/181—
    • H10P90/191—
    • H10W10/012—
    • H10W10/13—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/051—Etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/085—Isolated-integrated
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/117—Oxidation, selective
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S438/00—Semiconductor device manufacturing: process
    • Y10S438/911—Differential oxidation and etching

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Element Separation (AREA)
  • Bipolar Transistors (AREA)
FR7514039A 1974-06-14 1975-04-29 Procede de fabrication de dispositifs semi-conducteurs a isolation dielectrique Granted FR2275027A1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US479321A US3919060A (en) 1974-06-14 1974-06-14 Method of fabricating semiconductor device embodying dielectric isolation

Publications (2)

Publication Number Publication Date
FR2275027A1 FR2275027A1 (fr) 1976-01-09
FR2275027B1 true FR2275027B1 (enExample) 1977-07-08

Family

ID=23903534

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7514039A Granted FR2275027A1 (fr) 1974-06-14 1975-04-29 Procede de fabrication de dispositifs semi-conducteurs a isolation dielectrique

Country Status (5)

Country Link
US (1) US3919060A (enExample)
JP (1) JPS511082A (enExample)
DE (1) DE2521568A1 (enExample)
FR (1) FR2275027A1 (enExample)
IT (1) IT1037478B (enExample)

Families Citing this family (43)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4006045A (en) * 1974-10-21 1977-02-01 International Business Machines Corporation Method for producing high power semiconductor device using anodic treatment and enhanced diffusion
US3954523A (en) * 1975-04-14 1976-05-04 International Business Machines Corporation Process for fabricating devices having dielectric isolation utilizing anodic treatment and selective oxidation
US4542579A (en) * 1975-06-30 1985-09-24 International Business Machines Corporation Method for forming aluminum oxide dielectric isolation in integrated circuits
US4056415A (en) * 1975-08-04 1977-11-01 International Telephone And Telegraph Corporation Method for providing electrical isolating material in selected regions of a semiconductive material
US4016017A (en) * 1975-11-28 1977-04-05 International Business Machines Corporation Integrated circuit isolation structure and method for producing the isolation structure
US4094057A (en) * 1976-03-29 1978-06-13 International Business Machines Corporation Field effect transistor lost film fabrication process
US4028149A (en) * 1976-06-30 1977-06-07 Ibm Corporation Process for forming monocrystalline silicon carbide on silicon substrates
US4057823A (en) * 1976-07-02 1977-11-08 International Business Machines Corporation Porous silicon dioxide moisture sensor and method for manufacture of a moisture sensor
US4104090A (en) * 1977-02-24 1978-08-01 International Business Machines Corporation Total dielectric isolation utilizing a combination of reactive ion etching, anodic etching, and thermal oxidation
US4111720A (en) * 1977-03-31 1978-09-05 International Business Machines Corporation Method for forming a non-epitaxial bipolar integrated circuit
US4264382A (en) * 1978-05-25 1981-04-28 International Business Machines Corporation Method for making a lateral PNP or NPN with a high gain utilizing reactive ion etching of buried high conductivity regions
US4180416A (en) * 1978-09-27 1979-12-25 International Business Machines Corporation Thermal migration-porous silicon technique for forming deep dielectric isolation
GB2038548B (en) * 1978-10-27 1983-03-23 Nippon Telegraph & Telephone Isolating semiconductor device by porous silicon oxide
FR2472268A1 (fr) * 1979-12-21 1981-06-26 Thomson Csf Procede de formation de caisson dans des circuits integres
US4506283A (en) * 1981-05-08 1985-03-19 Rockwell International Corporation Small area high value resistor with greatly reduced parasitic capacitance
US4380865A (en) * 1981-11-13 1983-04-26 Bell Telephone Laboratories, Incorporated Method of forming dielectrically isolated silicon semiconductor materials utilizing porous silicon formation
US4532700A (en) * 1984-04-27 1985-08-06 International Business Machines Corporation Method of manufacturing semiconductor structures having an oxidized porous silicon isolation layer
US4628591A (en) * 1984-10-31 1986-12-16 Texas Instruments Incorporated Method for obtaining full oxide isolation of epitaxial islands in silicon utilizing selective oxidation of porous silicon
US4897698A (en) * 1984-10-31 1990-01-30 Texas Instruments Incorporated Horizontal structure thin film transistor
US4627883A (en) * 1985-04-01 1986-12-09 Gte Laboratories Incorporated Method of forming an isolated semiconductor structure
JPS61283132A (ja) * 1985-06-10 1986-12-13 Nippon Telegr & Teleph Corp <Ntt> 半導体集積回路基板の製造方法
US4910165A (en) * 1988-11-04 1990-03-20 Ncr Corporation Method for forming epitaxial silicon on insulator structures using oxidized porous silicon
US5023200A (en) * 1988-11-22 1991-06-11 The United States Of America As Represented By The United States Department Of Energy Formation of multiple levels of porous silicon for buried insulators and conductors in silicon device technologies
US5583368A (en) * 1994-08-11 1996-12-10 International Business Machines Corporation Stacked devices
DE19501838A1 (de) * 1995-01-21 1996-07-25 Telefunken Microelectron Verfahren zum Herstellen von SOI-Strukturen
US5863826A (en) * 1996-08-02 1999-01-26 Micron Technology, Inc. CMOS isolation utilizing enhanced oxidation of recessed porous silicon formed by light ion implantation
US6333556B1 (en) 1997-10-09 2001-12-25 Micron Technology, Inc. Insulating materials
US6251470B1 (en) * 1997-10-09 2001-06-26 Micron Technology, Inc. Methods of forming insulating materials, and methods of forming insulating materials around a conductive component
US6858526B2 (en) 1998-07-14 2005-02-22 Micron Technology, Inc. Methods of forming materials between conductive electrical components, and insulating materials
JPH11260734A (ja) 1998-03-12 1999-09-24 Nec Corp 半導体装置の製造方法
DE19810825A1 (de) * 1998-03-12 1999-09-16 Siemens Ag Integrierte elektronische Schaltungsanordnung und Verfahren zu ihrer Herstellung
GB9808052D0 (en) * 1998-04-17 1998-06-17 Secr Defence Implants for administering substances and methods of producing implants
US6056868A (en) * 1998-05-22 2000-05-02 Cheah; Kok Wei Rare earth doping of porous silicon
US5950094A (en) * 1999-02-18 1999-09-07 Taiwan Semiconductor Manufacturing Company, Ltd. Method for fabricating fully dielectric isolated silicon (FDIS)
US6350679B1 (en) 1999-08-03 2002-02-26 Micron Technology, Inc. Methods of providing an interlevel dielectric layer intermediate different elevation conductive metal layers in the fabrication of integrated circuitry
TW556311B (en) * 2001-07-31 2003-10-01 Infineon Technologies Ag Method for filling trenches in integrated semiconductor circuits
DE10149139A1 (de) * 2001-10-05 2003-04-24 Bosch Gmbh Robert Verfahren zum Erzeugen von Hohlräumen mit einer optisch transparenten Wandung
US7342293B2 (en) * 2005-12-05 2008-03-11 International Business Machines Corporation Bipolar junction transistors (BJTS) with second shallow trench isolation (STI) regions, and methods for forming same
DE102008015688A1 (de) 2008-03-26 2009-10-01 Man Turbo Ag Turbinenrotor für eine Gasturbine
CN105476951A (zh) 2009-05-04 2016-04-13 普西维达公司 多孔硅药物洗脱颗粒
JP6026424B2 (ja) 2010-11-01 2016-11-16 シヴィダ・ユーエス・インコーポレイテッドＰｓｉｖｉｄａ Ｕｓ， Ｉｎｃ． 治療薬送達のための生物浸食性ケイ素ベースのデバイス
WO2014151381A1 (en) 2013-03-15 2014-09-25 Psivida Us, Inc. Bioerodible silicon-based compositions for delivery of therapeutic agents
CN112563143B (zh) * 2019-09-25 2022-03-22 长鑫存储技术有限公司 半导体结构制造方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3386865A (en) * 1965-05-10 1968-06-04 Ibm Process of making planar semiconductor devices isolated by encapsulating oxide filled channels
US3640806A (en) * 1970-01-05 1972-02-08 Nippon Telegraph & Telephone Semiconductor device and method of producing the same
US3661741A (en) * 1970-10-07 1972-05-09 Bell Telephone Labor Inc Fabrication of integrated semiconductor devices by electrochemical etching
US3648125A (en) * 1971-02-02 1972-03-07 Fairchild Camera Instr Co Method of fabricating integrated circuits with oxidized isolation and the resulting structure
JPS48102988A (enExample) * 1972-04-07 1973-12-24

Also Published As

Publication number Publication date
DE2521568A1 (de) 1976-01-02
IT1037478B (it) 1979-11-10
US3919060A (en) 1975-11-11
JPS511082A (enExample) 1976-01-07
FR2275027A1 (fr) 1976-01-09

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Legal Events

Date Code Title Description
ST Notification of lapse