FR2267583A1 - - Google Patents

Info

Publication number
FR2267583A1
FR2267583A1 FR7420768A FR7420768A FR2267583A1 FR 2267583 A1 FR2267583 A1 FR 2267583A1 FR 7420768 A FR7420768 A FR 7420768A FR 7420768 A FR7420768 A FR 7420768A FR 2267583 A1 FR2267583 A1 FR 2267583A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7420768A
Other languages
French (fr)
Other versions
FR2267583B1 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Westinghouse Electric Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Publication of FR2267583A1 publication Critical patent/FR2267583A1/fr
Application granted granted Critical
Publication of FR2267583B1 publication Critical patent/FR2267583B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H01J37/3045—Object or beam position registration

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Cold Cathode And The Manufacture (AREA)
FR7420768A 1973-06-15 1974-06-14 Expired FR2267583B1 (enrdf_load_stackoverflow)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US37055873A 1973-06-15 1973-06-15
US402248A US3895234A (en) 1973-06-15 1973-10-01 Method and apparatus for electron beam alignment with a member

Publications (2)

Publication Number Publication Date
FR2267583A1 true FR2267583A1 (enrdf_load_stackoverflow) 1975-11-07
FR2267583B1 FR2267583B1 (enrdf_load_stackoverflow) 1979-10-12

Family

ID=27005005

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7420768A Expired FR2267583B1 (enrdf_load_stackoverflow) 1973-06-15 1974-06-14

Country Status (6)

Country Link
US (1) US3895234A (enrdf_load_stackoverflow)
JP (1) JPS5811744B2 (enrdf_load_stackoverflow)
CA (1) CA1005173A (enrdf_load_stackoverflow)
DE (1) DE2428225A1 (enrdf_load_stackoverflow)
FR (1) FR2267583B1 (enrdf_load_stackoverflow)
GB (1) GB1477872A (enrdf_load_stackoverflow)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1520925A (en) * 1975-10-06 1978-08-09 Mullard Ltd Semiconductor device manufacture
GB1557064A (en) * 1976-09-09 1979-12-05 Mullard Ltd Masks suitable for use in electron image projectors
JPS5915977A (ja) * 1982-07-20 1984-01-27 株式会社東芝 表示装置
US4742234A (en) * 1985-09-27 1988-05-03 American Telephone And Telegraph Company, At&T Bell Laboratories Charged-particle-beam lithography
US4902897A (en) * 1986-10-13 1990-02-20 Seiko Epson Corporation Ion beam gun and ion beam exposure device
JPH01158731A (ja) * 1987-12-15 1989-06-21 Fujitsu Ltd 光電子転写露光方法およびこれに用いられるマスク
US5224137A (en) * 1991-05-23 1993-06-29 Imatron, Inc. Tuning the scanning electron beam computed tomography scanner
JP4055543B2 (ja) * 2002-02-22 2008-03-05 ソニー株式会社 レジスト材料及び微細加工方法
US7015467B2 (en) * 2002-10-10 2006-03-21 Applied Materials, Inc. Generating electrons with an activated photocathode
CN100380485C (zh) * 2002-10-10 2008-04-09 索尼株式会社 光盘用原盘的制造方法和光盘的制造方法
US7446474B2 (en) * 2002-10-10 2008-11-04 Applied Materials, Inc. Hetero-junction electron emitter with Group III nitride and activated alkali halide
US7049616B2 (en) * 2004-05-17 2006-05-23 General Electric Company Methods, apparatus, and software for adjusting the focal spot of an electron beam

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2556455A (en) * 1948-03-02 1951-06-12 Rauland Corp Cathode-ray tube focusing system
US2749449A (en) * 1953-09-28 1956-06-05 Philco Corp Photocell indexing system
US3037123A (en) * 1958-05-02 1962-05-29 Standard Oil Co Electronic arbitrary function generator
GB1065060A (en) * 1963-04-19 1967-04-12 United Aircraft Corp Improvements in and relating to apparatus for working articles with energised beams
US3491236A (en) * 1967-09-28 1970-01-20 Gen Electric Electron beam fabrication of microelectronic circuit patterns
US3679497A (en) * 1969-10-24 1972-07-25 Westinghouse Electric Corp Electron beam fabrication system and process for use thereof
US3710101A (en) * 1970-10-06 1973-01-09 Westinghouse Electric Corp Apparatus and method for alignment of members to electron beams
US3745358A (en) * 1971-05-10 1973-07-10 Radiant Energy Systems Alignment method and apparatus for electron projection systems
US3832560A (en) * 1973-06-13 1974-08-27 Westinghouse Electric Corp Method and apparatus for electron beam alignment with a member by detecting cathodoluminescence from oxide layers
US3840749A (en) * 1973-06-19 1974-10-08 Westinghouse Electric Corp Method and apparatus for electron beam alignment with a semiconductor member

Also Published As

Publication number Publication date
US3895234A (en) 1975-07-15
FR2267583B1 (enrdf_load_stackoverflow) 1979-10-12
DE2428225A1 (de) 1975-03-20
GB1477872A (en) 1977-06-29
JPS5811744B2 (ja) 1983-03-04
JPS5035800A (enrdf_load_stackoverflow) 1975-04-04
CA1005173A (en) 1977-02-08

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Legal Events

Date Code Title Description
ST Notification of lapse