FR2264893A1 - Nickel phosphide film resistor with titanium dioxide layer - formed on sintered alumina substrate reducing scatter of surface resistivity - Google Patents
Nickel phosphide film resistor with titanium dioxide layer - formed on sintered alumina substrate reducing scatter of surface resistivityInfo
- Publication number
- FR2264893A1 FR2264893A1 FR7508211A FR7508211A FR2264893A1 FR 2264893 A1 FR2264893 A1 FR 2264893A1 FR 7508211 A FR7508211 A FR 7508211A FR 7508211 A FR7508211 A FR 7508211A FR 2264893 A1 FR2264893 A1 FR 2264893A1
- Authority
- FR
- France
- Prior art keywords
- titanium dioxide
- dioxide layer
- surface resistivity
- film resistor
- alumina substrate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01C—RESISTORS
- H01C1/00—Details
- H01C1/01—Mounting; Supporting
- H01C1/014—Mounting; Supporting the resistor being suspended between and being supported by two supporting sections
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Non-Adjustable Resistors (AREA)
- Apparatuses And Processes For Manufacturing Resistors (AREA)
Abstract
An electric resistor with a NiP resistance film has a substrate of sintered Al2O3 and an intermediate layer of polycrystalline TiO2, with a thickness =1 mu m. It is used in integrated circuits, esp. microwave circuits. The TiO2 layer gives a considerable redn. in the scatter in the resistance per square, e.g. for a resistance film with a value of 50ohm/sq., the scatter is 100% on a 2.5 x 2.5cm2 substrate with no TiO2 coating, cf. 50 plus-or-minus 1 0ohm/sq. The TiO2 can be applied easily by pyrolysis of a suitable Ti cpd. on the substrate.
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
NL7403565A NL7403565A (en) | 1974-03-18 | 1974-03-18 | RESISTANCE FLAVORS ON SINTERED ALUMINUM OXIDE |
Publications (1)
Publication Number | Publication Date |
---|---|
FR2264893A1 true FR2264893A1 (en) | 1975-10-17 |
Family
ID=19820977
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7508211A Withdrawn FR2264893A1 (en) | 1974-03-18 | 1975-03-17 | Nickel phosphide film resistor with titanium dioxide layer - formed on sintered alumina substrate reducing scatter of surface resistivity |
Country Status (4)
Country | Link |
---|---|
JP (1) | JPS50127200A (en) |
DE (1) | DE2509521A1 (en) |
FR (1) | FR2264893A1 (en) |
NL (1) | NL7403565A (en) |
Families Citing this family (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS61188901A (en) * | 1985-02-16 | 1986-08-22 | 株式会社日本自動車部品総合研究所 | Membrane type resistance for flow rate sensor |
-
1974
- 1974-03-18 NL NL7403565A patent/NL7403565A/en unknown
-
1975
- 1975-03-05 DE DE19752509521 patent/DE2509521A1/en active Pending
- 1975-03-15 JP JP50031747A patent/JPS50127200A/ja active Pending
- 1975-03-17 FR FR7508211A patent/FR2264893A1/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
JPS50127200A (en) | 1975-10-06 |
DE2509521A1 (en) | 1975-09-25 |
NL7403565A (en) | 1975-09-22 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |