FR2256515A1 - - Google Patents

Info

Publication number
FR2256515A1
FR2256515A1 FR7443130A FR7443130A FR2256515A1 FR 2256515 A1 FR2256515 A1 FR 2256515A1 FR 7443130 A FR7443130 A FR 7443130A FR 7443130 A FR7443130 A FR 7443130A FR 2256515 A1 FR2256515 A1 FR 2256515A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7443130A
Other versions
FR2256515B1 (fr
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Publication of FR2256515A1 publication Critical patent/FR2256515A1/fr
Application granted granted Critical
Publication of FR2256515B1 publication Critical patent/FR2256515B1/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01C—RESISTORS
    • H01C17/00—Apparatus or processes specially adapted for manufacturing resistors
    • H01C17/06—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base
    • H01C17/075—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques
    • H01C17/12—Apparatus or processes specially adapted for manufacturing resistors adapted for coating resistive material on a base by thin film techniques by sputtering
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/0021—Reactive sputtering or evaporation
    • C23C14/0036—Reactive sputtering
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
    • H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors

Landscapes

  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Apparatuses And Processes For Manufacturing Resistors (AREA)
  • Non-Adjustable Resistors (AREA)
  • Electronic Switches (AREA)
FR7443130A 1973-12-27 1974-12-27 Expired FR2256515B1 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP741927A JPS555841B2 (fr) 1973-12-27 1973-12-27

Publications (2)

Publication Number Publication Date
FR2256515A1 true FR2256515A1 (fr) 1975-07-25
FR2256515B1 FR2256515B1 (fr) 1977-10-28

Family

ID=11515221

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7443130A Expired FR2256515B1 (fr) 1973-12-27 1974-12-27

Country Status (4)

Country Link
JP (1) JPS555841B2 (fr)
DE (1) DE2461096C3 (fr)
FR (1) FR2256515B1 (fr)
GB (1) GB1429610A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2328295A1 (fr) * 1975-10-17 1977-05-13 Siemens Ag Procede pour la fabrication de circuits en couches minces

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS53106496A (en) * 1977-02-28 1978-09-16 Fujitsu Ltd Exothermic element
AU742275B2 (en) * 1996-12-27 2001-12-20 Canon Kabushiki Kaisha Charge-reducing film, image forming apparatus and method of manufacturing the same
CN1127750C (zh) 1996-12-27 2003-11-12 佳能株式会社 减少电荷的薄膜,图象形成装置及其制造方法
JP4676780B2 (ja) * 2005-02-16 2011-04-27 株式会社神戸製鋼所 硬質皮膜、積層型硬質皮膜およびその製造方法
JP5179526B2 (ja) * 2010-02-03 2013-04-10 株式会社神戸製鋼所 硬質皮膜、積層型硬質皮膜およびその製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2328295A1 (fr) * 1975-10-17 1977-05-13 Siemens Ag Procede pour la fabrication de circuits en couches minces

Also Published As

Publication number Publication date
DE2461096B2 (de) 1977-07-21
JPS5096897A (fr) 1975-08-01
DE2461096A1 (de) 1975-07-03
FR2256515B1 (fr) 1977-10-28
GB1429610A (en) 1976-03-24
JPS555841B2 (fr) 1980-02-12
DE2461096C3 (de) 1978-04-06

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