FR2245403A1 - Epitaxial deposition from the liquid phase - on a series of semiconductor substrates - Google Patents
Epitaxial deposition from the liquid phase - on a series of semiconductor substratesInfo
- Publication number
- FR2245403A1 FR2245403A1 FR7334695A FR7334695A FR2245403A1 FR 2245403 A1 FR2245403 A1 FR 2245403A1 FR 7334695 A FR7334695 A FR 7334695A FR 7334695 A FR7334695 A FR 7334695A FR 2245403 A1 FR2245403 A1 FR 2245403A1
- Authority
- FR
- France
- Prior art keywords
- substrate
- phase
- epitaxial deposition
- liquid phase
- liq
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B19/00—Liquid-phase epitaxial-layer growth
- C30B19/06—Reaction chambers; Boats for supporting the melt; Substrate holders
- C30B19/063—Sliding boat system
Abstract
Epitaxial deposition on a semiconductor substrate of a semiconductor layer from a material in the liq. phase, partic. for the industrial prodn. of Ga-As epitaxial layers on a GaAs substrate, by the known technique in which the substrate is placed in a crucible situated in an enclosure subjected to thermal radiation from a furnace and is divided into at least two chambers by a mobile partition by displacement of which the substrate can be brought into contact with the liquid phase material, (a) the substrate is placed in a recess in a mobile situated below the mobile partition and can be withdrawn from the crucible, (b) the substrate is brought into contact with the whole of the material in the liquid phase and after completion of the epitaxial deposition, the excess liq. phase is isolated from the substrate by displacement of the mobile partition, the substrate then being withdrawn from the crucible by displacement of the mobile support, leaving the excess liq. phase material for a subsequent epitaxial deposition. Possible contamination of the liq. phase and the complicated manipulations are avoided.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7334695A FR2245403A1 (en) | 1973-09-27 | 1973-09-27 | Epitaxial deposition from the liquid phase - on a series of semiconductor substrates |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR7334695A FR2245403A1 (en) | 1973-09-27 | 1973-09-27 | Epitaxial deposition from the liquid phase - on a series of semiconductor substrates |
Publications (2)
Publication Number | Publication Date |
---|---|
FR2245403A1 true FR2245403A1 (en) | 1975-04-25 |
FR2245403B1 FR2245403B1 (en) | 1977-05-27 |
Family
ID=9125651
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR7334695A Granted FR2245403A1 (en) | 1973-09-27 | 1973-09-27 | Epitaxial deposition from the liquid phase - on a series of semiconductor substrates |
Country Status (1)
Country | Link |
---|---|
FR (1) | FR2245403A1 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004012257A1 (en) * | 2002-07-31 | 2004-02-05 | Astropower, Inc. | Method and apparatus for manufacturing net shape semiconductor wafers |
-
1973
- 1973-09-27 FR FR7334695A patent/FR2245403A1/en active Granted
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2004012257A1 (en) * | 2002-07-31 | 2004-02-05 | Astropower, Inc. | Method and apparatus for manufacturing net shape semiconductor wafers |
US7456084B2 (en) | 2002-07-31 | 2008-11-25 | Heritage Power Llc | Method of using a setter having a recess in manufacturing a net-shape semiconductor wafer |
Also Published As
Publication number | Publication date |
---|---|
FR2245403B1 (en) | 1977-05-27 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
DK539875A (en) | METHOD AND APPARATUS FOR THE MANUFACTURE OF THIN MATTERS OF A COMPOUND | |
CA990186A (en) | Method of depositing epitaxial semiconductor layers from the liquid phase | |
GB1287797A (en) | Improvements relating to carriers for supporting substrates | |
GB1345367A (en) | Growing crystals upon a substrate | |
GB1414254A (en) | Epitaxial growth of semiconductor material from the liquid phase | |
CA1001535A (en) | Process for etching silicon wafers | |
GB1433161A (en) | Epitaxially grown layers | |
FR2316732A1 (en) | PROCESS FOR FORMING DIELECTRICALLY ISOLATED REGIONS IN A SEMICONDUCTOR SUBSTRATE | |
FR2245403A1 (en) | Epitaxial deposition from the liquid phase - on a series of semiconductor substrates | |
DE2960880D1 (en) | Process for producing epitaxial layers on selectively doped silicon substrates with high impurity concentration | |
GB1412602A (en) | Method and apparatus for producing a multi layer semi-conductor device utilizing liquid growth | |
GB1194017A (en) | Improvements in and relating to Methods of Manufacturing Semiconductor Devices | |
GB1482016A (en) | Epitaxial deposition of semiconductor material | |
GB1477941A (en) | Epitaxial methods of growing layers of gallium phosphide | |
JPS5542231A (en) | Reduced pressure vapor phase growing device | |
GB1533645A (en) | Method of producing mesa and threedimensional semiconductor structures with locally non-uniform composition and device for realizing same | |
JPS5248466A (en) | Method for vapor growth of semiconductor crystal | |
JPS5249990A (en) | Method for vacuum evaporation of multi layr film | |
JPS5696883A (en) | Manufacture of silicon carbide diode | |
GB1493825A (en) | Semiconductors | |
JPS5223265A (en) | Method of processing semiconductor materials | |
GB1423594A (en) | Manufacture of semiconductor single crystals | |
JPS5246777A (en) | Semiconductor device | |
FR2150756A1 (en) | Epitaxial growth furnace - with push plate for liquid phase and cover plates | |
JPS5267573A (en) | Manufacturing device for semiconductor |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
ST | Notification of lapse |