FR2208539A5 - - Google Patents

Info

Publication number
FR2208539A5
FR2208539A5 FR7340802A FR7340802A FR2208539A5 FR 2208539 A5 FR2208539 A5 FR 2208539A5 FR 7340802 A FR7340802 A FR 7340802A FR 7340802 A FR7340802 A FR 7340802A FR 2208539 A5 FR2208539 A5 FR 2208539A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7340802A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BERTHOLD AG H
Original Assignee
BERTHOLD AG H
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BERTHOLD AG H filed Critical BERTHOLD AG H
Application granted granted Critical
Publication of FR2208539A5 publication Critical patent/FR2208539A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Shutters For Cameras (AREA)
FR7340802A 1972-11-27 1973-11-12 Expired FR2208539A5 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722258458 DE2258458C3 (de) 1972-11-27 1972-11-27 Vorrichtung zum fotooptischen Ziehen von Linien

Publications (1)

Publication Number Publication Date
FR2208539A5 true FR2208539A5 (enExample) 1974-06-21

Family

ID=5863043

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7340802A Expired FR2208539A5 (enExample) 1972-11-27 1973-11-12

Country Status (3)

Country Link
DE (1) DE2258458C3 (enExample)
FR (1) FR2208539A5 (enExample)
GB (1) GB1454106A (enExample)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4500182A (en) * 1982-12-27 1985-02-19 Nicolet Instrument Corporation Photoplotter

Also Published As

Publication number Publication date
DE2258458C3 (de) 1975-10-30
DE2258458A1 (de) 1974-06-12
DE2258458B2 (de) 1975-03-13
GB1454106A (en) 1976-10-27

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Legal Events

Date Code Title Description
ST Notification of lapse