FR2208539A5 - - Google Patents

Info

Publication number
FR2208539A5
FR2208539A5 FR7340802A FR7340802A FR2208539A5 FR 2208539 A5 FR2208539 A5 FR 2208539A5 FR 7340802 A FR7340802 A FR 7340802A FR 7340802 A FR7340802 A FR 7340802A FR 2208539 A5 FR2208539 A5 FR 2208539A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7340802A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BERTHOLD AG H
Original Assignee
BERTHOLD AG H
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BERTHOLD AG H filed Critical BERTHOLD AG H
Application granted granted Critical
Publication of FR2208539A5 publication Critical patent/FR2208539A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70383—Direct write, i.e. pattern is written directly without the use of a mask by one or multiple beams
    • G03F7/704—Scanned exposure beam, e.g. raster-, rotary- and vector scanning

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Projection-Type Copiers In General (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Shutters For Cameras (AREA)
FR7340802A 1972-11-27 1973-11-12 Expired FR2208539A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19722258458 DE2258458C3 (de) 1972-11-27 1972-11-27 Vorrichtung zum fotooptischen Ziehen von Linien

Publications (1)

Publication Number Publication Date
FR2208539A5 true FR2208539A5 (fr) 1974-06-21

Family

ID=5863043

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7340802A Expired FR2208539A5 (fr) 1972-11-27 1973-11-12

Country Status (3)

Country Link
DE (1) DE2258458C3 (fr)
FR (1) FR2208539A5 (fr)
GB (1) GB1454106A (fr)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4500182A (en) * 1982-12-27 1985-02-19 Nicolet Instrument Corporation Photoplotter

Also Published As

Publication number Publication date
DE2258458A1 (de) 1974-06-12
DE2258458C3 (de) 1975-10-30
DE2258458B2 (de) 1975-03-13
GB1454106A (en) 1976-10-27

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Legal Events

Date Code Title Description
ST Notification of lapse