FR2198636A5 - - Google Patents

Info

Publication number
FR2198636A5
FR2198636A5 FR7231505A FR7231505A FR2198636A5 FR 2198636 A5 FR2198636 A5 FR 2198636A5 FR 7231505 A FR7231505 A FR 7231505A FR 7231505 A FR7231505 A FR 7231505A FR 2198636 A5 FR2198636 A5 FR 2198636A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7231505A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Etat Francais
Original Assignee
Etat Francais
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Etat Francais filed Critical Etat Francais
Priority to FR7231505A priority Critical patent/FR2198636A5/fr
Priority to IT28274/73A priority patent/IT993790B/it
Priority to BE135045A priority patent/BE804146A/fr
Priority to DE19732344822 priority patent/DE2344822A1/de
Priority to US05/394,552 priority patent/US3930730A/en
Priority to GB4207373A priority patent/GB1441664A/en
Application granted granted Critical
Publication of FR2198636A5 publication Critical patent/FR2198636A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N25/00—Investigating or analyzing materials by the use of thermal means
    • G01N25/16—Investigating or analyzing materials by the use of thermal means by investigating thermal coefficient of expansion
FR7231505A 1972-09-06 1972-09-06 Expired FR2198636A5 (fr)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FR7231505A FR2198636A5 (fr) 1972-09-06 1972-09-06
IT28274/73A IT993790B (it) 1972-09-06 1973-08-28 Lunghezza di un provino sotto l effetto della temperaturadispositivo interferometrico per misurare le variazioni d
BE135045A BE804146A (fr) 1972-09-06 1973-08-29 Dispositif interferometrique pour mesurer les variations de longueur d'une eprouvette sous l'effet de la temperature
DE19732344822 DE2344822A1 (de) 1972-09-06 1973-09-05 Interferometrische vorrichtung zur messung der laengenaenderungen eines prueflings unter der einwirkung der temperatur
US05/394,552 US3930730A (en) 1972-09-06 1973-09-06 Interferometric device for measurement of variations in length of a sample under the influence of temperature
GB4207373A GB1441664A (en) 1972-09-06 1973-09-06 Interferometric arrangement for measuring variations in a dimension of a test specimen

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7231505A FR2198636A5 (fr) 1972-09-06 1972-09-06

Publications (1)

Publication Number Publication Date
FR2198636A5 true FR2198636A5 (fr) 1974-03-29

Family

ID=9103916

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7231505A Expired FR2198636A5 (fr) 1972-09-06 1972-09-06

Country Status (6)

Country Link
US (1) US3930730A (fr)
BE (1) BE804146A (fr)
DE (1) DE2344822A1 (fr)
FR (1) FR2198636A5 (fr)
GB (1) GB1441664A (fr)
IT (1) IT993790B (fr)

Families Citing this family (32)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4147435A (en) * 1977-06-30 1979-04-03 International Business Machines Corporation Interferometric process and apparatus for the measurement of the etch rate of opaque surfaces
US4313679A (en) * 1979-11-29 1982-02-02 The United States Of America As Represented By The Secretary Of The Air Force Test sample support assembly
US4643577A (en) * 1983-07-15 1987-02-17 Wero Ohg Roth & Co. Length measuring apparatus based on the dual laser beam interferometer principle
US5350899A (en) * 1992-04-15 1994-09-27 Hiroichi Ishikawa Semiconductor wafer temperature determination by optical measurement of wafer expansion in processing apparatus chamber
US4579463A (en) * 1984-05-21 1986-04-01 Therma-Wave Partners Detecting thermal waves to evaluate thermal parameters
US4636088A (en) * 1984-05-21 1987-01-13 Therma-Wave, Inc. Method and apparatus for evaluating surface conditions of a sample
US4815856A (en) * 1986-06-05 1989-03-28 Storage Technology Partners Ii Method and apparatus for measuring the absolute thickness of dust defocus layers
US4823291A (en) * 1987-09-10 1989-04-18 Sensor Control, Inc. Radiometric measurement of wafer temperatures during deposition
US5121987A (en) * 1989-03-02 1992-06-16 Honeywell Inc. Method and apparatus for measuring coefficient of thermal expansion
JPH0640078B2 (ja) * 1989-08-21 1994-05-25 品川白煉瓦株式会社 セラミツクス等の熱間における変位測定装置
US5231285A (en) * 1991-06-28 1993-07-27 Honeywell Inc. Refraction index change measurement
US5290586A (en) * 1992-09-10 1994-03-01 International Business Machines Corporation Method to monitor Meta-Paete cure on metallized substrates
US5581351A (en) * 1994-02-22 1996-12-03 Eastman Kodak Company Optical monitor for measuring thermal expansion of a rotating roller
US5650852A (en) * 1996-03-08 1997-07-22 The Boeing Company Temperature-compensated laser measuring method and apparatus
US6681145B1 (en) 1996-06-06 2004-01-20 The Boeing Company Method for improving the accuracy of machines
US5920483A (en) * 1996-06-06 1999-07-06 The Boeing Company Scaling machine media for thermal effects to improve machine accuracy
US5949685A (en) * 1997-06-03 1999-09-07 The Boeing Company Real-time orientation of machine media to improve machine accuracy
US6049220A (en) 1998-06-10 2000-04-11 Boxer Cross Incorporated Apparatus and method for evaluating a wafer of semiconductor material
US6812047B1 (en) 2000-03-08 2004-11-02 Boxer Cross, Inc. Evaluating a geometric or material property of a multilayered structure
US6911349B2 (en) * 2001-02-16 2005-06-28 Boxer Cross Inc. Evaluating sidewall coverage in a semiconductor wafer
US6812717B2 (en) * 2001-03-05 2004-11-02 Boxer Cross, Inc Use of a coefficient of a power curve to evaluate a semiconductor wafer
US6958814B2 (en) * 2002-03-01 2005-10-25 Applied Materials, Inc. Apparatus and method for measuring a property of a layer in a multilayered structure
US6971791B2 (en) * 2002-03-01 2005-12-06 Boxer Cross, Inc Identifying defects in a conductive structure of a wafer, based on heat transfer therethrough
US6963393B2 (en) * 2002-09-23 2005-11-08 Applied Materials, Inc. Measurement of lateral diffusion of diffused layers
US6878559B2 (en) * 2002-09-23 2005-04-12 Applied Materials, Inc. Measurement of lateral diffusion of diffused layers
DE10309284B4 (de) * 2003-03-04 2006-07-20 Linseis Meßgeräte GmbH Dilatometer
US7164481B2 (en) * 2003-09-01 2007-01-16 Kabushiki Kaisha Ohara Coefficient of linear expansion measuring apparatus and coefficient of linear expansion measuring method
JP3908211B2 (ja) * 2003-09-01 2007-04-25 株式会社オハラ 線膨張係数測定装置及び線膨張係数測定方法
CN107894440B (zh) * 2017-12-20 2023-11-10 沈阳建筑大学 一种混凝土热膨胀系数测量装置及测量方法
US11703461B2 (en) 2021-03-26 2023-07-18 Arun Anath Aiyer Optical sensor for surface inspection and metrology
US11442025B1 (en) * 2021-03-26 2022-09-13 Arun Anath Aiyer Optical sensor for surface inspection and metrology
US11561080B2 (en) 2021-03-26 2023-01-24 Arun Anath Aiyer Optical sensor for surface inspection and metrology

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3788746A (en) * 1972-10-02 1974-01-29 Hewlett Packard Co Optical dilatometer

Also Published As

Publication number Publication date
GB1441664A (en) 1976-07-07
DE2344822A1 (de) 1974-03-14
IT993790B (it) 1975-09-30
US3930730A (en) 1976-01-06
BE804146A (fr) 1973-12-17

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Legal Events

Date Code Title Description
ST Notification of lapse