FR2181842A1 - - Google Patents

Info

Publication number
FR2181842A1
FR2181842A1 FR7310219A FR7310219A FR2181842A1 FR 2181842 A1 FR2181842 A1 FR 2181842A1 FR 7310219 A FR7310219 A FR 7310219A FR 7310219 A FR7310219 A FR 7310219A FR 2181842 A1 FR2181842 A1 FR 2181842A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7310219A
Other languages
French (fr)
Other versions
FR2181842B1 (enExample
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US00247614A external-priority patent/US3851758A/en
Priority claimed from US247639A external-priority patent/US3915784A/en
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Publication of FR2181842A1 publication Critical patent/FR2181842A1/fr
Application granted granted Critical
Publication of FR2181842B1 publication Critical patent/FR2181842B1/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P72/00Handling or holding of wafers, substrates or devices during manufacture or treatment thereof
    • H10P72/04Apparatus for manufacture or treatment
    • H10P72/0428Apparatus for mechanical treatment or grinding or cutting
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P52/00Grinding, lapping or polishing of wafers, substrates or parts of devices
FR7310219A 1972-04-26 1973-03-13 Expired FR2181842B1 (enExample)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US24753072A 1972-04-26 1972-04-26
US00247614A US3851758A (en) 1972-04-26 1972-04-26 Semiconductor chip fixture
US247639A US3915784A (en) 1972-04-26 1972-04-26 Method of semiconductor chip separation

Publications (2)

Publication Number Publication Date
FR2181842A1 true FR2181842A1 (enExample) 1973-12-07
FR2181842B1 FR2181842B1 (enExample) 1977-07-29

Family

ID=27400049

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7310219A Expired FR2181842B1 (enExample) 1972-04-26 1973-03-13

Country Status (5)

Country Link
CH (1) CH554076A (enExample)
DE (1) DE2317649C3 (enExample)
FR (1) FR2181842B1 (enExample)
IT (1) IT981199B (enExample)
NL (1) NL7304000A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2408218A1 (fr) * 1977-11-03 1979-06-01 Gen Electric Procede de division en pastilles d'une tranche de semi-conducteur

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005047509B4 (de) * 2005-10-04 2017-10-26 Degotec Gmbh Vorrichtung zur Separierung eines flächigen Objektes von einem Körper, mit dem das Objekt mittels Adhäsionskraft verbunden ist

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1594637A (enExample) * 1967-10-09 1970-06-08
US3590462A (en) * 1968-11-18 1971-07-06 Western Electric Co Method and apparatus for expanding an array of articles

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR1594637A (enExample) * 1967-10-09 1970-06-08
US3590462A (en) * 1968-11-18 1971-07-06 Western Electric Co Method and apparatus for expanding an array of articles

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2408218A1 (fr) * 1977-11-03 1979-06-01 Gen Electric Procede de division en pastilles d'une tranche de semi-conducteur

Also Published As

Publication number Publication date
DE2317649B2 (de) 1975-04-03
DE2317649C3 (de) 1975-11-27
NL7304000A (enExample) 1973-10-30
CH554076A (de) 1974-09-13
DE2317649A1 (de) 1973-11-15
IT981199B (it) 1974-10-10
FR2181842B1 (enExample) 1977-07-29

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Legal Events

Date Code Title Description
ST Notification of lapse