FR2181512A2 - Titanium carbide/nitride/carbonitride coating - of uniform and variable compsn - Google Patents

Titanium carbide/nitride/carbonitride coating - of uniform and variable compsn

Info

Publication number
FR2181512A2
FR2181512A2 FR7214913A FR7214913A FR2181512A2 FR 2181512 A2 FR2181512 A2 FR 2181512A2 FR 7214913 A FR7214913 A FR 7214913A FR 7214913 A FR7214913 A FR 7214913A FR 2181512 A2 FR2181512 A2 FR 2181512A2
Authority
FR
France
Prior art keywords
chamber
compsn
nitride
variable
uniform
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7214913A
Other languages
English (en)
French (fr)
Other versions
FR2181512B2 (enrdf_load_stackoverflow
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Aircraft Engines SAS
Original Assignee
SNECMA SAS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SNECMA SAS filed Critical SNECMA SAS
Priority to FR7214913A priority Critical patent/FR2181512A2/fr
Publication of FR2181512A2 publication Critical patent/FR2181512A2/fr
Application granted granted Critical
Publication of FR2181512B2 publication Critical patent/FR2181512B2/fr
Granted legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/36—Carbonitrides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/32—Carbides
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
    • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
    • C23C16/34—Nitrides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Inorganic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cutting Tools, Boring Holders, And Turrets (AREA)
  • Ceramic Products (AREA)
FR7214913A 1972-04-26 1972-04-26 Titanium carbide/nitride/carbonitride coating - of uniform and variable compsn Granted FR2181512A2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR7214913A FR2181512A2 (en) 1972-04-26 1972-04-26 Titanium carbide/nitride/carbonitride coating - of uniform and variable compsn

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR7214913A FR2181512A2 (en) 1972-04-26 1972-04-26 Titanium carbide/nitride/carbonitride coating - of uniform and variable compsn

Publications (2)

Publication Number Publication Date
FR2181512A2 true FR2181512A2 (en) 1973-12-07
FR2181512B2 FR2181512B2 (enrdf_load_stackoverflow) 1974-08-30

Family

ID=9097586

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7214913A Granted FR2181512A2 (en) 1972-04-26 1972-04-26 Titanium carbide/nitride/carbonitride coating - of uniform and variable compsn

Country Status (1)

Country Link
FR (1) FR2181512A2 (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5152907A (en) * 1974-11-05 1976-05-11 Mitsubishi Metal Corp Taishoku taimamoseikoshitsugokinzairyo
WO1986007614A1 (en) * 1985-06-17 1986-12-31 Kabushiki Kaisha Toyota Chuo Kenkyusho Method of treating the surface of iron alloy materials
EP0166216A3 (en) * 1984-05-28 1987-03-04 Kabushiki Kaisha Toyota Chuo Kenkyusho Method of forming a nitride layer
FR2599285A1 (fr) * 1986-05-28 1987-12-04 Instr I Revetement resistant a l'usure pour outils de coupe et procede d'application dudit revetement.
US4786526A (en) * 1985-10-03 1988-11-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Surface treating method and apparatus
EP0252480A3 (en) * 1986-07-07 1988-11-30 Kabushiki Kaisha Toyota Chuo Kenkyusho Method of surface treatment and apparatus used therefor

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2508063A1 (fr) 1981-06-18 1982-12-24 Snecma Procede, en phase vapeur, pour le depot d'un revetement protecteur sur une piece metallique, dispositif pour sa mise en oeuvre et pieces obtenues selon ledit procede

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
NEANT *

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5152907A (en) * 1974-11-05 1976-05-11 Mitsubishi Metal Corp Taishoku taimamoseikoshitsugokinzairyo
EP0166216A3 (en) * 1984-05-28 1987-03-04 Kabushiki Kaisha Toyota Chuo Kenkyusho Method of forming a nitride layer
WO1986007614A1 (en) * 1985-06-17 1986-12-31 Kabushiki Kaisha Toyota Chuo Kenkyusho Method of treating the surface of iron alloy materials
US4786526A (en) * 1985-10-03 1988-11-22 Kabushiki Kaisha Toyota Chuo Kenkyusho Surface treating method and apparatus
FR2599285A1 (fr) * 1986-05-28 1987-12-04 Instr I Revetement resistant a l'usure pour outils de coupe et procede d'application dudit revetement.
EP0252480A3 (en) * 1986-07-07 1988-11-30 Kabushiki Kaisha Toyota Chuo Kenkyusho Method of surface treatment and apparatus used therefor

Also Published As

Publication number Publication date
FR2181512B2 (enrdf_load_stackoverflow) 1974-08-30

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