FR2153241A1 - - Google Patents

Info

Publication number
FR2153241A1
FR2153241A1 FR7230718A FR7230718A FR2153241A1 FR 2153241 A1 FR2153241 A1 FR 2153241A1 FR 7230718 A FR7230718 A FR 7230718A FR 7230718 A FR7230718 A FR 7230718A FR 2153241 A1 FR2153241 A1 FR 2153241A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
FR7230718A
Other languages
French (fr)
Other versions
FR2153241B1 (OSRAM
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Publication of FR2153241A1 publication Critical patent/FR2153241A1/fr
Application granted granted Critical
Publication of FR2153241B1 publication Critical patent/FR2153241B1/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/50—Substrate holders

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR7230718A 1971-09-21 1972-08-30 Expired FR2153241B1 (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1382271A CH542772A (de) 1971-09-21 1971-09-21 Einrichtung zum Transportieren von zu beschichtenden Substraten durch eine Vakuumanlage

Publications (2)

Publication Number Publication Date
FR2153241A1 true FR2153241A1 (OSRAM) 1973-05-04
FR2153241B1 FR2153241B1 (OSRAM) 1976-08-13

Family

ID=4395631

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7230718A Expired FR2153241B1 (OSRAM) 1971-09-21 1972-08-30

Country Status (6)

Country Link
US (1) US3787312A (OSRAM)
CH (1) CH542772A (OSRAM)
DE (1) DE2242916C3 (OSRAM)
FR (1) FR2153241B1 (OSRAM)
GB (1) GB1360934A (OSRAM)
NL (1) NL150167B (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2472619A1 (fr) * 1979-12-18 1981-07-03 Ulvac Corp Appareil de revetement par pulverisation sous vide

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5385153A (en) * 1977-01-06 1978-07-27 Mitsubishi Electric Corp Forming method for light reflective metallic film and heat absorbent material film on face panel inside and its unit
JPS6037188B2 (ja) * 1981-08-27 1985-08-24 三菱マテリアル株式会社 スパツタリング装置
US4423701A (en) * 1982-03-29 1984-01-03 Energy Conversion Devices, Inc. Glow discharge deposition apparatus including a non-horizontally disposed cathode
US4389295A (en) * 1982-05-06 1983-06-21 Gte Products Corporation Thin film phosphor sputtering process
US4576830A (en) * 1984-11-05 1986-03-18 Chronar Corp. Deposition of materials
DE3623970A1 (de) * 1986-07-16 1988-01-28 Leybold Heraeus Gmbh & Co Kg Transporteinrichtung mit rollensystemen fuer vakuum-beschichtungsanlagen
US4911810A (en) * 1988-06-21 1990-03-27 Brown University Modular sputtering apparatus
DE69230493T2 (de) * 1991-04-04 2000-05-04 Seagate Technology, Inc. Verfahren und vorrichtung zum sputtern mit hoher geschwindigkeit
DE4139549A1 (de) * 1991-11-30 1993-06-03 Leybold Ag Vorrichtung fuer den transport von substraten
EP0572151A3 (en) * 1992-05-28 1995-01-18 Avx Corp Varistors with cathodically vaporized connections and method for depositing cathodically vaporized connections on varistors.
US5565838A (en) * 1992-05-28 1996-10-15 Avx Corporation Varistors with sputtered terminations
AU4652993A (en) 1992-06-26 1994-01-24 Materials Research Corporation Transport system for wafer processing line
DE4301189C2 (de) * 1993-01-19 2000-12-14 Leybold Ag Vorrichtung zum Beschichten von Substraten
DE4428136A1 (de) * 1994-08-09 1996-02-15 Leybold Ag Vakuum-Beschichtungsanlage
DE19630290C2 (de) * 1996-07-26 2000-08-10 Audi Ag Anlage zur Oberflächenbehandlung von Gegenständen, insbesondere von Fahrzeugkarosserien
PL204742B1 (pl) * 2002-05-06 2010-02-26 Guardian Industries Urządzenie powlekające do formowania pierwszej i drugiej powłoki na szklanym substracie
KR20100045124A (ko) * 2008-10-23 2010-05-03 삼성전자주식회사 스퍼터 트레이 이송 시스템
CN102061449B (zh) * 2009-11-16 2013-06-05 鸿富锦精密工业（深圳）有限公司 真空镀膜装置
DE102010017896A1 (de) * 2010-04-21 2011-10-27 Ald Vacuum Technologies Gmbh Vorrichtung und Verfahren zum Beschichten von Substraten nach dem EB/PVD-Verfahren

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1758531A (en) * 1926-10-22 1930-05-13 Elektrodenzerstaubung M B H Ge Vacuum dispersion coating process
US3294670A (en) * 1963-10-07 1966-12-27 Western Electric Co Apparatus for processing materials in a controlled atmosphere
US3288700A (en) * 1963-10-23 1966-11-29 Northern Electric Co Sputtering apparatus including a folded flexible conveyor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2472619A1 (fr) * 1979-12-18 1981-07-03 Ulvac Corp Appareil de revetement par pulverisation sous vide

Also Published As

Publication number Publication date
CH542772A (de) 1973-10-15
GB1360934A (en) 1974-07-24
DE2242916A1 (de) 1973-03-22
DE2242916B2 (de) 1974-10-03
NL150167B (nl) 1976-07-15
NL7116671A (OSRAM) 1973-03-23
US3787312A (en) 1974-01-22
FR2153241B1 (OSRAM) 1976-08-13
DE2242916C3 (de) 1975-05-15

Similar Documents

Publication Publication Date Title
FR2159417B1 (OSRAM)
FR2153241B1 (OSRAM)
FR2165646A5 (OSRAM)
AU465403B2 (OSRAM)
FR2150990B1 (OSRAM)
FR2158551B1 (OSRAM)
AU2875571A (OSRAM)
AU2927871A (OSRAM)
BG18213A1 (OSRAM)
BE791019A (OSRAM)
CH1047472A4 (OSRAM)
CH1043972A4 (OSRAM)
BG22047A1 (OSRAM)
CH559607A5 (OSRAM)
BG21382A3 (OSRAM)
BG18100A1 (OSRAM)
BG16939A1 (OSRAM)
CH1739772A4 (OSRAM)
BG20067A3 (OSRAM)
BG18733A1 (OSRAM)
BG18240A1 (OSRAM)
BE786277A (OSRAM)
BG18086A1 (OSRAM)
CH559606A5 (OSRAM)
CH559857A5 (OSRAM)

Legal Events

Date Code Title Description
ST Notification of lapse