FR2126761A5 - - Google Patents

Info

Publication number
FR2126761A5
FR2126761A5 FR7204062A FR7204062A FR2126761A5 FR 2126761 A5 FR2126761 A5 FR 2126761A5 FR 7204062 A FR7204062 A FR 7204062A FR 7204062 A FR7204062 A FR 7204062A FR 2126761 A5 FR2126761 A5 FR 2126761A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7204062A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Balzers Patent und Beteiligungs AG
Original Assignee
Balzers Patent und Beteiligungs AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Balzers Patent und Beteiligungs AG filed Critical Balzers Patent und Beteiligungs AG
Application granted granted Critical
Publication of FR2126761A5 publication Critical patent/FR2126761A5/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/546—Controlling the film thickness or evaporation rate using measurement on deposited material using crystal oscillators
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/06—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness
    • G01B7/063—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators
    • G01B7/066—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring thickness using piezoelectric resonators for measuring thickness of coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Length Measuring Devices Characterised By Use Of Acoustic Means (AREA)
FR7204062A 1971-02-10 1972-02-08 Expired FR2126761A5 (OSRAM)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH199871A CH537987A (de) 1971-02-10 1971-02-10 Einrichtung zur Überwachung der Aufdampfung beim Vakuumaufdampfen von dünnen Schichten

Publications (1)

Publication Number Publication Date
FR2126761A5 true FR2126761A5 (OSRAM) 1972-10-06

Family

ID=4223501

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7204062A Expired FR2126761A5 (OSRAM) 1971-02-10 1972-02-08

Country Status (5)

Country Link
CH (1) CH537987A (OSRAM)
DE (1) DE2204333A1 (OSRAM)
FR (1) FR2126761A5 (OSRAM)
GB (1) GB1315647A (OSRAM)
NL (1) NL7106221A (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2493508A1 (fr) * 1980-07-21 1982-05-07 Balzers Hochvakuum Tete de mesure a cristal piezoelectrique

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4210261B2 (ja) 2002-10-25 2009-01-14 サントル ドゥ ルシェルシュ ピュブリク − ガブリエル リップマン 分析目的で超高真空下で中性セシウムをインサイチュ堆積するための方法および装置
CN108027348A (zh) * 2015-09-21 2018-05-11 应用材料公司 用于测量沉积速率的测量组件及用于其的方法
KR20180067463A (ko) * 2016-10-25 2018-06-20 어플라이드 머티어리얼스, 인코포레이티드 증착 레이트를 측정하기 위한 측정 조립체, 증발 소스, 증착 장치, 및 이를 위한 방법

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2493508A1 (fr) * 1980-07-21 1982-05-07 Balzers Hochvakuum Tete de mesure a cristal piezoelectrique

Also Published As

Publication number Publication date
GB1315647A (en) 1973-05-02
DE2204333A1 (de) 1972-08-17
NL7106221A (OSRAM) 1972-08-14
CH537987A (de) 1973-06-15

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Legal Events

Date Code Title Description
ST Notification of lapse