FR2122169A5 - - Google Patents
Info
- Publication number
- FR2122169A5 FR2122169A5 FR7200716A FR7200716A FR2122169A5 FR 2122169 A5 FR2122169 A5 FR 2122169A5 FR 7200716 A FR7200716 A FR 7200716A FR 7200716 A FR7200716 A FR 7200716A FR 2122169 A5 FR2122169 A5 FR 2122169A5
- Authority
- FR
- France
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
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- C—CHEMISTRY; METALLURGY
- C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
- C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
- C08G75/00—Macromolecular compounds obtained by reactions forming a linkage containing sulfur with or without nitrogen, oxygen, or carbon in the main chain of the macromolecule
- C08G75/30—Polysulfonamides; Polysulfonimides
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- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/004—Photosensitive materials
- G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
- G03F7/0387—Polyamides or polyimides
Landscapes
- Physics & Mathematics (AREA)
- Chemical & Material Sciences (AREA)
- Spectroscopy & Molecular Physics (AREA)
- General Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Medicinal Chemistry (AREA)
- Polymers & Plastics (AREA)
- Organic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
- Polyamides (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| GB183471 | 1971-01-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR2122169A5 true FR2122169A5 (Direct) | 1972-08-25 |
Family
ID=9728821
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR7200716A Expired FR2122169A5 (Direct) | 1971-01-14 | 1972-01-11 |
Country Status (2)
| Country | Link |
|---|---|
| FR (1) | FR2122169A5 (Direct) |
| GB (1) | GB1335095A (Direct) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4107155A (en) | 1977-06-29 | 1978-08-15 | Eastman Kodak Company | Polysulfonamides |
| US4865950A (en) * | 1988-01-21 | 1989-09-12 | Eastman Kodak Co. | Laminate for the formation of beam leads for IC chip bonding featuring improved positive-working resist |
| KR100225956B1 (ko) * | 1997-01-10 | 1999-10-15 | 김영환 | 아민을 도입한 에이알에프 감광막 수지 |
| KR100321080B1 (ko) | 1997-12-29 | 2002-11-22 | 주식회사 하이닉스반도체 | 공중합체수지와이의제조방법및이수지를이용한포토레지스트 |
| KR20000015014A (ko) | 1998-08-26 | 2000-03-15 | 김영환 | 신규의 포토레지스트용 단량체, 중합체 및 이를 이용한 포토레지스트 조성물 |
| JP3587743B2 (ja) | 1998-08-26 | 2004-11-10 | 株式会社ハイニックスセミコンダクター | フォトレジスト単量体とその製造方法、フォトレジスト共重合体とその製造方法、フォトレジスト組成物、フォトレジストパターン形成方法、および、半導体素子。 |
| US6569971B2 (en) | 1998-08-27 | 2003-05-27 | Hyundai Electronics Industries Co., Ltd. | Polymers for photoresist and photoresist compositions using the same |
| JP2012073612A (ja) * | 2010-09-14 | 2012-04-12 | Rohm & Haas Electronic Materials Llc | マルチアミド成分を含むフォトレジスト |
| KR102328686B1 (ko) * | 2016-05-12 | 2021-11-19 | 노우록키 다니엘 제이. | 폴리술폰아미드 재분배 조성물 및 이의 사용 방법 |
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1971
- 1971-01-14 GB GB1335095D patent/GB1335095A/en not_active Expired
-
1972
- 1972-01-11 FR FR7200716A patent/FR2122169A5/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| GB1335095A (en) | 1973-10-24 |
Similar Documents
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| ST | Notification of lapse |