FR2099910A5 - Double layer resist - for diffusing aluminium and gallium into silicon semiconductors - Google Patents

Double layer resist - for diffusing aluminium and gallium into silicon semiconductors

Info

Publication number
FR2099910A5
FR2099910A5 FR7123122A FR7123122A FR2099910A5 FR 2099910 A5 FR2099910 A5 FR 2099910A5 FR 7123122 A FR7123122 A FR 7123122A FR 7123122 A FR7123122 A FR 7123122A FR 2099910 A5 FR2099910 A5 FR 2099910A5
Authority
FR
France
Prior art keywords
gallium
double layer
layer resist
silicon semiconductors
diffusing aluminium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7123122A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Motorola Solutions Inc
Original Assignee
Motorola Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Motorola Inc filed Critical Motorola Inc
Application granted granted Critical
Publication of FR2099910A5 publication Critical patent/FR2099910A5/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L23/00—Details of semiconductor or other solid state devices
    • H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
    • H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
    • H01L23/291—Oxides or nitrides or carbides, e.g. ceramics, glass
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
    • H01L2924/0001—Technical content checked by a classifier
    • H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T24/00—Buckles, buttons, clasps, etc.
    • Y10T24/23—Bedclothes holders
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T24/00—Buckles, buttons, clasps, etc.
    • Y10T24/44—Clasp, clip, support-clamp, or required component thereof
    • Y10T24/44641—Clasp, clip, support-clamp, or required component thereof having gripping member formed from, biased by, or mounted on resilient member
    • Y10T24/44744—Clasp, clip, support-clamp, or required component thereof having gripping member formed from, biased by, or mounted on resilient member with position locking-means for engaging faces
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T24/00—Buckles, buttons, clasps, etc.
    • Y10T24/44—Clasp, clip, support-clamp, or required component thereof
    • Y10T24/44641—Clasp, clip, support-clamp, or required component thereof having gripping member formed from, biased by, or mounted on resilient member
    • Y10T24/44769—Opposed engaging faces on gripping member formed from single piece of resilient material
    • Y10T24/44872—Opposed engaging faces on gripping member formed from single piece of resilient material having specific handle structure

Abstract

The resist comprises a SiO2 layer 500-5000 angstroms thick covered by an alumina layer 2000-5000 angstroms thick. The alumina prevents undesired diffusion of Al and Ga into the semiconductive Si slice during doping processes.
FR7123122A 1970-06-24 1971-06-24 Double layer resist - for diffusing aluminium and gallium into silicon semiconductors Expired FR2099910A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4937770A 1970-06-24 1970-06-24

Publications (1)

Publication Number Publication Date
FR2099910A5 true FR2099910A5 (en) 1972-03-17

Family

ID=21959497

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7123122A Expired FR2099910A5 (en) 1970-06-24 1971-06-24 Double layer resist - for diffusing aluminium and gallium into silicon semiconductors

Country Status (4)

Country Link
BE (1) BE768965A (en)
DE (2) DE7124154U (en)
FR (1) FR2099910A5 (en)
NL (1) NL7108668A (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6322712B1 (en) 1999-09-01 2001-11-27 Micron Technology, Inc. Buffer layer in flat panel display

Also Published As

Publication number Publication date
DE7124154U (en) 1971-11-11
BE768965A (en) 1971-12-24
DE2131143A1 (en) 1972-02-10
NL7108668A (en) 1971-12-28

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Legal Events

Date Code Title Description
ST Notification of lapse