FR2096224A5 - - Google Patents

Info

Publication number
FR2096224A5
FR2096224A5 FR7121228A FR7121228A FR2096224A5 FR 2096224 A5 FR2096224 A5 FR 2096224A5 FR 7121228 A FR7121228 A FR 7121228A FR 7121228 A FR7121228 A FR 7121228A FR 2096224 A5 FR2096224 A5 FR 2096224A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7121228A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
GAF Corp
Original Assignee
GAF Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by GAF Corp filed Critical GAF Corp
Application granted granted Critical
Publication of FR2096224A5 publication Critical patent/FR2096224A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03C—PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES; PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR, STEREO-PHOTOGRAPHIC PROCESSES; AUXILIARY PROCESSES IN PHOTOGRAPHY
    • G03C1/00—Photosensitive materials
    • G03C1/52—Compositions containing diazo compounds as photosensitive substances

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
FR7121228A 1970-06-11 1971-06-11 Expired FR2096224A5 (enExample)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4559070A 1970-06-11 1970-06-11

Publications (1)

Publication Number Publication Date
FR2096224A5 true FR2096224A5 (enExample) 1972-02-11

Family

ID=21938804

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7121228A Expired FR2096224A5 (enExample) 1970-06-11 1971-06-11

Country Status (13)

Country Link
US (1) US3744904A (enExample)
JP (1) JPS5040008B1 (enExample)
BE (1) BE768355A (enExample)
CA (1) CA944203A (enExample)
CH (1) CH558029A (enExample)
DD (1) DD99866A5 (enExample)
DE (2) DE2166726A1 (enExample)
FR (1) FR2096224A5 (enExample)
GB (1) GB1360637A (enExample)
IL (1) IL36862A0 (enExample)
IT (1) IT943583B (enExample)
NL (1) NL7107987A (enExample)
SE (2) SE380360B (enExample)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL7201333A (enExample) * 1972-02-02 1973-08-06
JPS50902A (enExample) * 1973-05-04 1975-01-08
JPS5065232A (enExample) * 1973-10-09 1975-06-02
JPS5230848B2 (enExample) * 1973-10-09 1977-08-11
US3936301A (en) * 1974-04-01 1976-02-03 Bell Telephone Laboratories, Incorporated Process for contact photolithography utilizing a photomask having indented channels
US4126466A (en) * 1974-07-22 1978-11-21 E. I. Du Pont De Nemours And Company Composite, mask-forming, photohardenable elements
US4205989A (en) * 1976-04-14 1980-06-03 Kimoto & Co., Ltd. Dry system image producing element
US4374911A (en) * 1978-04-28 1983-02-22 International Business Machines Corporation Photo method of making tri-level density photomask
US4536240A (en) * 1981-12-02 1985-08-20 Advanced Semiconductor Products, Inc. Method of forming thin optical membranes
CA2019693A1 (en) * 1989-07-07 1991-01-07 Karen Ann Graziano Acid-hardening photoresists of improved sensitivity
DE4107762B4 (de) * 1990-03-09 2006-07-13 Dai Nippon Printing Co., Ltd. Verfahren zum Herstellen von Master- und Arbeitsmusterplatten für den Ätzprozess
US5801833A (en) * 1991-03-08 1998-09-01 Dai Nippon Printing Co., Ltd. Method of producing master and working pattern plates for etching and photolithographic apparatus therefor
US6350555B1 (en) * 1998-01-14 2002-02-26 Precision Coatings, Inc. Direct write imaging medium
EP2562599B1 (en) 2009-01-29 2014-12-10 Digiflex Ltd. Process for producing a photomask on a photopolymeric surface
WO2011090355A2 (ko) 2010-01-22 2011-07-28 (주)Lg화학 광배향막 배향 처리용 점착 필름

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3510371A (en) * 1967-01-25 1970-05-05 Itt Method of making an ultraviolet sensitive template
US3592649A (en) * 1967-04-21 1971-07-13 Mead Corp Color photographic process for producing visually transparent but photographically opaque photomasks
US3542612A (en) * 1967-08-11 1970-11-24 Western Electric Co Photolithographic masks and methods for their manufacture

Also Published As

Publication number Publication date
DE2166726A1 (de) 1975-08-14
CA944203A (en) 1974-03-26
GB1360637A (en) 1974-07-17
IL36862A0 (en) 1971-07-28
DE2128654A1 (de) 1971-12-16
CH558029A (de) 1975-01-15
SE7500730L (enExample) 1975-01-23
BE768355A (fr) 1971-11-03
NL7107987A (enExample) 1971-12-14
SE380360B (sv) 1975-11-03
IT943583B (it) 1973-04-10
US3744904A (en) 1973-07-10
SE403523B (sv) 1978-08-21
DD99866A5 (enExample) 1973-08-20
JPS5040008B1 (enExample) 1975-12-20

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Legal Events

Date Code Title Description
ST Notification of lapse