FR2078240A5 - - Google Patents

Info

Publication number
FR2078240A5
FR2078240A5 FR7103906A FR7103906A FR2078240A5 FR 2078240 A5 FR2078240 A5 FR 2078240A5 FR 7103906 A FR7103906 A FR 7103906A FR 7103906 A FR7103906 A FR 7103906A FR 2078240 A5 FR2078240 A5 FR 2078240A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7103906A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG filed Critical Siemens AG
Application granted granted Critical
Publication of FR2078240A5 publication Critical patent/FR2078240A5/fr
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
    • H01J37/256—Tubes for spot-analysing by electron or ion beams; Microanalysers using scanning beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
FR7103906A 1970-02-07 1971-02-05 Expired FR2078240A5 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE2005682A DE2005682C3 (de) 1970-02-07 1970-02-07 Vorrichtung zum Absaugen der Sekundärelektronen in einem Rasterelektronenmikroskop oder einem Elektronenstrahl-Mikroanalysator

Publications (1)

Publication Number Publication Date
FR2078240A5 true FR2078240A5 (de) 1971-11-05

Family

ID=5761726

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7103906A Expired FR2078240A5 (de) 1970-02-07 1971-02-05

Country Status (5)

Country Link
US (1) US3736422A (de)
CH (1) CH524140A (de)
DE (1) DE2005682C3 (de)
FR (1) FR2078240A5 (de)
GB (1) GB1284708A (de)

Families Citing this family (24)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1403946A (en) * 1973-05-23 1975-08-28 Mullard Ltd Spectroscopy
JPS5428710B2 (de) * 1972-11-01 1979-09-18
GB1447983A (en) * 1973-01-10 1976-09-02 Nat Res Dev Detector for electron microscopes
US4086491A (en) * 1977-02-04 1978-04-25 The United States Of America As Represented By The Secretary Of The Navy Direct measurement of the electron beam of a scanning electron microscope
DE2922325A1 (de) * 1979-06-01 1980-12-11 Philips Patentverwaltung Rasterelektronenmikroskop
GB8604004D0 (en) * 1986-02-18 1986-03-26 Cambridge Instr Ltd Specimen chamber
EP0263839A1 (de) * 1986-02-18 1988-04-20 Cambridge Instruments Limited Probekammer für rasterelektronenstrahlgeräte
US4933552A (en) * 1988-10-06 1990-06-12 International Business Machines Corporation Inspection system utilizing retarding field back scattered electron collection
JP2927627B2 (ja) * 1992-10-20 1999-07-28 株式会社日立製作所 走査電子顕微鏡
JP3194552B2 (ja) * 1993-06-24 2001-07-30 富士通株式会社 荷電粒子ビーム露光装置
JP3251875B2 (ja) * 1996-05-10 2002-01-28 株式会社東芝 荷電粒子ビーム露光装置
JP3564958B2 (ja) * 1997-08-07 2004-09-15 株式会社日立製作所 電子ビームを用いた検査方法及び検査装置
DE69901787T2 (de) * 1999-03-31 2002-11-21 Advantest Corp Verfahren und Vorrichtung zur Abbildung eines Oberflächenpotentials
US6586736B1 (en) * 1999-09-10 2003-07-01 Kla-Tencor, Corporation Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample
US6664546B1 (en) 2000-02-10 2003-12-16 Kla-Tencor In-situ probe for optimizing electron beam inspection and metrology based on surface potential
JP2004513477A (ja) * 2000-10-31 2004-04-30 フェイ　カンパニ 静電対物に調整可能な最終電極を設けたｓｅｍ
JP4443167B2 (ja) 2003-08-25 2010-03-31 株式会社日立製作所 走査型電子顕微鏡
EP1648018B1 (de) * 2004-10-14 2017-02-22 ICT Integrated Circuit Testing Gesellschaft für Halbleiterprüftechnik mbH Fokusierungslinse und Ladungsträger-Strahlgerät zum Betrieb bei Aufprallwinkeln grösser Null
JP5645386B2 (ja) * 2009-09-30 2014-12-24 株式会社日立製作所 電磁場印加装置
DE102010011059A1 (de) 2010-03-11 2011-09-15 Global Beam Technologies Ag Verfahren und Vorrichtung zur Herstellung eines Bauteils
WO2012109340A1 (en) 2011-02-08 2012-08-16 Atti International Services Company, Inc. Electron beam profile measurement system and method with "moms"
JP5852474B2 (ja) 2012-03-01 2016-02-03 株式会社日立ハイテクノロジーズ 荷電粒子線装置
US9564291B1 (en) 2014-01-27 2017-02-07 Mochii, Inc. Hybrid charged-particle beam and light beam microscopy
US9997331B1 (en) * 2014-01-27 2018-06-12 Mochii, Inc. Charged-particle beam microscopy

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3103584A (en) * 1963-09-10 Electron microanalyzer system
NL285495A (de) * 1961-11-18
US3158733A (en) * 1962-09-12 1964-11-24 Nat Res Corp Focus control for electron beam heating
US3315157A (en) * 1963-07-22 1967-04-18 Hitachi Ltd Apparatus for impedance measurement through the use of electron beam probes
GB1128107A (en) * 1965-06-23 1968-09-25 Hitachi Ltd Scanning electron microscope

Also Published As

Publication number Publication date
DE2005682B2 (de) 1973-10-18
CH524140A (de) 1972-06-15
DE2005682A1 (de) 1971-09-09
GB1284708A (en) 1972-08-09
DE2005682C3 (de) 1974-05-09
US3736422A (en) 1973-05-29

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Legal Events

Date Code Title Description
ST Notification of lapse