JPS5428710B2 - - Google Patents
Info
- Publication number
- JPS5428710B2 JPS5428710B2 JP10966272A JP10966272A JPS5428710B2 JP S5428710 B2 JPS5428710 B2 JP S5428710B2 JP 10966272 A JP10966272 A JP 10966272A JP 10966272 A JP10966272 A JP 10966272A JP S5428710 B2 JPS5428710 B2 JP S5428710B2
- Authority
- JP
- Japan
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10966272A JPS5428710B2 (de) | 1972-11-01 | 1972-11-01 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10966272A JPS5428710B2 (de) | 1972-11-01 | 1972-11-01 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS4967558A JPS4967558A (de) | 1974-07-01 |
JPS5428710B2 true JPS5428710B2 (de) | 1979-09-18 |
Family
ID=14515968
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10966272A Expired JPS5428710B2 (de) | 1972-11-01 | 1972-11-01 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5428710B2 (de) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0344301Y2 (de) * | 1984-07-13 | 1991-09-18 |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5772326A (en) * | 1980-10-24 | 1982-05-06 | Toshiba Corp | Insulation composition of electron beam exposing equipment |
CN101243531A (zh) * | 2005-08-18 | 2008-08-13 | 电子线技术院株式会社 | 改变电子柱中的电子束的能量的方法 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2005682A1 (de) * | 1970-02-07 | 1971-09-09 | Siemens Ag | Vorrichtung fur die Elektronen Rastermikroskopie und die Elektronenstrahl Mikroanalyse |
-
1972
- 1972-11-01 JP JP10966272A patent/JPS5428710B2/ja not_active Expired
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE2005682A1 (de) * | 1970-02-07 | 1971-09-09 | Siemens Ag | Vorrichtung fur die Elektronen Rastermikroskopie und die Elektronenstrahl Mikroanalyse |
US3736422A (en) * | 1970-02-07 | 1973-05-29 | Siemens Ag | Apparatus for improving the signal information in the electron beam examination of sample topography |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH0344301Y2 (de) * | 1984-07-13 | 1991-09-18 |
Also Published As
Publication number | Publication date |
---|---|
JPS4967558A (de) | 1974-07-01 |