FR2075408A5 - - Google Patents

Info

Publication number
FR2075408A5
FR2075408A5 FR7100681A FR7100681A FR2075408A5 FR 2075408 A5 FR2075408 A5 FR 2075408A5 FR 7100681 A FR7100681 A FR 7100681A FR 7100681 A FR7100681 A FR 7100681A FR 2075408 A5 FR2075408 A5 FR 2075408A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7100681A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ernst Leitz Wetzlar GmbH
Original Assignee
Ernst Leitz Wetzlar GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ernst Leitz Wetzlar GmbH filed Critical Ernst Leitz Wetzlar GmbH
Application granted granted Critical
Publication of FR2075408A5 publication Critical patent/FR2075408A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01D—MEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D5/00—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable
    • G01D5/26—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light
    • G01D5/32—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light
    • G01D5/34—Mechanical means for transferring the output of a sensing member; Means for converting the output of a sensing member to another variable where the form or nature of the sensing member does not constrain the means for converting; Transducers not specially adapted for a specific variable characterised by optical transfer means, i.e. using infrared, visible, or ultraviolet light with attenuation or whole or partial obturation of beams of light the beams of light being detected by photocells
    • G01D5/36—Forming the light into pulses
    • G01D5/38—Forming the light into pulses by diffraction gratings

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optical Transform (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
FR7100681A 1970-01-27 1971-01-11 Expired FR2075408A5 (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE19702003492 DE2003492A1 (de) 1970-01-27 1970-01-27 Messverfahren fuer Schrittgeber zum Messen von Laengen oder Winkeln sowie Anordnungen zur Durchfuehrung dieses Messverfahrens

Publications (1)

Publication Number Publication Date
FR2075408A5 true FR2075408A5 (fr) 1971-10-08

Family

ID=5760582

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7100681A Expired FR2075408A5 (fr) 1970-01-27 1971-01-11

Country Status (5)

Country Link
US (1) US3756723A (fr)
CH (1) CH533294A (fr)
DE (1) DE2003492A1 (fr)
FR (1) FR2075408A5 (fr)
GB (1) GB1306632A (fr)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0365806A2 (fr) * 1988-10-28 1990-05-02 Dr. Johannes Heidenhain GmbH Dispositif de mesure de position angulaire
WO1992021934A1 (fr) 1991-05-30 1992-12-10 Rank Taylor Hobson Limited Mesure de position
EP0544020A1 (fr) * 1991-11-23 1993-06-02 Dr. Johannes Heidenhain GmbH Dispositif interférentiel de mesure
EP0579846A1 (fr) * 1992-07-18 1994-01-26 Dr. Johannes Heidenhain GmbH Dispositif optique
EP0637730A1 (fr) * 1993-07-31 1995-02-08 Maz Mikroelectronik Anwendungszentrum Hamburg Gmbh Codeur angulaire resp. détecteur de positions angulaire resp. générateur d'impulsions rotationel

Families Citing this family (51)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL172202C (nl) * 1971-03-11 1983-07-18 Philips Nv Inrichting voor het uitlezen van een plaatvormige informatiedrager bevattende in optische vorm gecodeerde beeld- en/of geluidssignalen.
DE2241443A1 (de) * 1972-08-23 1974-03-07 Leitz Ernst Gmbh Verfahren zum automatischen fotoelektrischen einfang von lokalen aenderungen optisch wirksamer objektstrukturen sowie einrichtungen zu seiner durchfuehrung
GB1443220A (en) * 1972-12-19 1976-07-21 Leitz Ernst Gmbh Photo-electric incremental transducer
FR2222666B1 (fr) * 1973-03-19 1976-11-05 Thomson Brandt
NL7313454A (nl) * 1973-10-01 1975-04-03 Philips Nv Opto-elektronisch stelsel voor het bepalen van een king tussen de werkelijke positie van een stralings kterend vlak in een optisch afbeeldingsstelsel en d ste positie van dit vlak.
US3865483A (en) * 1974-03-21 1975-02-11 Ibm Alignment illumination system
DE2427236C2 (de) * 1974-06-06 1985-09-05 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Beugung von interferenzfähigem Licht
DE2451668A1 (de) * 1974-10-31 1976-05-06 Leitz Ernst Gmbh Anordnung zur geometrischen trennung von lichtfluessen in abbildungssystemen
US3957378A (en) * 1974-11-25 1976-05-18 The Bendix Corporation Two-axis moire fringe displacement transducer
DE2460805C2 (de) * 1974-12-21 1983-01-27 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Optischer Entfernungsmesser
US4211489A (en) * 1978-01-16 1980-07-08 Rca Corporation Photomask alignment system
US4332473A (en) * 1979-01-31 1982-06-01 Tokyo Shibaura Denki Kabushiki Kaisha Apparatus for detecting a mutual positional relationship of two sample members
FR2450468A1 (fr) * 1979-02-27 1980-09-26 Thomson Csf Systeme optique d'alignement de deux motifs et photorepeteur mettant en oeuvre un tel systeme
EP0045321B1 (fr) * 1980-07-31 1986-12-10 International Business Machines Corporation Procédé et dispositif de mesure optique de distances
CA1141946A (fr) * 1981-08-21 1983-03-01 National Research Council Of Canada Dispositif de controle par interferometrie
US4629886A (en) * 1983-03-23 1986-12-16 Yokogawa Hokushin Electric Corporation High resolution digital diffraction grating scale encoder
EP0311144B1 (fr) * 1983-11-04 1993-07-14 Sony Magnescale, Inc. Instrument optique pour mesurer un déplacement
US4967072A (en) * 1984-09-05 1990-10-30 Canon Kabushiki Kaisha Interferometric rotating condition detection apparatus
JPS60190812A (ja) * 1984-10-26 1985-09-28 Hitachi Ltd 位置検出器
JPS6212814A (ja) * 1985-07-10 1987-01-21 Canon Inc ロ−タリ−エンコ−ダ−
DE3700906C2 (de) * 1986-01-14 1995-09-28 Canon Kk Verschlüßler
DE3700777C2 (de) * 1986-01-14 1994-05-05 Canon Kk Vorrichtung zur Erfassung der Position eines Objektes
DE3706277C2 (de) * 1986-02-28 1995-04-27 Canon Kk Drehungsmeßgeber
DE3633574A1 (de) * 1986-10-02 1988-04-14 Heidenhain Gmbh Dr Johannes Lichtelektrische winkelmesseinrichtung
JPS63115012A (ja) * 1986-10-31 1988-05-19 Canon Inc 変位測定装置
US5051579A (en) * 1987-04-03 1991-09-24 Canon Kabushiki Kaisha Optical scale encoder with light intensity alarm
FR2615281B1 (fr) * 1987-05-11 1996-08-23 Canon Kk Dispositif de mesure d'une distance en mouvement relatif de deux objets mobiles l'un par rapport a l'autre
JPH073344B2 (ja) * 1987-06-15 1995-01-18 キヤノン株式会社 エンコ−ダ−
DE3810165C1 (fr) * 1988-03-25 1989-07-27 Dr. Johannes Heidenhain Gmbh, 8225 Traunreut, De
JPH0718714B2 (ja) * 1988-05-10 1995-03-06 キヤノン株式会社 エンコーダー
JPH0778433B2 (ja) * 1988-07-19 1995-08-23 キヤノン株式会社 ロータリーエンコーダ
JP2586122B2 (ja) * 1988-11-18 1997-02-26 キヤノン株式会社 ロータリーエンコーダ
US5035507A (en) * 1988-12-21 1991-07-30 Mitutoyo Corporation Grating-interference type displacement meter apparatus
DE3905730C2 (de) * 1989-02-24 1995-06-14 Heidenhain Gmbh Dr Johannes Positionsmeßeinrichtung
US5216478A (en) * 1989-03-31 1993-06-01 Canon Kabushiki Kaisha Doppler velocity meter
US5323001A (en) * 1989-12-26 1994-06-21 Canon Kabushiki Kaisha Rotary encoder with scale member and interference of zero and first order diffraction beam
EP0439804B1 (fr) * 1989-12-26 1995-09-20 Canon Kabushiki Kaisha Appareil-détecteur de rotation
US5256885A (en) * 1990-05-21 1993-10-26 Canon Kabushiki Kaisha Doppler velocimeter having a diffraction grating and dual lens groups with identical focal distances
US5272512A (en) * 1990-09-21 1993-12-21 Canon Kabushiki Kaisha Displacement information detection apparatus
US5104225A (en) * 1991-01-25 1992-04-14 Mitutoyo Corporation Position detector and method of measuring position
JPH05256666A (ja) * 1992-03-13 1993-10-05 Canon Inc ロータリーエンコーダー
DE4302313C2 (de) * 1993-01-28 1996-12-05 Heidenhain Gmbh Dr Johannes Mehrkoordinaten-Meßeinrichtung
JPH074993A (ja) * 1993-03-23 1995-01-10 Ricoh Co Ltd エンコーダ装置
US5898486A (en) * 1994-03-25 1999-04-27 International Business Machines Corporation Portable moire interferometer and corresponding moire interferometric method
US6407815B2 (en) * 1998-07-02 2002-06-18 Sony Precision Technology Inc. Optical displacement measurement system
US6587211B1 (en) 1999-07-28 2003-07-01 Creo Srl Interferometric torque and power sensor
US6744520B2 (en) * 2002-03-04 2004-06-01 Industrial Technology Research Institute Method for measuring two-dimensional displacement using conjugate optics
TWI394934B (zh) * 2004-12-13 2013-05-01 尼康股份有限公司 Photoelectric encoder
JP4899455B2 (ja) * 2004-12-13 2012-03-21 株式会社ニコン 光電式エンコーダ
DE102011050030B4 (de) * 2011-05-02 2013-03-28 Scanlab Ag Positionsdetektor und Lichtablenkvorrichtung mit Positionsdetektor
CN109916314B (zh) * 2019-04-29 2020-03-31 西安交通大学 一种时空域调制光栅位移传感方法与测量系统

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1136834B (de) * 1959-04-09 1962-09-20 Leitz Ernst Gmbh Vorrichtung zum Messen von Lageaenderungen
US3344700A (en) * 1961-05-23 1967-10-03 British Aircraft Corp Ltd Displacement measuring system
DE1548703B2 (de) * 1966-07-16 1971-04-15 Ernst Leitz Gmbh, 6330 Wetzlar Fotoelektrischer schrittgeber fuer vierphasen signale
CH457204A (de) * 1966-07-21 1968-05-31 Leitz Ernst Gmbh Fotoelektrischer Schrittgeber
DE1548707C3 (de) * 1966-07-26 1979-02-15 Ernst Leitz Wetzlar Gmbh, 6330 Wetzlar Fotoelektrischer Schrittgeber
NL6813749A (fr) * 1968-09-26 1970-04-01

Cited By (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0365806A2 (fr) * 1988-10-28 1990-05-02 Dr. Johannes Heidenhain GmbH Dispositif de mesure de position angulaire
EP0365806A3 (fr) * 1988-10-28 1991-01-09 Dr. Johannes Heidenhain GmbH Dispositif de mesure de position angulaire
WO1992021934A1 (fr) 1991-05-30 1992-12-10 Rank Taylor Hobson Limited Mesure de position
US5517307A (en) * 1991-05-30 1996-05-14 Rank Taylor Hobson Limited Probe measurement apparatus using a curved grating displacement interferometer
EP0729007A2 (fr) * 1991-05-30 1996-08-28 Rank Taylor Hobson Limited Mesure de positions
EP0729007A3 (fr) * 1991-05-30 1997-09-17 Rank Taylor Hobson Ltd Mesure de positions
EP0544020A1 (fr) * 1991-11-23 1993-06-02 Dr. Johannes Heidenhain GmbH Dispositif interférentiel de mesure
EP0579846A1 (fr) * 1992-07-18 1994-01-26 Dr. Johannes Heidenhain GmbH Dispositif optique
US5760959A (en) * 1992-07-18 1998-06-02 Dr. Johannes Heidenhain Gmbh Interferential position measuring device with three detectors
EP0637730A1 (fr) * 1993-07-31 1995-02-08 Maz Mikroelectronik Anwendungszentrum Hamburg Gmbh Codeur angulaire resp. détecteur de positions angulaire resp. générateur d'impulsions rotationel

Also Published As

Publication number Publication date
US3756723A (en) 1973-09-04
DE2003492A1 (de) 1971-08-12
CH533294A (de) 1973-01-31
GB1306632A (en) 1973-02-14

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Legal Events

Date Code Title Description
ST Notification of lapse