FR2052373A5 - - Google Patents

Info

Publication number
FR2052373A5
FR2052373A5 FR7017088A FR7017088A FR2052373A5 FR 2052373 A5 FR2052373 A5 FR 2052373A5 FR 7017088 A FR7017088 A FR 7017088A FR 7017088 A FR7017088 A FR 7017088A FR 2052373 A5 FR2052373 A5 FR 2052373A5
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR7017088A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of FR2052373A5 publication Critical patent/FR2052373A5/fr
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B27/00—Photographic printing apparatus
    • G03B27/02—Exposure apparatus for contact printing
    • G03B27/14—Details
    • G03B27/18—Maintaining or producing contact pressure between original and light-sensitive material
    • G03B27/20—Maintaining or producing contact pressure between original and light-sensitive material by using a vacuum or fluid pressure

Landscapes

  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Projection-Type Copiers In General (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
FR7017088A 1969-06-23 1970-05-12 Expired FR2052373A5 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US83532169A 1969-06-23 1969-06-23

Publications (1)

Publication Number Publication Date
FR2052373A5 true FR2052373A5 (en) 1971-04-09

Family

ID=25269209

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7017088A Expired FR2052373A5 (en) 1969-06-23 1970-05-12

Country Status (6)

Country Link
US (1) US3604800A (en)
JP (1) JPS4938726B1 (en)
CA (1) CA936398A (en)
DE (1) DE2028181A1 (en)
FR (1) FR2052373A5 (en)
GB (1) GB1287340A (en)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3834815A (en) * 1973-07-06 1974-09-10 Ipt Corp Photocopying apparatus with vacuum means
GB1511332A (en) * 1974-04-30 1978-05-17 Hoechst Ag Printing frame
JPS51105012U (en) * 1975-02-18 1976-08-23
US4007987A (en) * 1976-01-12 1977-02-15 Tamarack Scientific Co. Inc. Vacuum contact printing system and process for electronic circuit photomask replication
US4054383A (en) * 1976-02-02 1977-10-18 International Business Machines Corporation Jig and process for contact printing
EP0225941B1 (en) * 1985-12-17 1990-05-23 Agfa-Gevaert N.V. Vacuum contact exposure apparatus
CS263521B1 (en) * 1987-04-24 1989-04-14 Slavata Bohumil Chuck frame of contact copying machine for working masks copying
FR2667957B1 (en) * 1990-10-15 1993-10-22 Albert Visage DEVICE FOR REPRODUCING IMAGES, BY CONTACT, ON A BLANK PHOTOGRAPHIC FILM FROM A TRANSPARENT ORIGINAL.
CN113391525A (en) * 2021-06-08 2021-09-14 吉林华微电子股份有限公司 Photoetching plate copying machine and photoetching plate copying system

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3521953A (en) * 1968-03-13 1970-07-28 Kulicke & Soffa Ind Inc Adjustable separation wafer clamp

Also Published As

Publication number Publication date
JPS4938726B1 (en) 1974-10-19
DE2028181A1 (en) 1970-12-23
GB1287340A (en) 1972-08-31
US3604800A (en) 1971-09-14
CA936398A (en) 1973-11-06

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Legal Events

Date Code Title Description
ST Notification of lapse