FR2034981A1 - - Google Patents

Info

Publication number
FR2034981A1
FR2034981A1 FR7008138A FR7008138A FR2034981A1 FR 2034981 A1 FR2034981 A1 FR 2034981A1 FR 7008138 A FR7008138 A FR 7008138A FR 7008138 A FR7008138 A FR 7008138A FR 2034981 A1 FR2034981 A1 FR 2034981A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR7008138A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Publication of FR2034981A1 publication Critical patent/FR2034981A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement, ion-optical arrangement
    • H01J37/09—Diaphragms; Shields associated with electron or ion-optical arrangements; Compensation of disturbing fields

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Details Of Television Scanning (AREA)
FR7008138A 1969-03-17 1970-03-06 Withdrawn FR2034981A1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019369 1969-03-17

Publications (1)

Publication Number Publication Date
FR2034981A1 true FR2034981A1 (de) 1970-12-18

Family

ID=12020326

Family Applications (1)

Application Number Title Priority Date Filing Date
FR7008138A Withdrawn FR2034981A1 (de) 1969-03-17 1970-03-06

Country Status (4)

Country Link
US (1) US3634684A (de)
DE (1) DE2012431B2 (de)
FR (1) FR2034981A1 (de)
GB (1) GB1308971A (de)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3787696A (en) * 1972-03-15 1974-01-22 Etec Corp Scanning electron microscope electron-optical column construction
FR2520553A1 (fr) * 1982-01-22 1983-07-29 Cameca Appareil d'optique electronique comportant des elements en graphite pyrolytique
FR2597259A1 (fr) * 1986-04-15 1987-10-16 Thomson Csf Dispositif a faisceau electronique pour projeter l'image d'un objet sur un echantillon
JP3117950B2 (ja) * 1998-05-21 2000-12-18 セイコーインスツルメンツ株式会社 荷電粒子装置
US7863563B2 (en) * 2007-03-08 2011-01-04 International Business Machines Corporation Carbon tube for electron beam application
EP3333877A1 (de) * 2016-12-07 2018-06-13 JEOL Ltd. Einsatzrohr und elektronenmikroskop
EP3338857B1 (de) * 2016-12-21 2021-08-11 RaySearch Laboratories AB System und verfahren zur bestimmung eines behandlungsplans für die aktive ionenstrahlbehandlung
EP3591685A1 (de) * 2018-07-06 2020-01-08 FEI Company Elektronenmikroskop mit verbesserter abbildungsauflösung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB516620A (en) * 1938-06-02 1940-01-08 Francois Joseph Gerard Van Den Improvements in cathode ray tubes
US2213176A (en) * 1939-06-06 1940-08-27 Rca Corp Television transmitting tube
US2959705A (en) * 1952-09-18 1960-11-08 American Optical Corp Shielded tube and method of making the same

Also Published As

Publication number Publication date
DE2012431A1 (de) 1970-09-24
GB1308971A (en) 1973-03-07
US3634684A (en) 1972-01-11
DE2012431B2 (de) 1974-02-21

Similar Documents

Publication Publication Date Title
AU2270770A (de)
AU465413B2 (de)
AU429630B2 (de)
AU450150B2 (de)
AU2355770A (de)
AU470301B1 (de)
AU5113869A (de)
AU470661B1 (de)
AT308690B (de)
AU442322B2 (de)
AU428129B2 (de)
AU438128B2 (de)
AU428131B2 (de)
CS149754B1 (de)
AU1036070A (de)
AR203167Q (de)
AU5077469A (de)
AU4540468A (de)
AU5133369A (de)
AU4949169A (de)
CS148824B1 (de)
AU4923469A (de)
BE742130A (de)
BG17750A3 (de)
AU4815038A (de)

Legal Events

Date Code Title Description
ST Notification of lapse