FR2009759A1 - - Google Patents

Info

Publication number
FR2009759A1
FR2009759A1 FR6917838A FR6917838A FR2009759A1 FR 2009759 A1 FR2009759 A1 FR 2009759A1 FR 6917838 A FR6917838 A FR 6917838A FR 6917838 A FR6917838 A FR 6917838A FR 2009759 A1 FR2009759 A1 FR 2009759A1
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
FR6917838A
Other languages
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Publication of FR2009759A1 publication Critical patent/FR2009759A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/34—Gas-filled discharge tubes operating with cathodic sputtering
    • H01J37/3402—Gas-filled discharge tubes operating with cathodic sputtering using supplementary magnetic fields
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34—Sputtering
    • C23C14/35—Sputtering by application of a magnetic field, e.g. magnetron sputtering

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
FR6917838A 1968-05-31 1969-05-30 Withdrawn FR2009759A1 (enrdf_load_stackoverflow)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US73359468A 1968-05-31 1968-05-31

Publications (1)

Publication Number Publication Date
FR2009759A1 true FR2009759A1 (enrdf_load_stackoverflow) 1970-02-06

Family

ID=24948299

Family Applications (1)

Application Number Title Priority Date Filing Date
FR6917838A Withdrawn FR2009759A1 (enrdf_load_stackoverflow) 1968-05-31 1969-05-30

Country Status (6)

Country Link
US (1) US3616402A (enrdf_load_stackoverflow)
BE (1) BE733724A (enrdf_load_stackoverflow)
DE (1) DE1927253A1 (enrdf_load_stackoverflow)
FR (1) FR2009759A1 (enrdf_load_stackoverflow)
GB (1) GB1275428A (enrdf_load_stackoverflow)
NL (1) NL6908267A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2439242A1 (fr) * 1978-04-07 1980-05-16 Varian Associates Installation de revetement par pulverisation sous vide
EP0070899A4 (en) * 1981-02-12 1984-04-04 Shatterproof Glass Corp CATHODIC BOMBARDING DEVICE WITH MAGNETRON.

Families Citing this family (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2253769C3 (de) * 1972-11-02 1979-07-12 Siemens Ag, 1000 Berlin Und 8000 Muenchen Kathodenzerstäubungsanlage mit kontinuierlichem Substratdurchlauf
US4125446A (en) * 1977-08-15 1978-11-14 Airco, Inc. Controlled reflectance of sputtered aluminum layers
US4834856A (en) * 1988-01-21 1989-05-30 Wehner Gottfried K Method and apparatus for sputtering a superconductor onto a substrate
US4911810A (en) * 1988-06-21 1990-03-27 Brown University Modular sputtering apparatus
US5798029A (en) * 1994-04-22 1998-08-25 Applied Materials, Inc. Target for sputtering equipment
DE19623359A1 (de) * 1995-08-17 1997-02-20 Leybold Ag Vorrichtung zum Beschichten eines Substrats
US5830272A (en) * 1995-11-07 1998-11-03 Sputtered Films, Inc. System for and method of providing a controlled deposition on wafers
JP2001003166A (ja) * 1999-04-23 2001-01-09 Nippon Sheet Glass Co Ltd 基体表面に被膜を被覆する方法およびその方法による基体
US20030209423A1 (en) * 2001-03-27 2003-11-13 Christie David J. System for driving multiple magnetrons with multiple phase ac
US9175383B2 (en) * 2008-01-16 2015-11-03 Applied Materials, Inc. Double-coating device with one process chamber
MY177448A (en) * 2008-05-01 2020-09-15 First Solar Inc Transparent conductive materials including cadmium stannate
JP2013163856A (ja) * 2012-02-13 2013-08-22 Tokyo Electron Ltd スパッタ装置
CN104831247B (zh) * 2015-04-15 2017-06-06 赫得纳米科技(昆山)有限公司 水平连续式磁控溅射镀膜机在线面板恒温加热装置
CN106884150B (zh) * 2017-04-24 2023-06-09 爱瑞德科技(大连)有限公司 一种悬浮阳极及带有悬浮阳极的磁控溅射装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2439242A1 (fr) * 1978-04-07 1980-05-16 Varian Associates Installation de revetement par pulverisation sous vide
FR2439244A1 (enrdf_load_stackoverflow) * 1978-04-07 1980-05-16 Varian Associates
EP0070899A4 (en) * 1981-02-12 1984-04-04 Shatterproof Glass Corp CATHODIC BOMBARDING DEVICE WITH MAGNETRON.

Also Published As

Publication number Publication date
NL6908267A (enrdf_load_stackoverflow) 1969-12-02
US3616402A (en) 1971-10-26
DE1927253A1 (de) 1969-12-04
BE733724A (enrdf_load_stackoverflow) 1969-11-03
GB1275428A (en) 1972-05-24

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Legal Events

Date Code Title Description
ST Notification of lapse