FR1596758A - - Google Patents

Info

Publication number
FR1596758A
FR1596758A FR1596758DA FR1596758A FR 1596758 A FR1596758 A FR 1596758A FR 1596758D A FR1596758D A FR 1596758DA FR 1596758 A FR1596758 A FR 1596758A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
French (fr)
Inventor
M Lepselter
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1596758A publication Critical patent/FR1596758A/fr
Expired legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P50/00Etching of wafers, substrates or parts of devices
    • H10P50/20Dry etching; Plasma etching; Reactive-ion etching
    • H10P50/28Dry etching; Plasma etching; Reactive-ion etching of insulating materials
    • H10P50/282Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials
    • H10P50/283Dry etching; Plasma etching; Reactive-ion etching of insulating materials of inorganic materials by chemical means
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23FNON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00Etching metallic material by chemical means
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10PGENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Weting (AREA)
  • Formation Of Insulating Films (AREA)
  • Drying Of Semiconductors (AREA)
FR1596758D 1967-12-08 1968-12-02 Expired FR1596758A (https=)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US68909067A 1967-12-08 1967-12-08

Publications (1)

Publication Number Publication Date
FR1596758A true FR1596758A (https=) 1970-06-22

Family

ID=24767002

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1596758D Expired FR1596758A (https=) 1967-12-08 1968-12-02

Country Status (8)

Country Link
US (1) US3585091A (https=)
JP (1) JPS5026907B1 (https=)
BE (1) BE725077A (https=)
DE (1) DE1812819B2 (https=)
FR (1) FR1596758A (https=)
GB (1) GB1254118A (https=)
NL (2) NL6817534A (https=)
SE (1) SE348234B (https=)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4144066A (en) * 1977-11-30 1979-03-13 Ppg Industries, Inc. Electron bombardment method for making stained glass photomasks
US4619894A (en) * 1985-04-12 1986-10-28 Massachusetts Institute Of Technology Solid-transformation thermal resist
FR2620737B1 (fr) * 1987-09-17 1993-04-16 France Etat Procede de gravure d'une couche d'oxyde de silicium
JP2809087B2 (ja) * 1994-02-15 1998-10-08 日本電気株式会社 配線形成方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1050409A (https=) * 1964-09-04

Also Published As

Publication number Publication date
DE1812819B2 (de) 1971-08-19
NL136565C (https=)
DE1812819A1 (de) 1969-08-14
BE725077A (https=) 1969-05-16
SE348234B (https=) 1972-08-28
JPS5026907B1 (https=) 1975-09-04
NL6817534A (https=) 1969-06-10
GB1254118A (en) 1971-11-17
US3585091A (en) 1971-06-15

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Legal Events

Date Code Title Description
ST Notification of lapse