FR1551367A - - Google Patents

Info

Publication number
FR1551367A
FR1551367A FR1551367DA FR1551367A FR 1551367 A FR1551367 A FR 1551367A FR 1551367D A FR1551367D A FR 1551367DA FR 1551367 A FR1551367 A FR 1551367A
Authority
FR
France
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Application granted granted Critical
Publication of FR1551367A publication Critical patent/FR1551367A/fr
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/06Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion material in the gaseous state
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B01PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01JCHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B31/00Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor
    • C30B31/02Diffusion or doping processes for single crystals or homogeneous polycrystalline material with defined structure; Apparatus therefor by contacting with diffusion materials in the solid state
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • General Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Formation Of Insulating Films (AREA)
  • Cleaning Or Drying Semiconductors (AREA)
FR1551367D 1966-12-30 1967-12-28 Expired FR1551367A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GB5835466A GB1115140A (en) 1966-12-30 1966-12-30 Semiconductors

Publications (1)

Publication Number Publication Date
FR1551367A true FR1551367A (fr) 1968-12-27

Family

ID=10481399

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1551367D Expired FR1551367A (fr) 1966-12-30 1967-12-28

Country Status (2)

Country Link
FR (1) FR1551367A (fr)
GB (1) GB1115140A (fr)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2045912A1 (fr) * 1969-06-09 1971-03-05 Ibm
FR2081021A1 (fr) * 1970-02-20 1971-11-26 Ibm
FR2080967A1 (en) * 1970-02-09 1971-11-26 Ibm Diffusion-doped semiconductors
EP0008642A1 (fr) * 1978-09-07 1980-03-19 International Business Machines Corporation Procédé de diffusion de bore dans des substrats de silicium

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2045912A1 (fr) * 1969-06-09 1971-03-05 Ibm
FR2080967A1 (en) * 1970-02-09 1971-11-26 Ibm Diffusion-doped semiconductors
FR2081021A1 (fr) * 1970-02-20 1971-11-26 Ibm
EP0008642A1 (fr) * 1978-09-07 1980-03-19 International Business Machines Corporation Procédé de diffusion de bore dans des substrats de silicium

Also Published As

Publication number Publication date
GB1115140A (en) 1968-05-29
DE1619962A1 (de) 1971-02-18
DE1619962B2 (de) 1975-05-22

Similar Documents

Publication Publication Date Title
FR1551367A (fr)
AT281852B (fr)
AU5917865A (fr)
AU424443B2 (fr)
AU428063B2 (fr)
AU433222B2 (fr)
AU415165B1 (fr)
AU421822B2 (fr)
AU417216B2 (fr)
AU414526B2 (fr)
AU612166A (fr)
AU1111066A (fr)
AU6703465A (fr)
AU5895065A (fr)
AU218666A (fr)
AU1144366A (fr)
AU2390066A (fr)
BE284991A (fr)
BE673316A (fr)
BE694517A (fr)
AU414093B2 (fr)
AU411645B2 (fr)
AU407778B2 (fr)
AU433620A (fr)
BE694386A (fr)

Legal Events

Date Code Title Description
ST Notification of lapse