FR1538798A - Procédé de métallisation - Google Patents
Procédé de métallisationInfo
- Publication number
- FR1538798A FR1538798A FR8695A FR06008695A FR1538798A FR 1538798 A FR1538798 A FR 1538798A FR 8695 A FR8695 A FR 8695A FR 06008695 A FR06008695 A FR 06008695A FR 1538798 A FR1538798 A FR 1538798A
- Authority
- FR
- France
- Prior art keywords
- metallization process
- metallization
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001465 metallisation Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/48—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor
- H01L23/482—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body
- H01L23/485—Arrangements for conducting electric current to or from the solid state body in operation, e.g. leads, terminal arrangements ; Selection of materials therefor consisting of lead-in layers inseparably applied to the semiconductor body consisting of layered constructions comprising conductive layers and insulating layers, e.g. planar contacts
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/66007—Multistep manufacturing processes
- H01L29/66075—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials
- H01L29/66227—Multistep manufacturing processes of devices having semiconductor bodies comprising group 14 or group 13/15 materials the devices being controllable only by the electric current supplied or the electric potential applied, to an electrode which does not carry the current to be rectified, amplified or switched, e.g. three-terminal devices
- H01L29/66234—Bipolar junction transistors [BJT]
- H01L29/66272—Silicon vertical transistors
- H01L29/66295—Silicon vertical transistors with main current going through the whole silicon substrate, e.g. power bipolar transistor
- H01L29/66303—Silicon vertical transistors with main current going through the whole silicon substrate, e.g. power bipolar transistor with multi-emitter, e.g. interdigitated, multi-cellular or distributed emitter
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/942—Masking
- Y10S438/948—Radiation resist
- Y10S438/951—Lift-off
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Ceramic Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Electrodes Of Semiconductors (AREA)
- Chemically Coating (AREA)
- Bipolar Transistors (AREA)
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US58993166A | 1966-10-27 | 1966-10-27 |
Publications (1)
Publication Number | Publication Date |
---|---|
FR1538798A true FR1538798A (fr) | 1968-09-06 |
Family
ID=24360161
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
FR8695A Expired FR1538798A (fr) | 1966-10-27 | 1967-09-06 | Procédé de métallisation |
Country Status (8)
Country | Link |
---|---|
US (1) | US3558352A (fr) |
BE (1) | BE703102A (fr) |
CH (1) | CH485326A (fr) |
ES (1) | ES346421A1 (fr) |
FR (1) | FR1538798A (fr) |
GB (1) | GB1174832A (fr) |
NL (1) | NL159232B (fr) |
SE (1) | SE334423B (fr) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2063026A1 (fr) * | 1969-09-26 | 1971-07-02 | Philips Nv | |
FR2083349A1 (fr) * | 1970-03-17 | 1971-12-17 | Western Electric Co |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3837905A (en) * | 1971-09-22 | 1974-09-24 | Gen Motors Corp | Thermal oxidation of silicon |
CA1053994A (fr) * | 1974-07-03 | 1979-05-08 | Amp Incorporated | Sensibilisation de polymeres de type polyimide pour deposition non electrolytique de metal |
US4510347A (en) * | 1982-12-06 | 1985-04-09 | Fine Particles Technology Corporation | Formation of narrow conductive paths on a substrate |
-
1966
- 1966-10-27 US US589931A patent/US3558352A/en not_active Expired - Lifetime
-
1967
- 1967-08-25 BE BE703102D patent/BE703102A/xx unknown
- 1967-09-06 FR FR8695A patent/FR1538798A/fr not_active Expired
- 1967-10-02 GB GB44711/67D patent/GB1174832A/en not_active Expired
- 1967-10-19 NL NL6714180.A patent/NL159232B/xx not_active IP Right Cessation
- 1967-10-25 ES ES346421A patent/ES346421A1/es not_active Expired
- 1967-10-27 SE SE14724/67A patent/SE334423B/xx unknown
- 1967-10-27 CH CH1512867A patent/CH485326A/de not_active IP Right Cessation
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2063026A1 (fr) * | 1969-09-26 | 1971-07-02 | Philips Nv | |
FR2083349A1 (fr) * | 1970-03-17 | 1971-12-17 | Western Electric Co |
Also Published As
Publication number | Publication date |
---|---|
DE1589975A1 (de) | 1970-04-30 |
ES346421A1 (es) | 1968-12-16 |
BE703102A (fr) | 1968-01-15 |
CH485326A (de) | 1970-01-31 |
NL6714180A (fr) | 1968-04-29 |
GB1174832A (en) | 1969-12-17 |
SE334423B (fr) | 1971-04-26 |
US3558352A (en) | 1971-01-26 |
DE1589975B2 (de) | 1975-06-05 |
NL159232B (nl) | 1979-01-15 |
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