FR1511238A - Procédé pour réaliser des structures métalliques sur des surfaces de corps semiconducteurs - Google Patents

Procédé pour réaliser des structures métalliques sur des surfaces de corps semiconducteurs

Info

Publication number
FR1511238A
FR1511238A FR94542A FR94542A FR1511238A FR 1511238 A FR1511238 A FR 1511238A FR 94542 A FR94542 A FR 94542A FR 94542 A FR94542 A FR 94542A FR 1511238 A FR1511238 A FR 1511238A
Authority
FR
France
Prior art keywords
semiconductor bodies
metallic structures
producing metallic
producing
structures
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR94542A
Other languages
English (en)
French (fr)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Siemens Corp
Original Assignee
Siemens AG
Siemens Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens AG, Siemens Corp filed Critical Siemens AG
Application granted granted Critical
Publication of FR1511238A publication Critical patent/FR1511238A/fr
Expired legal-status Critical Current

Links

Classifications

    • H10W20/069—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • H10W20/40—
    • H10W20/4407—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/043—Dual dielectric

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
FR94542A 1966-02-11 1967-02-10 Procédé pour réaliser des structures métalliques sur des surfaces de corps semiconducteurs Expired FR1511238A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0101956 1966-02-11

Publications (1)

Publication Number Publication Date
FR1511238A true FR1511238A (fr) 1968-01-26

Family

ID=7524104

Family Applications (1)

Application Number Title Priority Date Filing Date
FR94542A Expired FR1511238A (fr) 1966-02-11 1967-02-10 Procédé pour réaliser des structures métalliques sur des surfaces de corps semiconducteurs

Country Status (6)

Country Link
US (1) US3549437A (enExample)
CH (1) CH484288A (enExample)
FR (1) FR1511238A (enExample)
GB (1) GB1157475A (enExample)
NL (1) NL6617141A (enExample)
SE (1) SE333288B (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2030151A1 (enExample) * 1969-01-15 1970-10-30 Ibm

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5910073B2 (ja) * 1972-10-27 1984-03-06 株式会社日立製作所 シリコン・ゲ−トｍｏｓ型半導体装置の製造方法
US4921158A (en) 1989-02-24 1990-05-01 General Instrument Corporation Brazing material

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3290753A (en) * 1963-08-19 1966-12-13 Bell Telephone Labor Inc Method of making semiconductor integrated circuit elements

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2030151A1 (enExample) * 1969-01-15 1970-10-30 Ibm

Also Published As

Publication number Publication date
DE1521492A1 (de) 1969-08-21
NL6617141A (enExample) 1967-08-14
US3549437A (en) 1970-12-22
GB1157475A (en) 1969-07-09
CH484288A (de) 1970-01-15
DE1521492B2 (de) 1975-10-30
SE333288B (sv) 1971-03-08

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