SE333288B - Foerfarande foer framstaellning av mycket fina geometriska moenster och strukturer av aluminiumskikt - Google Patents

Foerfarande foer framstaellning av mycket fina geometriska moenster och strukturer av aluminiumskikt

Info

Publication number
SE333288B
SE333288B SE1930/67A SE193067A SE333288B SE 333288 B SE333288 B SE 333288B SE 1930/67 A SE1930/67 A SE 1930/67A SE 193067 A SE193067 A SE 193067A SE 333288 B SE333288 B SE 333288B
Authority
SE
Sweden
Prior art keywords
procedure
manufacture
structures
geometric patterns
aluminum layers
Prior art date
Application number
SE1930/67A
Other languages
English (en)
Swedish (sv)
Inventor
H Goetzeler
A Steppberger
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of SE333288B publication Critical patent/SE333288B/xx

Links

Classifications

    • H10W20/069—
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/04—Coating on selected surface areas, e.g. using masks
    • C23C14/042—Coating on selected surface areas, e.g. using masks using masks
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
    • C23F1/00—Etching metallic material by chemical means
    • H10W20/40—
    • H10W20/4407—
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S148/00—Metal treatment
    • Y10S148/043—Dual dielectric

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Electrodes Of Semiconductors (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
  • Physical Vapour Deposition (AREA)
  • Weting (AREA)
  • ing And Chemical Polishing (AREA)
SE1930/67A 1966-02-11 1967-02-10 Foerfarande foer framstaellning av mycket fina geometriska moenster och strukturer av aluminiumskikt SE333288B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES0101956 1966-02-11

Publications (1)

Publication Number Publication Date
SE333288B true SE333288B (sv) 1971-03-08

Family

ID=7524104

Family Applications (1)

Application Number Title Priority Date Filing Date
SE1930/67A SE333288B (sv) 1966-02-11 1967-02-10 Foerfarande foer framstaellning av mycket fina geometriska moenster och strukturer av aluminiumskikt

Country Status (6)

Country Link
US (1) US3549437A (enExample)
CH (1) CH484288A (enExample)
FR (1) FR1511238A (enExample)
GB (1) GB1157475A (enExample)
NL (1) NL6617141A (enExample)
SE (1) SE333288B (enExample)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL87258C (enExample) * 1969-01-15
JPS5910073B2 (ja) * 1972-10-27 1984-03-06 株式会社日立製作所 シリコン・ゲ−トｍｏｓ型半導体装置の製造方法
US4921158A (en) 1989-02-24 1990-05-01 General Instrument Corporation Brazing material

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3290753A (en) * 1963-08-19 1966-12-13 Bell Telephone Labor Inc Method of making semiconductor integrated circuit elements

Also Published As

Publication number Publication date
DE1521492A1 (de) 1969-08-21
NL6617141A (enExample) 1967-08-14
US3549437A (en) 1970-12-22
FR1511238A (fr) 1968-01-26
GB1157475A (en) 1969-07-09
CH484288A (de) 1970-01-15
DE1521492B2 (de) 1975-10-30

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