FR1359505A - Perfectionnements aux appareils de dépôt de pellicules minces par évaporation sous vide - Google Patents

Perfectionnements aux appareils de dépôt de pellicules minces par évaporation sous vide

Info

Publication number
FR1359505A
FR1359505A FR936350A FR936350A FR1359505A FR 1359505 A FR1359505 A FR 1359505A FR 936350 A FR936350 A FR 936350A FR 936350 A FR936350 A FR 936350A FR 1359505 A FR1359505 A FR 1359505A
Authority
FR
France
Prior art keywords
devices
thin films
vacuum evaporation
depositing thin
depositing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
FR936350A
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Computers and Tabulators Ltd
Original Assignee
International Computers and Tabulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Computers and Tabulators Ltd filed Critical International Computers and Tabulators Ltd
Priority to FR936350A priority Critical patent/FR1359505A/fr
Application granted granted Critical
Publication of FR1359505A publication Critical patent/FR1359505A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/541—Heating or cooling of the substrates

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
FR936350A 1963-05-29 1963-05-29 Perfectionnements aux appareils de dépôt de pellicules minces par évaporation sous vide Expired FR1359505A (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FR936350A FR1359505A (fr) 1963-05-29 1963-05-29 Perfectionnements aux appareils de dépôt de pellicules minces par évaporation sous vide

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR936350A FR1359505A (fr) 1963-05-29 1963-05-29 Perfectionnements aux appareils de dépôt de pellicules minces par évaporation sous vide

Publications (1)

Publication Number Publication Date
FR1359505A true FR1359505A (fr) 1964-04-24

Family

ID=8804892

Family Applications (1)

Application Number Title Priority Date Filing Date
FR936350A Expired FR1359505A (fr) 1963-05-29 1963-05-29 Perfectionnements aux appareils de dépôt de pellicules minces par évaporation sous vide

Country Status (1)

Country Link
FR (1) FR1359505A (fr)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4552092A (en) * 1984-09-19 1985-11-12 Mitsubishi Jukogyo Kabushiki Kaisha Vacuum vapor deposition system
US5558717A (en) * 1994-11-30 1996-09-24 Applied Materials CVD Processing chamber

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4552092A (en) * 1984-09-19 1985-11-12 Mitsubishi Jukogyo Kabushiki Kaisha Vacuum vapor deposition system
US5558717A (en) * 1994-11-30 1996-09-24 Applied Materials CVD Processing chamber
US5853607A (en) * 1994-11-30 1998-12-29 Applied Materials, Inc. CVD processing chamber

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