FR1233420A - Dispositif semi-conducteur en carbure de silicium et son procédé de fabrication - Google Patents
Dispositif semi-conducteur en carbure de silicium et son procédé de fabricationInfo
- Publication number
- FR1233420A FR1233420A FR803446A FR803446A FR1233420A FR 1233420 A FR1233420 A FR 1233420A FR 803446 A FR803446 A FR 803446A FR 803446 A FR803446 A FR 803446A FR 1233420 A FR1233420 A FR 1233420A
- Authority
- FR
- France
- Prior art keywords
- semiconductor device
- manufacturing process
- silicon carbide
- carbide semiconductor
- silicon
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 239000004065 semiconductor Substances 0.000 title 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 title 1
- 229910010271 silicon carbide Inorganic materials 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
- H10D62/00—Semiconductor bodies, or regions thereof, of devices having potential barriers
- H10D62/80—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials
- H10D62/83—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge
- H10D62/832—Semiconductor bodies, or regions thereof, of devices having potential barriers characterised by the materials being Group IV materials, e.g. B-doped Si or undoped Ge being Group IV materials comprising two or more elements, e.g. SiGe
- H10D62/8325—Silicon carbide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/107—Melt
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S148/00—Metal treatment
- Y10S148/148—Silicon carbide
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/931—Silicon carbide semiconductor
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| NL230892 | 1958-08-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FR1233420A true FR1233420A (fr) | 1960-10-12 |
Family
ID=19751322
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FR803446A Expired FR1233420A (fr) | 1958-08-27 | 1959-08-25 | Dispositif semi-conducteur en carbure de silicium et son procédé de fabrication |
Country Status (6)
| Country | Link |
|---|---|
| US (1) | US3047439A (enEXAMPLES) |
| CH (1) | CH372760A (enEXAMPLES) |
| DE (1) | DE1105067B (enEXAMPLES) |
| FR (1) | FR1233420A (enEXAMPLES) |
| GB (1) | GB915182A (enEXAMPLES) |
| NL (2) | NL230892A (enEXAMPLES) |
Families Citing this family (23)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL268735A (enEXAMPLES) * | 1961-08-29 | |||
| DE1204501B (de) * | 1961-08-29 | 1965-11-04 | Philips Nv | Verfahren zum Verbinden von Graphit-gegenstaenden miteinander oder mit Gegenstaenden aus anderen Werkstoffen durch Loeten |
| NL276911A (enEXAMPLES) * | 1962-04-06 | |||
| US3254280A (en) * | 1963-05-29 | 1966-05-31 | Westinghouse Electric Corp | Silicon carbide unipolar transistor |
| DE1268278B (de) * | 1964-07-25 | 1968-05-16 | Ibm Deutschland | Ohmscher Kontakt an Halbleiterbauelementen aus Siliciumcarbid |
| US3409467A (en) * | 1966-03-11 | 1968-11-05 | Nat Res Corp | Silicon carbide device |
| US3517281A (en) * | 1967-01-25 | 1970-06-23 | Tyco Laboratories Inc | Light emitting silicon carbide semiconductor junction devices |
| US3492719A (en) * | 1967-03-10 | 1970-02-03 | Westinghouse Electric Corp | Evaporated metal contacts for the fabrication of silicon carbide devices |
| US3539883A (en) * | 1967-03-15 | 1970-11-10 | Ion Physics Corp | Antireflection coatings for semiconductor devices |
| US3600645A (en) * | 1969-06-11 | 1971-08-17 | Westinghouse Electric Corp | Silicon carbide semiconductor device |
| US3713901A (en) * | 1970-04-20 | 1973-01-30 | Trw Inc | Oxidation resistant refractory alloys |
| US4166279A (en) * | 1977-12-30 | 1979-08-28 | International Business Machines Corporation | Electromigration resistance in gold thin film conductors |
| US4795790A (en) * | 1986-12-02 | 1989-01-03 | General Electric Company | Thermoplastic polyetherimide ester polymers exhibiting improved flexibility |
| US5200805A (en) * | 1987-12-28 | 1993-04-06 | Hughes Aircraft Company | Silicon carbide:metal carbide alloy semiconductor and method of making the same |
| US5270252A (en) * | 1988-10-25 | 1993-12-14 | United States Of America As Represented By The Secretary Of The Navy | Method of forming platinum and platinum silicide schottky contacts on beta-silicon carbide |
| US5514604A (en) * | 1993-12-08 | 1996-05-07 | General Electric Company | Vertical channel silicon carbide metal-oxide-semiconductor field effect transistor with self-aligned gate for microwave and power applications, and method of making |
| US5929523A (en) * | 1996-03-07 | 1999-07-27 | 3C Semiconductor Corporation | Os rectifying Schottky and ohmic junction and W/WC/TiC ohmic contacts on SiC |
| US6388272B1 (en) | 1996-03-07 | 2002-05-14 | Caldus Semiconductor, Inc. | W/WC/TAC ohmic and rectifying contacts on SiC |
| US6573128B1 (en) | 2000-11-28 | 2003-06-03 | Cree, Inc. | Epitaxial edge termination for silicon carbide Schottky devices and methods of fabricating silicon carbide devices incorporating same |
| US7026650B2 (en) * | 2003-01-15 | 2006-04-11 | Cree, Inc. | Multiple floating guard ring edge termination for silicon carbide devices |
| US9515135B2 (en) * | 2003-01-15 | 2016-12-06 | Cree, Inc. | Edge termination structures for silicon carbide devices |
| WO2005119793A2 (en) * | 2004-05-28 | 2005-12-15 | Caracal, Inc. | Silicon carbide schottky diodes and fabrication method |
| US8901699B2 (en) | 2005-05-11 | 2014-12-02 | Cree, Inc. | Silicon carbide junction barrier Schottky diodes with suppressed minority carrier injection |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| NL87348C (enEXAMPLES) * | 1954-03-19 | 1900-01-01 | ||
| US2831786A (en) * | 1954-06-28 | 1958-04-22 | p type | |
| NL216614A (enEXAMPLES) * | 1956-05-15 | |||
| DE1073110B (de) * | 1957-08-16 | 1960-01-14 | General Electric Company, Schenectady, N Y (V St A) | Verfahren zur Herstellung gleichrichtender oder ohmscher Anschlußkontakte an Siliziumkarbidkorpern |
| US2937323A (en) * | 1958-05-29 | 1960-05-17 | Westinghouse Electric Corp | Fused junctions in silicon carbide |
-
0
- NL NL108185D patent/NL108185C/xx active
- NL NL230892D patent/NL230892A/xx unknown
-
1959
- 1959-07-31 US US830842A patent/US3047439A/en not_active Expired - Lifetime
- 1959-08-22 DE DEN17123A patent/DE1105067B/de active Pending
- 1959-08-24 GB GB28840/59A patent/GB915182A/en not_active Expired
- 1959-08-24 CH CH7733159A patent/CH372760A/de unknown
- 1959-08-25 FR FR803446A patent/FR1233420A/fr not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| NL108185C (enEXAMPLES) | |
| CH372760A (de) | 1963-10-31 |
| DE1105067B (de) | 1961-04-20 |
| GB915182A (en) | 1963-01-09 |
| NL230892A (enEXAMPLES) | |
| US3047439A (en) | 1962-07-31 |
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