FR1065922A - Dispositif de dépôt par vaporisation - Google Patents

Dispositif de dépôt par vaporisation

Info

Publication number
FR1065922A
FR1065922A FR1065922DA FR1065922A FR 1065922 A FR1065922 A FR 1065922A FR 1065922D A FR1065922D A FR 1065922DA FR 1065922 A FR1065922 A FR 1065922A
Authority
FR
France
Prior art keywords
deposition device
spray deposition
spray
deposition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
Other languages
English (en)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SU DDEUTSCHE LAB GmbH
Original Assignee
SU DDEUTSCHE LAB GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SU DDEUTSCHE LAB GmbH filed Critical SU DDEUTSCHE LAB GmbH
Application granted granted Critical
Publication of FR1065922A publication Critical patent/FR1065922A/fr
Expired legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/543—Controlling the film thickness or evaporation rate using measurement on the vapor source
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/548—Controlling the composition
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/304—Controlling tubes by information coming from the objects or from the beam, e.g. correction signals
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S164/00—Metal founding
    • Y10S164/04—Dental

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Organic Chemistry (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Physical Vapour Deposition (AREA)
FR1065922D 1951-11-05 1952-11-05 Dispositif de dépôt par vaporisation Expired FR1065922A (fr)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE311812X 1951-11-05

Publications (1)

Publication Number Publication Date
FR1065922A true FR1065922A (fr) 1954-05-31

Family

ID=6131705

Family Applications (1)

Application Number Title Priority Date Filing Date
FR1065922D Expired FR1065922A (fr) 1951-11-05 1952-11-05 Dispositif de dépôt par vaporisation

Country Status (4)

Country Link
US (1) US2746420A (fr)
CH (1) CH311812A (fr)
FR (1) FR1065922A (fr)
GB (1) GB738592A (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2912351A (en) * 1956-09-21 1959-11-10 Sylvania Electric Prod Lens coating apparatus and process

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US2960457A (en) * 1956-02-28 1960-11-15 Servomechanisms Inc Apparatus for vaporizing coating materials
US2906235A (en) * 1957-03-22 1959-09-29 Bulova Res And Dev Lab Inc Frequency adjustment plating control
US4831230B1 (en) * 1957-06-27 1996-10-29 Bankers Trust Company Surface shaping and finishing apparatus and method
US5064989B1 (en) * 1957-06-27 1996-10-29 Jerome H Lemelson Surface shaping and finishing apparatus and method
NL240710A (fr) * 1958-07-01
US3020389A (en) * 1958-11-10 1962-02-06 Union Carbide Corp Portable air lock for welding chambers
NL248568A (fr) * 1959-02-20
US5552675A (en) * 1959-04-08 1996-09-03 Lemelson; Jerome H. High temperature reaction apparatus
US3117024A (en) * 1961-07-31 1964-01-07 Sperry Rand Corp Detection of evaporant temperature
US3205087A (en) * 1961-12-15 1965-09-07 Martin Marietta Corp Selective vacuum deposition of thin film
NL291466A (fr) * 1962-04-13
US3271180A (en) * 1962-06-19 1966-09-06 Ibm Photolytic processes for fabricating thin film patterns
DE1260575B (de) * 1962-09-04 1968-02-08 United Aircraft Corp Verfahren zur zerstoerungsfreien Pruefung elektronischer Bauteile
NL297262A (fr) * 1962-09-04
US3271179A (en) * 1962-09-24 1966-09-06 Temescal Metallurgical Corp Method for the manufacture of an optical filter
US3250694A (en) * 1962-10-17 1966-05-10 Ibm Apparatus for coating articles by cathode sputtering
US3156810A (en) * 1962-10-24 1964-11-10 United Aircraft Corp Protective device for movable gun viewing system
US3235480A (en) * 1963-04-08 1966-02-15 Electra Mfg Company Thermionic evaporation rate controller
US3329524A (en) * 1963-06-12 1967-07-04 Temescal Metallurgical Corp Centrifugal-type vapor source
US3243661A (en) * 1963-06-25 1966-03-29 United Aircraft Corp Enhanced micro-modules
US3244855A (en) * 1963-07-19 1966-04-05 United States Steel Corp System for correcting the shift of an electron-gun beam from the desired region of impingement
US3275789A (en) * 1963-09-09 1966-09-27 Varian Associates Vacuum brazing system
US3404255A (en) * 1965-06-23 1968-10-01 Bendix Corp Source of vaporizable material for bombardment thereof by an electron bombarding means
DE1515200C3 (de) * 1964-08-05 1974-06-27 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Vorrichtung zur Materialbearbeitung mittels eines Ladungsträgerstrahls
US3352282A (en) * 1965-07-23 1967-11-14 Bendix Corp Vacuum deposit device including means to register and manipulate mask and substrate elements
US3397672A (en) * 1965-11-10 1968-08-20 United States Steel Corp Control system for vapor-deposition coating apparatus
CH427744A (de) * 1965-11-26 1967-01-15 Balzers Patent Beteilig Ag Verfahren für die thermische Verdampfung von Stoffgemischen im Vakuum
US3485998A (en) * 1967-06-29 1969-12-23 Rohr Corp Adaptor type electron beam welding apparatus
US3466420A (en) * 1967-07-10 1969-09-09 Gen Electric Electron beam welding apparatus
GB1235469A (en) * 1967-11-09 1971-06-16 Pilkington Brothers Ltd Improvements in or relating to the manufacture of flat glass
FR1561258A (fr) * 1968-01-15 1969-03-28
US3590777A (en) * 1969-03-13 1971-07-06 United Aircarft Corp Ingot feed drive
US3570449A (en) * 1969-03-13 1971-03-16 United Aircraft Corp Sensor system for a vacuum deposition apparatus
US3568632A (en) * 1969-03-24 1971-03-09 Gary F Cawthon Lens coating apparatus
US3620956A (en) * 1969-07-15 1971-11-16 Bendix Corp Mechanism for thin film deposition
US3649339A (en) * 1969-09-05 1972-03-14 Eugene C Smith Apparatus and method for securing a high vacuum for particle coating process
DE2008387C3 (de) * 1970-02-24 1974-07-25 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Abschirmvorrichtung für Röntgenstrahlen
US3662708A (en) * 1970-03-23 1972-05-16 Airco Inc Apparatus for supporting a substrate holder
FR2087764A5 (fr) * 1970-05-29 1971-12-31 Commissariat Energie Atomique
LU61048A1 (fr) * 1970-06-02 1971-08-13
US3667421A (en) * 1970-09-17 1972-06-06 United Aircraft Corp Mechanism for controlling the thickness of a coating in a vapor deposition apparatus
US3656454A (en) * 1970-11-23 1972-04-18 Air Reduction Vacuum coating apparatus
US3641973A (en) * 1970-11-25 1972-02-15 Air Reduction Vacuum coating apparatus
US3708889A (en) * 1970-12-28 1973-01-09 Armstrong Cork Co Apparatus for bleaching furniture
US3770934A (en) * 1971-10-29 1973-11-06 Machlett Lab Inc Electron beam heating apparatus
BE792552A (fr) * 1971-12-21 1973-06-12 Cit Alcatel Enceinte pour depot de couches minces sous vide
US3756193A (en) * 1972-05-01 1973-09-04 Battelle Memorial Institute Coating apparatus
CH573985A5 (fr) * 1973-11-22 1976-03-31 Balzers Patent Beteilig Ag
BE814046A (fr) * 1974-04-22 1974-08-16 Procede et installation pour l'application en continu d'un revetement metallique sur une tole en bande.
US4163889A (en) * 1974-05-27 1979-08-07 U.S. Philips Corporation Device for the simultaneous operation of a number of gas discharge electron guns
US4009680A (en) * 1974-09-16 1977-03-01 Fengler Werner H Apparatus for producing high wear-resistant composite seal
JPS52139432A (en) * 1976-05-18 1977-11-21 Olympus Optical Co Ltd Producing apparatus for photosensitive screen
CA1264025A (fr) * 1987-05-29 1989-12-27 James A.E. Bell Dispositif et methode de coloration d'objets par enduction au plasma
DE3854828T2 (de) * 1987-08-24 1996-08-22 Sumitomo Electric Industries Verfahren zur Herstellung einer dünnen Schicht aus zusammengesetztem supraleitendem Oxyd

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GB481842A (en) * 1936-06-17 1938-03-18 Bernhard Berghaus Improvements in and relating to the coating of articles by vaporisation of the coating materials
US2206509A (en) * 1939-05-27 1940-07-02 Rca Corp Radio tube manufacture
US2301456A (en) * 1940-09-28 1942-11-10 Eastman Kodak Co Evaporation of metallic salts
US2426016A (en) * 1941-11-29 1947-08-19 Westinghouse Electric Corp Electrostatic coating apparatus
US2463180A (en) * 1943-04-29 1949-03-01 Bell Telephone Labor Inc Method and apparatus for making mosaic targets for electron beams
US2416211A (en) * 1943-09-15 1947-02-18 American Optical Corp Apparatus for coating articles
US2428868A (en) * 1944-05-01 1947-10-14 Rca Corp Apparatus for producing hardened optical coatings by electron bombardment
US2516908A (en) * 1945-09-24 1950-08-01 American Can Co Apparatus for lining can ends
US2527747A (en) * 1946-01-03 1950-10-31 Margaret N Lewis Apparatus for coating articles by thermal evaporation
US2482329A (en) * 1946-05-27 1949-09-20 Rca Corp Apparatus for selective vapor coating

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2912351A (en) * 1956-09-21 1959-11-10 Sylvania Electric Prod Lens coating apparatus and process

Also Published As

Publication number Publication date
CH311812A (de) 1955-12-15
GB738592A (en) 1955-10-19
US2746420A (en) 1956-05-22

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