FI952995A0 - Sabilisering av prekursorer för utfällning av tunnfilmer - Google Patents

Sabilisering av prekursorer för utfällning av tunnfilmer

Info

Publication number
FI952995A0
FI952995A0 FI952995A FI952995A FI952995A0 FI 952995 A0 FI952995 A0 FI 952995A0 FI 952995 A FI952995 A FI 952995A FI 952995 A FI952995 A FI 952995A FI 952995 A0 FI952995 A0 FI 952995A0
Authority
FI
Finland
Prior art keywords
sabilization
precursors
precipitation
thin films
films
Prior art date
Application number
FI952995A
Other languages
English (en)
Finnish (fi)
Other versions
FI952995A (sv
Inventor
Stephen Dicarolis
Original Assignee
Hewlett Packard Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hewlett Packard Co filed Critical Hewlett Packard Co
Publication of FI952995A0 publication Critical patent/FI952995A0/sv
Publication of FI952995A publication Critical patent/FI952995A/sv

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F1/00—Compounds containing elements of Groups 1 or 11 of the Periodic Table
    • C07F1/005—Compounds containing elements of Groups 1 or 11 of the Periodic Table without C-Metal linkages
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F13/00—Compounds containing elements of Groups 7 or 17 of the Periodic Table
    • C07F13/005—Compounds without a metal-carbon linkage
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
    • C07F15/04—Nickel compounds
    • C07F15/045—Nickel compounds without a metal-carbon linkage
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F15/00—Compounds containing elements of Groups 8, 9, 10 or 18 of the Periodic Table
    • C07F15/06—Cobalt compounds
    • C07F15/065—Cobalt compounds without a metal-carbon linkage
    • C—CHEMISTRY; METALLURGY
    • C07—ORGANIC CHEMISTRY
    • C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
    • C07F3/00—Compounds containing elements of Groups 2 or 12 of the Periodic Table
    • C07F3/003—Compounds containing elements of Groups 2 or 12 of the Periodic Table without C-Metal linkages
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
    • C23C16/06—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material
    • C23C16/18—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of metallic material from metallo-organic compounds

Landscapes

  • Chemical & Material Sciences (AREA)
  • Organic Chemistry (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Chemical Vapour Deposition (AREA)
  • Heterocyclic Compounds That Contain Two Or More Ring Oxygen Atoms (AREA)
FI952995A 1994-06-17 1995-06-16 Sabilisering av prekursorer för utfällning av tunnfilmer FI952995A (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/261,572 US5412129A (en) 1994-06-17 1994-06-17 Stabilization of precursors for thin film deposition

Publications (2)

Publication Number Publication Date
FI952995A0 true FI952995A0 (sv) 1995-06-16
FI952995A FI952995A (sv) 1995-12-18

Family

ID=22993913

Family Applications (1)

Application Number Title Priority Date Filing Date
FI952995A FI952995A (sv) 1994-06-17 1995-06-16 Sabilisering av prekursorer för utfällning av tunnfilmer

Country Status (4)

Country Link
US (1) US5412129A (sv)
EP (1) EP0687677A1 (sv)
JP (1) JPH083171A (sv)
FI (1) FI952995A (sv)

Families Citing this family (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6110529A (en) * 1990-07-06 2000-08-29 Advanced Tech Materials Method of forming metal films on a substrate by chemical vapor deposition
US7323581B1 (en) 1990-07-06 2008-01-29 Advanced Technology Materials, Inc. Source reagent compositions and method for forming metal films on a substrate by chemical vapor deposition
US5820664A (en) * 1990-07-06 1998-10-13 Advanced Technology Materials, Inc. Precursor compositions for chemical vapor deposition, and ligand exchange resistant metal-organic precursor solutions comprising same
US5840897A (en) * 1990-07-06 1998-11-24 Advanced Technology Materials, Inc. Metal complex source reagents for chemical vapor deposition
US5679815A (en) * 1994-09-16 1997-10-21 Advanced Technology Materials, Inc. Tantalum and niobium reagents useful in chemical vapor deposition processes, and process for depositing coatings using the same
US5916359A (en) * 1995-03-31 1999-06-29 Advanced Technology Materials, Inc. Alkane and polyamine solvent compositions for liquid delivery chemical vapor deposition
KR100266965B1 (ko) * 1997-12-02 2000-09-15 김충섭 리튬과 13 족 금속의 알킬산알킬헤테로금속 화합물을 사용한 리튬과 13 족 금속의 복합 산화물의 제조방법
US6133051A (en) * 1998-06-30 2000-10-17 Advanced Technology Materials, Inc. Amorphously deposited metal oxide ceramic films
US6015917A (en) * 1998-01-23 2000-01-18 Advanced Technology Materials, Inc. Tantalum amide precursors for deposition of tantalum nitride on a substrate
US7012292B1 (en) * 1998-11-25 2006-03-14 Advanced Technology Materials, Inc Oxidative top electrode deposition process, and microelectronic device structure
WO2000067300A1 (en) * 1999-04-29 2000-11-09 President And Fellows Of Harvard College Liquid precursors for formation of materials containing alkali metals
US6994800B1 (en) 1999-04-29 2006-02-07 President And Fellows Of Harvard College Liquid precursors for formation of materials containing alkali metals
KR100381388B1 (ko) * 2000-07-06 2003-04-23 (주)유피케미칼 산화금속 박막 증착용 전구체 화합물 및 그를 이용한 박막증착 방법
JP4565897B2 (ja) 2004-06-14 2010-10-20 株式会社Ａｄｅｋａ 薄膜形成用原料及び薄膜の製造方法
US7166732B2 (en) * 2004-06-16 2007-01-23 Advanced Technology Materials, Inc. Copper (I) compounds useful as deposition precursors of copper thin films
US20060102895A1 (en) * 2004-11-16 2006-05-18 Hendrix Bryan C Precursor compositions for forming tantalum-containing films, and tantalum-containing barrier films and copper-metallized semiconductor device structures
US9312557B2 (en) * 2005-05-11 2016-04-12 Schlumberger Technology Corporation Fuel cell apparatus and method for downhole power systems
TW200825200A (en) * 2006-12-05 2008-06-16 Advanced Tech Materials Metal aminotroponiminates, bis-oxazolinates and guanidinates
US7750173B2 (en) * 2007-01-18 2010-07-06 Advanced Technology Materials, Inc. Tantalum amido-complexes with chelate ligands useful for CVD and ALD of TaN and Ta205 thin films
US9724651B2 (en) * 2015-07-14 2017-08-08 Lg Nanoh2O, Inc. Chemical additives for water flux enhancement

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3911176A (en) * 1974-01-02 1975-10-07 Rca Corp Method for vapor-phase growth of thin films of lithium niobate
US5098516A (en) * 1990-12-31 1992-03-24 Air Products And Chemicals, Inc. Processes for the chemical vapor deposition of copper and etching of copper

Also Published As

Publication number Publication date
US5412129A (en) 1995-05-02
FI952995A (sv) 1995-12-18
JPH083171A (ja) 1996-01-09
EP0687677A1 (en) 1995-12-20

Similar Documents

Publication Publication Date Title
FI952995A0 (sv) Sabilisering av prekursorer för utfällning av tunnfilmer
FI945610A (sv) Anordning för framställning av tunnfilmer
FI945611A (sv) Foerfarande och anlaeggning foer framstaellning av tunnfilmer
FI19992797A (sv) Anordning för framställning av tunnfilmer
FI19992798A (sv) Anordning för framställning av tunnfilmer
FI991078A (sv) Förfarande för framställning av tunnfilmer
FI93680C (sv) Stödkonstruktion för tunnfilm och förfarande för framställning av den
FI960153A0 (sv) Förfarande för mätning av filtrat
AU1663995A (en) Apparatus for the manufacture of films
DE69617319D1 (de) Dünnfilmübertrager zur Unterschwingungsreduktion
FI962370A (sv) Anordning för tillverkning av tissue
ITUD940051A0 (it) Procedimento per la produzione di nastro partendo da bramme sottili e relativo impianto
DE69620338D1 (de) Antibeschlagfilm
GB9704550D0 (en) Deposition of thin films
FI972065A (sv) Förfarande för framställning av N-fosfonometylglycin
FI943422A (sv) Förfarande för bestämning av precursorer för cytolytiska T-celler
GB2248340B (en) Thin film deposition apparatus
FI964229A (sv) Förfarande för framställning av doxorubicin
FI973095A0 (sv) Förfaranden för inhibering av miljöestrogener
FI956010A (sv) Beklädnadskiva och förfarande för tillverkning därav
FI980091A0 (sv) Förfarande för behandling av överskottsaktivslam
GB9511492D0 (en) Thin film deposition
GB2306172B (en) Coating plant for coating films
GB9405580D0 (en) Deposition of thin films
GB2306173B (en) Coating plant for coating films