GB9704550D0 - Deposition of thin films - Google Patents

Deposition of thin films

Info

Publication number
GB9704550D0
GB9704550D0 GBGB9704550.4A GB9704550A GB9704550D0 GB 9704550 D0 GB9704550 D0 GB 9704550D0 GB 9704550 A GB9704550 A GB 9704550A GB 9704550 D0 GB9704550 D0 GB 9704550D0
Authority
GB
United Kingdom
Prior art keywords
deposition
thin films
films
thin
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
GBGB9704550.4A
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
UK Secretary of State for Defence
Original Assignee
UK Secretary of State for Defence
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by UK Secretary of State for Defence filed Critical UK Secretary of State for Defence
Priority to GBGB9704550.4A priority Critical patent/GB9704550D0/en
Publication of GB9704550D0 publication Critical patent/GB9704550D0/en
Priority to PCT/GB1998/000539 priority patent/WO1998039497A1/en
Pending legal-status Critical Current

Links

GBGB9704550.4A 1997-03-05 1997-03-05 Deposition of thin films Pending GB9704550D0 (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
GBGB9704550.4A GB9704550D0 (en) 1997-03-05 1997-03-05 Deposition of thin films
PCT/GB1998/000539 WO1998039497A1 (en) 1997-03-05 1998-02-20 Deposition of thin films

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
GBGB9704550.4A GB9704550D0 (en) 1997-03-05 1997-03-05 Deposition of thin films

Publications (1)

Publication Number Publication Date
GB9704550D0 true GB9704550D0 (en) 1997-04-23

Family

ID=10808735

Family Applications (1)

Application Number Title Priority Date Filing Date
GBGB9704550.4A Pending GB9704550D0 (en) 1997-03-05 1997-03-05 Deposition of thin films

Country Status (2)

Country Link
GB (1) GB9704550D0 (en)
WO (1) WO1998039497A1 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6943392B2 (en) * 1999-08-30 2005-09-13 Micron Technology, Inc. Capacitors having a capacitor dielectric layer comprising a metal oxide having multiple different metals bonded with oxygen
US6444478B1 (en) 1999-08-31 2002-09-03 Micron Technology, Inc. Dielectric films and methods of forming same
US6335049B1 (en) * 2000-01-03 2002-01-01 Micron Technology, Inc. Chemical vapor deposition methods of forming a high K dielectric layer and methods of forming a capacitor
US6558517B2 (en) 2000-05-26 2003-05-06 Micron Technology, Inc. Physical vapor deposition methods
US6566147B2 (en) 2001-02-02 2003-05-20 Micron Technology, Inc. Method for controlling deposition of dielectric films
US20030017266A1 (en) 2001-07-13 2003-01-23 Cem Basceri Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers, including such layers having a varied concentration of barium and strontium within the layer
US6838122B2 (en) 2001-07-13 2005-01-04 Micron Technology, Inc. Chemical vapor deposition methods of forming barium strontium titanate comprising dielectric layers
US7011978B2 (en) 2001-08-17 2006-03-14 Micron Technology, Inc. Methods of forming capacitor constructions comprising perovskite-type dielectric materials with different amount of crystallinity regions
US7449246B2 (en) 2004-06-30 2008-11-11 General Electric Company Barrier coatings
US8691371B2 (en) 2002-09-11 2014-04-08 General Electric Company Barrier coating and method
US8034419B2 (en) 2004-06-30 2011-10-11 General Electric Company Method for making a graded barrier coating
WO2014159904A1 (en) 2013-03-14 2014-10-02 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Porphyrin-modified antimicrobial peptides for application as indicators of microbial targets
WO2014151756A1 (en) * 2013-03-14 2014-09-25 The Government Of The United States Of America, As Represented By The Secretary Of The Navy Microwave initiation for deposition of porous organosilicate materials on fabrics

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4599135A (en) * 1983-09-30 1986-07-08 Hitachi, Ltd. Thin film deposition
JPH0712033B2 (en) * 1984-05-10 1995-02-08 工業技術院長 Fine pattern formation method by ion beam
US4803947A (en) * 1986-01-15 1989-02-14 Canon Kabushiki Kaisha Apparatus for forming deposited film
US5083033A (en) * 1989-03-31 1992-01-21 Kabushiki Kaisha Toshiba Method of depositing an insulating film and a focusing ion beam apparatus
WO1996000803A1 (en) * 1994-06-28 1996-01-11 Fei Company Charged particle deposition of electrically insulating films

Also Published As

Publication number Publication date
WO1998039497A1 (en) 1998-09-11

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