FI920360A - ANORDINATION FOER BESTAEMNING AV YTFORMEN AV FOEREMAOLET. - Google Patents

ANORDINATION FOER BESTAEMNING AV YTFORMEN AV FOEREMAOLET. Download PDF

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Publication number
FI920360A
FI920360A FI920360A FI920360A FI920360A FI 920360 A FI920360 A FI 920360A FI 920360 A FI920360 A FI 920360A FI 920360 A FI920360 A FI 920360A FI 920360 A FI920360 A FI 920360A
Authority
FI
Finland
Prior art keywords
detector
image
determination
ytformen
foeremaolet
Prior art date
Application number
FI920360A
Other languages
Finnish (fi)
Other versions
FI89746B (en
FI920360A0 (en
FI89746C (en
Inventor
Juhani Hirvonen
Pekka Kohola
Harri Jokinen
Timo Salmi
Original Assignee
Valtion Teknillinen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from FI910401A external-priority patent/FI88204C/en
Application filed by Valtion Teknillinen filed Critical Valtion Teknillinen
Priority to FI920360A priority Critical patent/FI89746C/en
Publication of FI920360A0 publication Critical patent/FI920360A0/en
Publication of FI920360A publication Critical patent/FI920360A/en
Publication of FI89746B publication Critical patent/FI89746B/en
Application granted granted Critical
Publication of FI89746C publication Critical patent/FI89746C/en

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  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention concerns an arrangement for determination of the shape of a measured object's surface. A position sensitive detector 3 includes a first position-sensitive detector 31; 18 and a second position-sensitive detector 32; 19, which is two-dimensional; the arrangement includes a beam splitter 10 to divide the beam reflected from the measured object's surface into a first beam 11 to the first detector 31; 18 and a second beam 12 to the second detector 31; 19 [sic]; magnification optics 13 to magnify the image of the second beam 22 and for shaping the image region 21 of the second detector to a part of the first detector's image area 20 determined by the magnification of the magnification optics; the first detector 31; 18 is arranged for crude position determination for the second beam's 12 image alignment in the second detector's 32; 19 image area in cooperation with transport device 6; 17; and a data processing device 7 is arranged to determine from the second detector's 32; 19 image area 21 the second beam's 12 image 22 position and based on this to make the results of the determination more precise by calculation than the value obtained from transport device 6; 17. <IMAGE>
FI920360A 1991-01-25 1992-01-27 Device for determining the surface shape of the object FI89746C (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
FI920360A FI89746C (en) 1991-01-25 1992-01-27 Device for determining the surface shape of the object

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
FI910401A FI88204C (en) 1991-01-25 1991-01-25 Device for determining the surface shape of the object
FI910401 1991-01-25
FI920360 1992-01-27
FI920360A FI89746C (en) 1991-01-25 1992-01-27 Device for determining the surface shape of the object

Publications (4)

Publication Number Publication Date
FI920360A0 FI920360A0 (en) 1992-01-27
FI920360A true FI920360A (en) 1992-07-26
FI89746B FI89746B (en) 1993-07-30
FI89746C FI89746C (en) 1993-11-10

Family

ID=26158888

Family Applications (1)

Application Number Title Priority Date Filing Date
FI920360A FI89746C (en) 1991-01-25 1992-01-27 Device for determining the surface shape of the object

Country Status (1)

Country Link
FI (1) FI89746C (en)

Also Published As

Publication number Publication date
FI89746B (en) 1993-07-30
FI920360A0 (en) 1992-01-27
FI89746C (en) 1993-11-10

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Legal Events

Date Code Title Description
FG Patent granted

Owner name: VALTION TEKNILLINEN TUTKIMUSKESKUS

BB Publication of examined application
MM Patent lapsed