FI902375A0 - Anvaendning av mycket glenade novolack i fotoresister. - Google Patents

Anvaendning av mycket glenade novolack i fotoresister.

Info

Publication number
FI902375A0
FI902375A0 FI902375A FI902375A FI902375A0 FI 902375 A0 FI902375 A0 FI 902375A0 FI 902375 A FI902375 A FI 902375A FI 902375 A FI902375 A FI 902375A FI 902375 A0 FI902375 A0 FI 902375A0
Authority
FI
Finland
Prior art keywords
glenade
fotoresister
novolack
aviation
analyzing
Prior art date
Application number
FI902375A
Other languages
English (en)
Inventor
Jr Leonard Edward Bogan
Karen Ann Graziano
Original Assignee
Rohm & Haas
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Rohm & Haas filed Critical Rohm & Haas
Publication of FI902375A0 publication Critical patent/FI902375A0/fi

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/038—Macromolecular compounds which are rendered insoluble or differentially wettable
FI902375A 1989-05-12 1990-05-11 Anvaendning av mycket glenade novolack i fotoresister. FI902375A0 (fi)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US35115389A 1989-05-12 1989-05-12

Publications (1)

Publication Number Publication Date
FI902375A0 true FI902375A0 (fi) 1990-05-11

Family

ID=23379794

Family Applications (1)

Application Number Title Priority Date Filing Date
FI902375A FI902375A0 (fi) 1989-05-12 1990-05-11 Anvaendning av mycket glenade novolack i fotoresister.

Country Status (11)

Country Link
EP (1) EP0397460A3 (fi)
JP (1) JPH0379619A (fi)
KR (1) KR900018186A (fi)
CN (1) CN1047398A (fi)
AU (1) AU635928B2 (fi)
BR (1) BR9002205A (fi)
CA (1) CA2015721A1 (fi)
FI (1) FI902375A0 (fi)
IL (1) IL94353A (fi)
NO (1) NO902061L (fi)
ZA (1) ZA903560B (fi)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4939229A (en) * 1989-05-12 1990-07-03 Rohm And Haas Company Method for preparing lithographically sensitive branched novolaks using a mannich base intermediate
US5667934A (en) * 1990-10-09 1997-09-16 International Business Machines Corporation Thermally stable photoimaging composition
TW207009B (fi) * 1991-01-31 1993-06-01 Sumitomo Chemical Co
US6455223B1 (en) 1999-03-26 2002-09-24 Shin-Etsu Chemical Co., Ltd. Resist compositions and patterning process
JP2002203869A (ja) 2000-10-30 2002-07-19 Seiko Epson Corp バンプの形成方法、半導体装置及びその製造方法、回路基板並びに電子機器
US6828383B2 (en) * 2002-12-13 2004-12-07 Occidental Petroleum Phenolic modified resorcinolic resins for rubber compounding
US20230374213A1 (en) * 2020-10-05 2023-11-23 Advanced Polymer Coatings, Inc. Process for preparing branched phenolic novolak

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS505084B1 (fi) * 1970-09-16 1975-02-28
US4624909A (en) * 1984-04-27 1986-11-25 Nec Corporation Silicon-containing novolak resin and resist material and pattern forming method using same
CA1307695C (en) * 1986-01-13 1992-09-22 Wayne Edmund Feely Photosensitive compounds and thermally stable and aqueous developablenegative images
DE3810247A1 (de) * 1987-03-26 1988-10-06 Toshiba Kawasaki Kk Lichtempfindliche beschichtungsmasse
US4939229A (en) * 1989-05-12 1990-07-03 Rohm And Haas Company Method for preparing lithographically sensitive branched novolaks using a mannich base intermediate

Also Published As

Publication number Publication date
CA2015721A1 (en) 1990-11-12
AU5488290A (en) 1990-11-15
EP0397460A3 (en) 1992-02-26
NO902061L (no) 1990-11-13
CN1047398A (zh) 1990-11-28
AU635928B2 (en) 1993-04-08
JPH0379619A (ja) 1991-04-04
IL94353A (en) 1994-02-27
KR900018186A (ko) 1990-12-20
EP0397460A2 (en) 1990-11-14
BR9002205A (pt) 1991-08-13
NO902061D0 (no) 1990-05-10
ZA903560B (en) 1991-01-30
IL94353A0 (en) 1991-03-10

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Legal Events

Date Code Title Description
FA Application withdrawn

Owner name: ROHM AND HAAS CO