FI88226C - Foerfarande foer styrning av en elektronstraole i en elektronaccelerator samt en elektronaccelerator - Google Patents

Foerfarande foer styrning av en elektronstraole i en elektronaccelerator samt en elektronaccelerator Download PDF

Info

Publication number
FI88226C
FI88226C FI902595A FI902595A FI88226C FI 88226 C FI88226 C FI 88226C FI 902595 A FI902595 A FI 902595A FI 902595 A FI902595 A FI 902595A FI 88226 C FI88226 C FI 88226C
Authority
FI
Finland
Prior art keywords
window
actual
electrons
electron
grating
Prior art date
Application number
FI902595A
Other languages
English (en)
Finnish (fi)
Swedish (sv)
Other versions
FI902595A (fi
FI902595A0 (fi
FI88226B (fi
Inventor
Pertti Puumalainen
Original Assignee
Tampella Oy Ab
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tampella Oy Ab filed Critical Tampella Oy Ab
Priority to FI902595A priority Critical patent/FI88226C/fi
Publication of FI902595A0 publication Critical patent/FI902595A0/fi
Priority to DE19914191099 priority patent/DE4191099T/de
Priority to JP91509283A priority patent/JPH05506538A/ja
Priority to PCT/FI1991/000153 priority patent/WO1991018411A1/en
Publication of FI902595A publication Critical patent/FI902595A/fi
Priority to GB9223836A priority patent/GB2261987A/en
Priority to SE9203508A priority patent/SE9203508L/xx
Publication of FI88226B publication Critical patent/FI88226B/fi
Application granted granted Critical
Publication of FI88226C publication Critical patent/FI88226C/fi

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J33/00Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
    • H01J33/02Details
    • H01J33/04Windows
    • HELECTRICITY
    • H05ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05HPLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H7/00Details of devices of the types covered by groups H05H9/00, H05H11/00, H05H13/00

Landscapes

  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Particle Accelerators (AREA)
  • Electron Sources, Ion Sources (AREA)
  • Data Exchanges In Wide-Area Networks (AREA)
FI902595A 1990-05-24 1990-05-24 Foerfarande foer styrning av en elektronstraole i en elektronaccelerator samt en elektronaccelerator FI88226C (fi)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI902595A FI88226C (fi) 1990-05-24 1990-05-24 Foerfarande foer styrning av en elektronstraole i en elektronaccelerator samt en elektronaccelerator
DE19914191099 DE4191099T (zh) 1990-05-24 1991-05-14
JP91509283A JPH05506538A (ja) 1990-05-24 1991-05-14 電子加速器の電子ビームを制御する方法と電子加速器
PCT/FI1991/000153 WO1991018411A1 (en) 1990-05-24 1991-05-14 Method of controlling an electron beam in an electron accelerator and an electron accelerator
GB9223836A GB2261987A (en) 1990-05-24 1992-10-08 Method of controlling an electron beam in an electron accelerator and an electron accelerator
SE9203508A SE9203508L (sv) 1990-05-24 1992-11-23 Foerfarande foer styrning av en elektronstraale i en elektronaccelerator samt en elektronaccelertor

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI902595A FI88226C (fi) 1990-05-24 1990-05-24 Foerfarande foer styrning av en elektronstraole i en elektronaccelerator samt en elektronaccelerator
FI902595 1990-05-24

Publications (4)

Publication Number Publication Date
FI902595A0 FI902595A0 (fi) 1990-05-24
FI902595A FI902595A (fi) 1991-11-25
FI88226B FI88226B (fi) 1992-12-31
FI88226C true FI88226C (fi) 1993-04-13

Family

ID=8530507

Family Applications (1)

Application Number Title Priority Date Filing Date
FI902595A FI88226C (fi) 1990-05-24 1990-05-24 Foerfarande foer styrning av en elektronstraole i en elektronaccelerator samt en elektronaccelerator

Country Status (6)

Country Link
JP (1) JPH05506538A (zh)
DE (1) DE4191099T (zh)
FI (1) FI88226C (zh)
GB (1) GB2261987A (zh)
SE (1) SE9203508L (zh)
WO (1) WO1991018411A1 (zh)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8339024B2 (en) 2009-07-20 2012-12-25 Hitachi Zosen Corporation Methods and apparatuses for reducing heat on an emitter exit window
CN104717822B (zh) * 2015-03-30 2017-11-03 同方威视技术股份有限公司 电子帘加速器和控制方法

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1179277A (en) * 1967-02-14 1970-01-28 Ford Motor Co An Electron Discharge Device.
US4061944A (en) * 1975-06-25 1977-12-06 Avco Everett Research Laboratory, Inc. Electron beam window structure for broad area electron beam generators
DE3020809A1 (de) * 1980-06-02 1981-12-10 M.A.N. Maschinenfabrik Augsburg-Nürnberg AG, 8000 München Verfahren zur herstellung eines elektronenstrahlaustrittsfensters
FI70346C (fi) * 1983-05-03 1986-09-15 Enso Gutzeit Oy Anordning foer aostadkommande av en elektronridao
US4591756A (en) * 1985-02-25 1986-05-27 Energy Sciences, Inc. High power window and support structure for electron beam processors

Also Published As

Publication number Publication date
WO1991018411A1 (en) 1991-11-28
FI902595A (fi) 1991-11-25
FI902595A0 (fi) 1990-05-24
GB9223836D0 (en) 1993-03-24
GB2261987A (en) 1993-06-02
DE4191099T (zh) 1993-05-13
SE9203508D0 (sv) 1992-11-23
SE9203508L (sv) 1992-11-23
JPH05506538A (ja) 1993-09-22
FI88226B (fi) 1992-12-31

Similar Documents

Publication Publication Date Title
JP5248315B2 (ja) イオンがeuv光源の内部部品に到達することを防ぐための、プラズマ生成イオンを偏向するシステム
JP4832285B2 (ja) X線源
US4492873A (en) Apparatus for electron beam irradiation of objects
EP1332651A2 (en) Target for production of x-rays
JPH01284268A (ja) 荷電粒子ビームの発生および輪送のための装置
GB2378313A (en) Reducing space charge effects in ion beams using cusp-type magnetic fields
FI88226C (fi) Foerfarande foer styrning av en elektronstraole i en elektronaccelerator samt en elektronaccelerator
US2890342A (en) System for charge neutralization
KR20000061395A (ko) 전자빔 가속기를 이용한 산업용 엑스선원 및 전자선원
SE467990B (sv) Jonplasmaelektronkanon
JPS61279100A (ja) 光学的にパルス出力された電子の加速器
JP4470126B2 (ja) イオン注入装置用の電子シャワー
US9153410B2 (en) X-ray generating method, and X-ray generating apparatus
SE469305B (sv) Foerfarande foer framstaellning av hoegeffektiva jonridaaer med hoeg verkningsgrad
US6341157B1 (en) Rotation anticathode-X ray generating equipment
JPH0456418B2 (zh)
KR100711529B1 (ko) 아크-프리 전자총
US5631471A (en) Device to irradiate surfaces with electrons
US3469139A (en) Apparatus for electron beam control
US6151384A (en) X-ray tube with magnetic electron steering
US3679930A (en) Method for increasing the output of an electron accelerator
GB2440414A (en) An ion beam guide tube for a wafer neutralization system in an ion implanter
US3720828A (en) Apparatus for and method of controlling relativistic charged particle beam distribution and transport
JPH0526539B2 (zh)
US3323088A (en) Charged particle extracting magnet for an accelerator

Legal Events

Date Code Title Description
MM Patent lapsed
MM Patent lapsed

Owner name: OY TAMPELLA AB