FI20165598A - Menetelmä silikonituotteen saastuttaman metalliepäpuhtauksia sisältävän konsentraation määrittämiseksi - Google Patents
Menetelmä silikonituotteen saastuttaman metalliepäpuhtauksia sisältävän konsentraation määrittämiseksi Download PDFInfo
- Publication number
- FI20165598A FI20165598A FI20165598A FI20165598A FI20165598A FI 20165598 A FI20165598 A FI 20165598A FI 20165598 A FI20165598 A FI 20165598A FI 20165598 A FI20165598 A FI 20165598A FI 20165598 A FI20165598 A FI 20165598A
- Authority
- FI
- Finland
- Prior art keywords
- contaminating
- metal pollution
- pollution concentration
- silicone product
- determining metal
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/021—Preparation
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
-
- C—CHEMISTRY; METALLURGY
- C01—INORGANIC CHEMISTRY
- C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
- C01B33/00—Silicon; Compounds thereof
- C01B33/02—Silicon
- C01B33/037—Purification
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N1/00—Sampling; Preparing specimens for investigation
- G01N1/28—Preparing specimens for investigation including physical details of (bio-)chemical methods covered elsewhere, e.g. G01N33/50, C12Q
- G01N1/40—Concentrating samples
- G01N1/4044—Concentrating samples by chemical techniques; Digestion; Chemical decomposition
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J49/00—Particle spectrometers or separator tubes
- H01J49/02—Details
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- Analytical Chemistry (AREA)
- General Health & Medical Sciences (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Biochemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Other Investigation Or Analysis Of Materials By Electrical Means (AREA)
- Sampling And Sample Adjustment (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
- Silicon Compounds (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201461923328P | 2014-01-03 | 2014-01-03 | |
| PCT/US2014/072946 WO2015103366A1 (en) | 2014-01-03 | 2014-12-31 | Method for determining a concentration of metal impurities contaminating a silicon product |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| FI20165598A true FI20165598A (fi) | 2016-07-27 |
Family
ID=53494010
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| FI20165598A FI20165598A (fi) | 2014-01-03 | 2016-07-27 | Menetelmä silikonituotteen saastuttaman metalliepäpuhtauksia sisältävän konsentraation määrittämiseksi |
Country Status (9)
| Country | Link |
|---|---|
| US (1) | US20160320275A1 (fi) |
| JP (1) | JP2017512298A (fi) |
| KR (1) | KR20160106117A (fi) |
| CN (1) | CN105899458A (fi) |
| CA (1) | CA2935320A1 (fi) |
| DE (1) | DE112014006099T5 (fi) |
| FI (1) | FI20165598A (fi) |
| TW (1) | TW201527731A (fi) |
| WO (1) | WO2015103366A1 (fi) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP6199686B2 (ja) * | 2013-10-04 | 2017-09-20 | 信越化学工業株式会社 | レジスト組成物の製造方法 |
| CN105424680A (zh) * | 2015-11-20 | 2016-03-23 | 沈阳黎明航空发动机(集团)有限责任公司 | 一种碳化钨钴合金粉末成份的分析方法 |
| US20170269004A1 (en) | 2016-03-18 | 2017-09-21 | Hemlock Semiconductor Corporation | Low impurity detection method for characterizing metals within a surface and sub-surface of polycrystalline silicon |
| EP4018019B1 (de) * | 2020-07-21 | 2022-12-21 | Wacker Chemie AG | Verfahren zur bestimmung von spurenmetallen in silicium |
| CN113533489A (zh) * | 2021-08-09 | 2021-10-22 | 上海富乐德智能科技发展有限公司 | 一种半导体设备零部件通孔内微污染的测试方法 |
| CN113960155A (zh) * | 2021-10-28 | 2022-01-21 | 西安奕斯伟材料科技有限公司 | 用于检测抛光液中的金属杂质的方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3331106B2 (ja) * | 1995-11-29 | 2002-10-07 | 株式会社東芝 | 半導体薄膜または半導体基板の不純物分析方法 |
| US5851303A (en) * | 1996-05-02 | 1998-12-22 | Hemlock Semiconductor Corporation | Method for removing metal surface contaminants from silicon |
| JP2002517753A (ja) * | 1998-06-08 | 2002-06-18 | エムイーエムシー・エレクトロニック・マテリアルズ・インコーポレイテッド | ウェハ洗浄液内の金属不純物の濃度をモニタする方法 |
| JP2004012315A (ja) * | 2002-06-07 | 2004-01-15 | Toshiba Ceramics Co Ltd | 炭化ケイ素材または窒化ケイ素材の不純物濃度分布測定方法ならびにセラミックスの不純物濃度分布測定方法 |
| JP3804864B2 (ja) * | 2004-05-24 | 2006-08-02 | 株式会社Ｓｕｍｃｏ | 不純物の分析方法 |
| CN103030149B (zh) * | 2012-12-10 | 2014-09-24 | 中国科学院过程工程研究所 | 一种从工业硅中去除杂质的方法 |
-
2014
- 2014-12-05 TW TW103142332A patent/TW201527731A/zh unknown
- 2014-12-31 US US15/108,973 patent/US20160320275A1/en not_active Abandoned
- 2014-12-31 JP JP2016544378A patent/JP2017512298A/ja active Pending
- 2014-12-31 KR KR1020167021236A patent/KR20160106117A/ko not_active Application Discontinuation
- 2014-12-31 CN CN201480072654.3A patent/CN105899458A/zh active Pending
- 2014-12-31 WO PCT/US2014/072946 patent/WO2015103366A1/en active Application Filing
- 2014-12-31 DE DE112014006099.2T patent/DE112014006099T5/de not_active Withdrawn
- 2014-12-31 CA CA2935320A patent/CA2935320A1/en not_active Abandoned
-
2016
- 2016-07-27 FI FI20165598A patent/FI20165598A/fi not_active IP Right Cessation
Also Published As
| Publication number | Publication date |
|---|---|
| CN105899458A (zh) | 2016-08-24 |
| CA2935320A1 (en) | 2015-07-09 |
| DE112014006099T5 (de) | 2016-09-22 |
| US20160320275A1 (en) | 2016-11-03 |
| KR20160106117A (ko) | 2016-09-09 |
| WO2015103366A1 (en) | 2015-07-09 |
| JP2017512298A (ja) | 2017-05-18 |
| TW201527731A (zh) | 2015-07-16 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PC | Transfer of assignment of patent |
Owner name: HEMLOCK SEMICONDUCTOR OPERATIONS LLC |
|
| MM | Patent lapsed |