FI20155546A - Förfarande för övervakning av tillstånd för en optisk väg i optisk emissionsspektroskopi av ett sampel och dataprogramprodukt för en processeringsanordning - Google Patents

Förfarande för övervakning av tillstånd för en optisk väg i optisk emissionsspektroskopi av ett sampel och dataprogramprodukt för en processeringsanordning

Info

Publication number
FI20155546A
FI20155546A FI20155546A FI20155546A FI20155546A FI 20155546 A FI20155546 A FI 20155546A FI 20155546 A FI20155546 A FI 20155546A FI 20155546 A FI20155546 A FI 20155546A FI 20155546 A FI20155546 A FI 20155546A
Authority
FI
Finland
Prior art keywords
optical
monitoring
sample
computer program
processing device
Prior art date
Application number
FI20155546A
Other languages
English (en)
Finnish (fi)
Inventor
Lauri Köresaar
Björn Salmi
Arto Ollikainen
Original Assignee
Outotec Finland Oy
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Outotec Finland Oy filed Critical Outotec Finland Oy
Priority to FI20155546A priority Critical patent/FI20155546A/sv
Priority to AU2016293213A priority patent/AU2016293213B2/en
Priority to BR112018000233A priority patent/BR112018000233A2/pt
Priority to CA2991462A priority patent/CA2991462A1/en
Priority to PCT/FI2016/050504 priority patent/WO2017009528A1/en
Publication of FI20155546A publication Critical patent/FI20155546A/sv
Priority to ZA2018/00363A priority patent/ZA201800363B/en

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/71—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light thermally excited
    • G01N21/718—Laser microanalysis, i.e. with formation of sample plasma
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01—Arrangements or apparatus for facilitating the optical investigation
    • G01N21/15—Preventing contamination of the components of the optical system or obstruction of the light path
    • G01N2021/155—Monitoring cleanness of window, lens, or other parts
    • G01N2021/157—Monitoring by optical means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
    • G01N2021/8592—Grain or other flowing solid samples
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
    • G01N21/66—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence
    • G01N21/68—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light electrically excited, e.g. electroluminescence using high frequency electric fields
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/85—Investigating moving fluids or granular solids
FI20155546A 2015-07-10 2015-07-10 Förfarande för övervakning av tillstånd för en optisk väg i optisk emissionsspektroskopi av ett sampel och dataprogramprodukt för en processeringsanordning FI20155546A (sv)

Priority Applications (6)

Application Number Priority Date Filing Date Title
FI20155546A FI20155546A (sv) 2015-07-10 2015-07-10 Förfarande för övervakning av tillstånd för en optisk väg i optisk emissionsspektroskopi av ett sampel och dataprogramprodukt för en processeringsanordning
AU2016293213A AU2016293213B2 (en) 2015-07-10 2016-07-08 Method for observation state of optical path in optical emission spectroscopy of a sample and computer program product for a processing device
BR112018000233A BR112018000233A2 (pt) 2015-07-10 2016-07-08 método para o estado de observação de trajeto óptico em espectroscopia de emissão óptica de uma amostra e produto de programa de computador para um dispositivo de processamento
CA2991462A CA2991462A1 (en) 2015-07-10 2016-07-08 Method for observation state of optical path in optical emission spectroscopy of a sample and computer program product for a processing device
PCT/FI2016/050504 WO2017009528A1 (en) 2015-07-10 2016-07-08 Method for observation state of optical path in optical emission spectroscopy of a sample and computer program product for a processing device
ZA2018/00363A ZA201800363B (en) 2015-07-10 2018-01-18 Method for observation state of optical path in optical emission spectroscopy of a sample and computer program product for a processing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20155546A FI20155546A (sv) 2015-07-10 2015-07-10 Förfarande för övervakning av tillstånd för en optisk väg i optisk emissionsspektroskopi av ett sampel och dataprogramprodukt för en processeringsanordning

Publications (1)

Publication Number Publication Date
FI20155546A true FI20155546A (sv) 2017-01-11

Family

ID=56413702

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20155546A FI20155546A (sv) 2015-07-10 2015-07-10 Förfarande för övervakning av tillstånd för en optisk väg i optisk emissionsspektroskopi av ett sampel och dataprogramprodukt för en processeringsanordning

Country Status (6)

Country Link
AU (1) AU2016293213B2 (sv)
BR (1) BR112018000233A2 (sv)
CA (1) CA2991462A1 (sv)
FI (1) FI20155546A (sv)
WO (1) WO2017009528A1 (sv)
ZA (1) ZA201800363B (sv)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6603538B1 (en) * 2000-11-21 2003-08-05 Applied Materials, Inc. Method and apparatus employing optical emission spectroscopy to detect a fault in process conditions of a semiconductor processing system
FR2882593B1 (fr) * 2005-02-28 2007-05-04 Commissariat Energie Atomique Procede et systeme d'analyse physicochimique a l'aide d'une ablation par pulse laser
DE102006028250A1 (de) * 2006-06-20 2007-12-27 Carl Zeiss Microimaging Gmbh Verfahren zur Überwachung von Laserbearbeitungsprozessen
US7948617B2 (en) * 2007-07-09 2011-05-24 Fluke Corporation Optical multiwavelength window contamination monitor for optical control sensors and systems
JP2013036779A (ja) * 2011-08-04 2013-02-21 Toshiba Corp レーザー誘起ブレークダウン分光分析装置
CA2931919C (en) * 2013-12-02 2021-05-04 Outotec (Finland) Oy Method and apparatus for online analysis by laser-induced spectroscopy

Also Published As

Publication number Publication date
CA2991462A1 (en) 2017-01-19
AU2016293213A1 (en) 2018-02-08
ZA201800363B (en) 2019-08-28
AU2016293213B2 (en) 2018-11-29
BR112018000233A2 (pt) 2018-09-04
WO2017009528A1 (en) 2017-01-19

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