FI20135915A - Förbättrad gyroskopkonstruktion och gyroskop - Google Patents

Förbättrad gyroskopkonstruktion och gyroskop Download PDF

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Publication number
FI20135915A
FI20135915A FI20135915A FI20135915A FI20135915A FI 20135915 A FI20135915 A FI 20135915A FI 20135915 A FI20135915 A FI 20135915A FI 20135915 A FI20135915 A FI 20135915A FI 20135915 A FI20135915 A FI 20135915A
Authority
FI
Finland
Prior art keywords
gyroscope
construction
improved
improved gyroscope
gyroscope construction
Prior art date
Application number
FI20135915A
Other languages
English (en)
Finnish (fi)
Other versions
FI125695B (sv
Inventor
Anssi Blomqvist
Jaakko Ruohio
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to FI20135915A priority Critical patent/FI125695B/sv
Priority to US14/480,730 priority patent/US9452921B2/en
Priority to EP14776735.4A priority patent/EP3044542B1/en
Priority to JP2016542418A priority patent/JP6350664B2/ja
Priority to PCT/IB2014/064376 priority patent/WO2015036924A1/en
Priority to CN201480050417.7A priority patent/CN105531564B/zh
Priority to KR1020167009527A priority patent/KR101817496B1/ko
Priority to TW103131132A priority patent/TWI638141B/zh
Publication of FI20135915A publication Critical patent/FI20135915A/sv
Application granted granted Critical
Publication of FI125695B publication Critical patent/FI125695B/sv

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0058—Packages or encapsulation for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Toxicology (AREA)
  • Computer Hardware Design (AREA)
  • Gyroscopes (AREA)
FI20135915A 2013-09-11 2013-09-11 Förbättrad gyroskopkonstruktion och gyroskop FI125695B (sv)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FI20135915A FI125695B (sv) 2013-09-11 2013-09-11 Förbättrad gyroskopkonstruktion och gyroskop
US14/480,730 US9452921B2 (en) 2013-09-11 2014-09-09 Gyroscope structure and gyroscope
EP14776735.4A EP3044542B1 (en) 2013-09-11 2014-09-10 Improved gyroscope structure and gyroscope
JP2016542418A JP6350664B2 (ja) 2013-09-11 2014-09-10 改良されたジャイロスコープ構造体およびジャイロスコープ
PCT/IB2014/064376 WO2015036924A1 (en) 2013-09-11 2014-09-10 Improved gyroscope structure and gyroscope
CN201480050417.7A CN105531564B (zh) 2013-09-11 2014-09-10 改进的陀螺仪结构和陀螺仪
KR1020167009527A KR101817496B1 (ko) 2013-09-11 2014-09-10 개선된 자이로스코프 구조체 및 자이로스코프
TW103131132A TWI638141B (zh) 2013-09-11 2014-09-10 改良的陀螺儀結構以及陀螺儀

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20135915A FI125695B (sv) 2013-09-11 2013-09-11 Förbättrad gyroskopkonstruktion och gyroskop
FI20135915 2013-09-11

Publications (2)

Publication Number Publication Date
FI20135915A true FI20135915A (sv) 2015-03-12
FI125695B FI125695B (sv) 2016-01-15

Family

ID=51626107

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20135915A FI125695B (sv) 2013-09-11 2013-09-11 Förbättrad gyroskopkonstruktion och gyroskop

Country Status (8)

Country Link
US (1) US9452921B2 (sv)
EP (1) EP3044542B1 (sv)
JP (1) JP6350664B2 (sv)
KR (1) KR101817496B1 (sv)
CN (1) CN105531564B (sv)
FI (1) FI125695B (sv)
TW (1) TWI638141B (sv)
WO (1) WO2015036924A1 (sv)

Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FI20146153A (sv) * 2014-12-29 2016-06-30 Murata Manufacturing Co Mikromekanisk gyroskopstruktur
FI127202B (sv) * 2015-04-16 2018-01-31 Murata Manufacturing Co Treaxlat gyroskop
TWI610880B (zh) 2015-09-22 2018-01-11 村田製作所股份有限公司 半撓性的驗證質量
US10359284B2 (en) 2015-12-10 2019-07-23 Invensense, Inc. Yaw rate gyroscope robust to linear and angular acceleration
US10126129B2 (en) 2016-07-11 2018-11-13 Nxp Usa, Inc. Vibration and shock robust gyroscope
CN107782298B (zh) * 2016-08-27 2023-09-29 深迪半导体(绍兴)有限公司 一种三轴mems陀螺仪
US10247753B2 (en) * 2017-02-14 2019-04-02 Nxp Usa, Inc. MEMS device with off-axis shock protection
JP6627911B2 (ja) * 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
JP6627912B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6610706B2 (ja) * 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
US11085766B2 (en) 2017-11-10 2021-08-10 Semiconductor Components Industries, Llc Micromachined multi-axis gyroscopes with reduced stress sensitivity
JP6922961B2 (ja) * 2018-10-18 2021-08-18 株式会社村田製作所 回転運動検出用微小電気機械デバイス
US20200141732A1 (en) * 2018-11-02 2020-05-07 Semiconductor Components Industries, Llc Multi-axis gyroscope with reduced bias drift
CN109444465B (zh) * 2018-12-29 2024-09-24 深迪半导体(绍兴)有限公司 一种加速度计
CN110926445B (zh) * 2019-12-06 2022-03-08 深迪半导体(绍兴)有限公司 一种三轴mems陀螺仪
CN111024057B (zh) * 2019-12-30 2021-12-14 无锡莱斯能特科技有限公司 一种三轴mems陀螺仪
DE102020205372A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
DE102020205369A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
US11193771B1 (en) * 2020-06-05 2021-12-07 Analog Devices, Inc. 3-axis gyroscope with rotational vibration rejection
CN113175923A (zh) * 2021-05-19 2021-07-27 瑞声开泰科技(武汉)有限公司 一种mems波动陀螺仪

Family Cites Families (40)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5635640A (en) 1995-06-06 1997-06-03 Analog Devices, Inc. Micromachined device with rotationally vibrated masses
US5992233A (en) * 1996-05-31 1999-11-30 The Regents Of The University Of California Micromachined Z-axis vibratory rate gyroscope
US6257057B1 (en) * 1998-12-16 2001-07-10 L-3 Communications Corporation Epitaxial coriolis rate sensor
US6508122B1 (en) * 1999-09-16 2003-01-21 American Gnc Corporation Microelectromechanical system for measuring angular rate
US6742389B2 (en) * 2001-01-24 2004-06-01 The Regents Of The University Of Michigan Filter-based method and system for measuring angular speed of an object
DE60120921T2 (de) * 2001-04-27 2007-02-01 Stmicroelectronics S.R.L., Agrate Brianza Aus Halbleitermaterial hergestellter integrierter Kreisel
AU2002308545A1 (en) * 2001-05-02 2002-11-11 The Regents Of The University Of California Non-resonant four degrees-of-freedom micromachined gyroscope
US6722197B2 (en) * 2001-06-19 2004-04-20 Honeywell International Inc. Coupled micromachined structure
DE10203515A1 (de) * 2002-01-30 2003-08-07 Bosch Gmbh Robert Mikromechanischer Drehratensensor
FR2846740B1 (fr) * 2002-11-05 2005-02-04 Thales Sa Capteur gyrometrique micro-usine, a detection dans le plan de la plaque usinee
US7036372B2 (en) * 2003-09-25 2006-05-02 Kionix, Inc. Z-axis angular rate sensor
US7043985B2 (en) * 2004-01-13 2006-05-16 Georgia Tech Research Corporation High-resolution in-plane tuning fork gyroscope and methods of fabrication
WO2005103620A1 (en) * 2004-04-14 2005-11-03 Analog Devices, Inc. Inertial sensor with a linear array of sensor elements
EP1624286B1 (en) * 2004-08-03 2017-10-04 STMicroelectronics Srl Micro-electro-mechanical sensor with force feedback loop
FI116543B (sv) 2004-12-31 2005-12-15 Vti Technologies Oy En vibrerande mikromekanisk vinkelhastighetssensor
FI116544B (sv) * 2004-12-31 2005-12-15 Vti Technologies Oy Svängande mikromekanisk vinkelhastighetsgivare
US7213458B2 (en) * 2005-03-22 2007-05-08 Honeywell International Inc. Quadrature reduction in MEMS gyro devices using quad steering voltages
US7240552B2 (en) * 2005-06-06 2007-07-10 Bei Technologies, Inc. Torsional rate sensor with momentum balance and mode decoupling
US7228738B2 (en) * 2005-06-06 2007-06-12 Bei Technologies, Inc. Torsional rate sensor with momentum balance and mode decoupling
US7461552B2 (en) 2006-10-23 2008-12-09 Custom Sensors & Technologies, Inc. Dual axis rate sensor
US8047075B2 (en) * 2007-06-21 2011-11-01 Invensense, Inc. Vertically integrated 3-axis MEMS accelerometer with electronics
US8141424B2 (en) * 2008-09-12 2012-03-27 Invensense, Inc. Low inertia frame for detecting coriolis acceleration
DE102007030120B4 (de) * 2007-06-29 2010-04-08 Litef Gmbh Drehratensensor
GB0720412D0 (en) * 2007-10-18 2007-11-28 Melexis Nv Combined mems accelerometer and gyroscope
DE102007054505B4 (de) * 2007-11-15 2016-12-22 Robert Bosch Gmbh Drehratensensor
US8443667B2 (en) 2008-02-21 2013-05-21 The Regents Of The University Of California Temperature-robust MEMS gyroscope with 2-DOF sense-mode addressing the tradeoff between bandwith and gain
FI122397B (sv) * 2008-04-16 2011-12-30 Vti Technologies Oy En vibrerande mikromekanisk vinkelhastighetssensor
US8327705B2 (en) 2009-08-10 2012-12-11 ISC8 Inc. Frequency modulated micro-gyro signal processing method and device
DE102009001247A1 (de) * 2009-02-27 2010-09-09 Sensordynamics Ag Mikro-elektro-mechanischer Sensor
DE102009001922A1 (de) * 2009-03-26 2010-09-30 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um drei senkrecht aufeinanderstehende Raumachsen x, y und z
DE102009026511A1 (de) * 2009-05-27 2010-12-02 Sensordynamics Ag Mikro-Gyroskop zur Ermittlung von Rotationsbewegungen um mindestens eine von drei senkrecht aufeinanderstehenden Raumachsen
ITTO20091042A1 (it) * 2009-12-24 2011-06-25 St Microelectronics Srl Giroscopio integrato microelettromeccanico con migliorata struttura di azionamento
EP2378246A1 (en) 2010-04-16 2011-10-19 SensoNor Technologies AS MEMS Structure for an Angular Rate Sensor
DE102011056971A1 (de) * 2011-12-23 2013-06-27 Maxim Integrated Products, Inc. Mikromechanischer Coriolis-Drehratensensor
US9759563B2 (en) * 2012-01-31 2017-09-12 Nxp Usa, Inc. Vibration robust x-axis ring gyro transducer
US9212908B2 (en) * 2012-04-26 2015-12-15 Analog Devices, Inc. MEMS gyroscopes with reduced errors
ITTO20120855A1 (it) * 2012-09-28 2014-03-29 Milano Politecnico Struttura integrata di rilevamento risonante di accelerazione e velocita' angolare e relativo dispositivo sensore mems
US20140144232A1 (en) * 2012-11-28 2014-05-29 Yizhen Lin Spring for microelectromechanical systems (mems) device
US9360319B2 (en) * 2013-09-05 2016-06-07 Freescale Semiconductor, Inc. Multiple sense axis MEMS gyroscope having a single drive mode
US9995583B2 (en) * 2014-05-15 2018-06-12 Hanking Electronics, Ltd. Systems and methods for MEMS gyroscope shock robustness

Also Published As

Publication number Publication date
WO2015036924A1 (en) 2015-03-19
CN105531564B (zh) 2018-03-30
JP6350664B2 (ja) 2018-07-04
JP2016530542A (ja) 2016-09-29
KR20160054008A (ko) 2016-05-13
TWI638141B (zh) 2018-10-11
US9452921B2 (en) 2016-09-27
TW201518685A (zh) 2015-05-16
EP3044542B1 (en) 2018-05-09
CN105531564A (zh) 2016-04-27
EP3044542A1 (en) 2016-07-20
KR101817496B1 (ko) 2018-01-11
US20150068308A1 (en) 2015-03-12
FI125695B (sv) 2016-01-15

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