FI20135915A - Parannettu gyroskooppirakenne ja gyroskooppi - Google Patents

Parannettu gyroskooppirakenne ja gyroskooppi Download PDF

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Publication number
FI20135915A
FI20135915A FI20135915A FI20135915A FI20135915A FI 20135915 A FI20135915 A FI 20135915A FI 20135915 A FI20135915 A FI 20135915A FI 20135915 A FI20135915 A FI 20135915A FI 20135915 A FI20135915 A FI 20135915A
Authority
FI
Finland
Prior art keywords
gyroscope
construction
improved
improved gyroscope
gyroscope construction
Prior art date
Application number
FI20135915A
Other languages
English (en)
Swedish (sv)
Other versions
FI125695B (fi
Inventor
Anssi Blomqvist
Jaakko Ruohio
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to FI20135915A priority Critical patent/FI125695B/fi
Priority to US14/480,730 priority patent/US9452921B2/en
Priority to KR1020167009527A priority patent/KR101817496B1/ko
Priority to PCT/IB2014/064376 priority patent/WO2015036924A1/en
Priority to EP14776735.4A priority patent/EP3044542B1/en
Priority to CN201480050417.7A priority patent/CN105531564B/zh
Priority to TW103131132A priority patent/TWI638141B/zh
Priority to JP2016542418A priority patent/JP6350664B2/ja
Publication of FI20135915A publication Critical patent/FI20135915A/fi
Application granted granted Critical
Publication of FI125695B publication Critical patent/FI125695B/fi

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0032—Packages or encapsulation
    • B81B7/0058—Packages or encapsulation for protecting against damages due to external chemical or mechanical influences, e.g. shocks or vibrations
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5719—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using planar vibrating masses driven in a translation vibration along an axis
    • G01C19/5733—Structural details or topology
    • G01C19/574—Structural details or topology the devices having two sensing masses in anti-phase motion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5607—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks
    • G01C19/5621—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating tuning forks the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5642—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams
    • G01C19/5656—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using vibrating bars or beams the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C19/00—Gyroscopes; Turn-sensitive devices using vibrating masses; Turn-sensitive devices without moving masses; Measuring angular rate using gyroscopic effects
    • G01C19/56—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces
    • G01C19/5705—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis
    • G01C19/5712—Turn-sensitive devices using vibrating masses, e.g. vibratory angular rate sensors based on Coriolis forces using masses driven in reciprocating rotary motion about an axis the devices involving a micromechanical structure
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0242—Gyroscopes
FI20135915A 2013-09-11 2013-09-11 Parannettu gyroskooppirakenne ja gyroskooppi FI125695B (fi)

Priority Applications (8)

Application Number Priority Date Filing Date Title
FI20135915A FI125695B (fi) 2013-09-11 2013-09-11 Parannettu gyroskooppirakenne ja gyroskooppi
US14/480,730 US9452921B2 (en) 2013-09-11 2014-09-09 Gyroscope structure and gyroscope
KR1020167009527A KR101817496B1 (ko) 2013-09-11 2014-09-10 개선된 자이로스코프 구조체 및 자이로스코프
PCT/IB2014/064376 WO2015036924A1 (en) 2013-09-11 2014-09-10 Improved gyroscope structure and gyroscope
EP14776735.4A EP3044542B1 (en) 2013-09-11 2014-09-10 Improved gyroscope structure and gyroscope
CN201480050417.7A CN105531564B (zh) 2013-09-11 2014-09-10 改进的陀螺仪结构和陀螺仪
TW103131132A TWI638141B (zh) 2013-09-11 2014-09-10 改良的陀螺儀結構以及陀螺儀
JP2016542418A JP6350664B2 (ja) 2013-09-11 2014-09-10 改良されたジャイロスコープ構造体およびジャイロスコープ

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FI20135915A FI125695B (fi) 2013-09-11 2013-09-11 Parannettu gyroskooppirakenne ja gyroskooppi
FI20135915 2013-09-11

Publications (2)

Publication Number Publication Date
FI20135915A true FI20135915A (fi) 2015-03-12
FI125695B FI125695B (fi) 2016-01-15

Family

ID=51626107

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20135915A FI125695B (fi) 2013-09-11 2013-09-11 Parannettu gyroskooppirakenne ja gyroskooppi

Country Status (8)

Country Link
US (1) US9452921B2 (fi)
EP (1) EP3044542B1 (fi)
JP (1) JP6350664B2 (fi)
KR (1) KR101817496B1 (fi)
CN (1) CN105531564B (fi)
FI (1) FI125695B (fi)
TW (1) TWI638141B (fi)
WO (1) WO2015036924A1 (fi)

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FI20146153A (fi) * 2014-12-29 2016-06-30 Murata Manufacturing Co Mikromekaaninen gyroskooppirakenne
FI127202B (fi) * 2015-04-16 2018-01-31 Murata Manufacturing Co Kolmiakselinen gyroskooppi
TWI610880B (zh) 2015-09-22 2018-01-11 村田製作所股份有限公司 半撓性的驗證質量
US10359284B2 (en) 2015-12-10 2019-07-23 Invensense, Inc. Yaw rate gyroscope robust to linear and angular acceleration
US10126129B2 (en) 2016-07-11 2018-11-13 Nxp Usa, Inc. Vibration and shock robust gyroscope
CN107782298B (zh) * 2016-08-27 2023-09-29 深迪半导体(绍兴)有限公司 一种三轴mems陀螺仪
US10247753B2 (en) * 2017-02-14 2019-04-02 Nxp Usa, Inc. MEMS device with off-axis shock protection
JP6627911B2 (ja) * 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6627912B2 (ja) 2017-05-24 2020-01-08 株式会社村田製作所 圧電回転ｍｅｍｓ共振器
JP6610706B2 (ja) * 2017-05-24 2019-11-27 株式会社村田製作所 横駆動変換器を備える圧電ジャイロスコープ
JP6696530B2 (ja) * 2017-05-24 2020-05-20 株式会社村田製作所 圧電ジャイロスコープにおける連結懸架
US11085766B2 (en) * 2017-11-10 2021-08-10 Semiconductor Components Industries, Llc Micromachined multi-axis gyroscopes with reduced stress sensitivity
JP6922961B2 (ja) * 2018-10-18 2021-08-18 株式会社村田製作所 回転運動検出用微小電気機械デバイス
US20200141732A1 (en) * 2018-11-02 2020-05-07 Semiconductor Components Industries, Llc Multi-axis gyroscope with reduced bias drift
CN110926445B (zh) * 2019-12-06 2022-03-08 深迪半导体(绍兴)有限公司 一种三轴mems陀螺仪
CN111024057B (zh) * 2019-12-30 2021-12-14 无锡莱斯能特科技有限公司 一种三轴mems陀螺仪
DE102020205372A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
DE102020205369A1 (de) * 2020-04-28 2021-10-28 Robert Bosch Gesellschaft mit beschränkter Haftung Mikromechanisches Bauteil für einen Drehratensensor und entsprechendes Herstellungsverfahren
US11193771B1 (en) * 2020-06-05 2021-12-07 Analog Devices, Inc. 3-axis gyroscope with rotational vibration rejection
CN113175923A (zh) * 2021-05-19 2021-07-27 瑞声开泰科技(武汉)有限公司 一种mems波动陀螺仪

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Also Published As

Publication number Publication date
KR101817496B1 (ko) 2018-01-11
CN105531564A (zh) 2016-04-27
JP6350664B2 (ja) 2018-07-04
TWI638141B (zh) 2018-10-11
US20150068308A1 (en) 2015-03-12
KR20160054008A (ko) 2016-05-13
FI125695B (fi) 2016-01-15
WO2015036924A1 (en) 2015-03-19
EP3044542A1 (en) 2016-07-20
EP3044542B1 (en) 2018-05-09
US9452921B2 (en) 2016-09-27
TW201518685A (zh) 2015-05-16
CN105531564B (zh) 2018-03-30
JP2016530542A (ja) 2016-09-29

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