FI20135712A - CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER - Google Patents

CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELEROMETER Download PDF

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Publication number
FI20135712A
FI20135712A FI20135712A FI20135712A FI20135712A FI 20135712 A FI20135712 A FI 20135712A FI 20135712 A FI20135712 A FI 20135712A FI 20135712 A FI20135712 A FI 20135712A FI 20135712 A FI20135712 A FI 20135712A
Authority
FI
Finland
Prior art keywords
micromechanical
sensor structure
accelerometer
capacitive
micromechanical sensor
Prior art date
Application number
FI20135712A
Other languages
Finnish (fi)
Swedish (sv)
Other versions
FI126199B (en
Inventor
Matti Liukku
Ville-Pekka Rytkönen
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to FI20135712A priority Critical patent/FI126199B/en
Priority to TW103121684A priority patent/TWI570053B/en
Priority to US14/314,243 priority patent/US9547020B2/en
Priority to EP14753156.0A priority patent/EP3014285B1/en
Priority to PCT/IB2014/062650 priority patent/WO2014207710A1/en
Publication of FI20135712A publication Critical patent/FI20135712A/en
Application granted granted Critical
Publication of FI126199B publication Critical patent/FI126199B/en

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0078—Constitution or structural means for improving mechanical properties not provided for in B81B3/007 - B81B3/0075
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/03—Microengines and actuators
    • B81B2201/033—Comb drives
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
    • G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/18—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration in two or more dimensions
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0871—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Pressure Sensors (AREA)
FI20135712A 2013-06-28 2013-06-28 CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELERATOR SENSOR FI126199B (en)

Priority Applications (5)

Application Number Priority Date Filing Date Title
FI20135712A FI126199B (en) 2013-06-28 2013-06-28 CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELERATOR SENSOR
TW103121684A TWI570053B (en) 2013-06-28 2014-06-24 Capacitive micromechanical sensor structure and micromechanical accelerometer
US14/314,243 US9547020B2 (en) 2013-06-28 2014-06-25 Capacitive micromechanical sensor structure and micromechanical accelerometer
EP14753156.0A EP3014285B1 (en) 2013-06-28 2014-06-27 Capacitive micromechanical sensor structure and micromechanical accelerometer
PCT/IB2014/062650 WO2014207710A1 (en) 2013-06-28 2014-06-27 Capacitive micromechanical sensor structure and micromechanical accelerometer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20135712A FI126199B (en) 2013-06-28 2013-06-28 CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELERATOR SENSOR

Publications (2)

Publication Number Publication Date
FI20135712A true FI20135712A (en) 2015-01-07
FI126199B FI126199B (en) 2016-08-15

Family

ID=51383907

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20135712A FI126199B (en) 2013-06-28 2013-06-28 CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELERATOR SENSOR

Country Status (5)

Country Link
US (1) US9547020B2 (en)
EP (1) EP3014285B1 (en)
FI (1) FI126199B (en)
TW (1) TWI570053B (en)
WO (1) WO2014207710A1 (en)

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FI126199B (en) * 2013-06-28 2016-08-15 Murata Manufacturing Co CAPACITIVE MICROMECHANICAL SENSOR STRUCTURE AND MICROMECHANICAL ACCELERATOR SENSOR
FI127229B (en) 2015-03-09 2018-02-15 Murata Manufacturing Co Microelectromechanical structure and device
JP6657626B2 (en) * 2015-07-10 2020-03-04 セイコーエプソン株式会社 Physical quantity sensors, electronic devices and moving objects
US10190938B2 (en) 2015-09-22 2019-01-29 Murata Manufacturing Co., Ltd. Semi-flexible proof-mass
CN108450010B (en) 2015-09-25 2021-01-05 株式会社村田制作所 Improved micro-electromechanical accelerometer device
US10352960B1 (en) * 2015-10-30 2019-07-16 Garmin International, Inc. Free mass MEMS accelerometer
JP2018032848A (en) * 2016-08-25 2018-03-01 株式会社村田製作所 Semiconductor device
CN107064555B (en) * 2017-03-10 2020-09-04 中国科学院地质与地球物理研究所 MEMS accelerometer and manufacturing process thereof
TWI668412B (en) * 2017-05-08 2019-08-11 日商村田製作所股份有限公司 Capacitive microelectromechanical accelerometer and associated method
CN108519498B (en) * 2018-03-08 2020-09-18 北京航天控制仪器研究所 Self-adaptive closed-loop measurement system of resonant accelerometer
CN109490576A (en) * 2018-12-19 2019-03-19 成都力创云科技有限公司 Based on a kind of fully differential capacitor MEMS acceleration by SOI
JP7188311B2 (en) * 2019-07-31 2022-12-13 セイコーエプソン株式会社 Gyro sensors, electronic devices, and mobile objects
CN111732070B (en) * 2020-06-05 2023-01-17 东南大学 PT symmetrical lateral movement micro-electro-mechanical system

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FR2858853B1 (en) * 2003-08-13 2006-01-13 Sercel Rech Const Elect ACCELEROMETER WITH REDUCED PARASITE VIBRATION BY IMPROVED ELECTRODE FORM
US6910379B2 (en) * 2003-10-29 2005-06-28 Honeywell International, Inc. Out-of-plane compensation suspension for an accelerometer
US7013730B2 (en) * 2003-12-15 2006-03-21 Honeywell International, Inc. Internally shock caged serpentine flexure for micro-machined accelerometer
KR100513346B1 (en) * 2003-12-20 2005-09-07 삼성전기주식회사 A capacitance accelerometer having a compensation elctrode
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Also Published As

Publication number Publication date
US20150316581A1 (en) 2015-11-05
US9547020B2 (en) 2017-01-17
FI126199B (en) 2016-08-15
WO2014207710A1 (en) 2014-12-31
TWI570053B (en) 2017-02-11
TW201524888A (en) 2015-07-01
EP3014285A1 (en) 2016-05-04
EP3014285B1 (en) 2019-01-30

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