SG10201400597SA - Fully differential capacitive architecture for mems accelerometer - Google Patents
Fully differential capacitive architecture for mems accelerometerInfo
- Publication number
- SG10201400597SA SG10201400597SA SG10201400597SA SG10201400597SA SG10201400597SA SG 10201400597S A SG10201400597S A SG 10201400597SA SG 10201400597S A SG10201400597S A SG 10201400597SA SG 10201400597S A SG10201400597S A SG 10201400597SA SG 10201400597S A SG10201400597S A SG 10201400597SA
- Authority
- SG
- Singapore
- Prior art keywords
- fully differential
- mems accelerometer
- differential capacitive
- capacitive architecture
- architecture
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P15/13—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position
- G01P15/131—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by measuring the force required to restore a proofmass subjected to inertial forces to a null position with electrostatic counterbalancing means
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/02—Generating seismic energy
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
- G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
- G01V1/38—Seismology; Seismic or acoustic prospecting or detecting specially adapted for water-covered areas
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
- G01P2015/0822—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass
- G01P2015/0825—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass
- G01P2015/0837—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining out-of-plane movement of the mass for one single degree of freedom of movement of the mass the mass being suspended so as to only allow movement perpendicular to the plane of the substrate, i.e. z-axis sensor
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
- G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
- G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
- G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
- G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
- G01P2015/0882—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system for providing damping of vibrations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Engineering & Computer Science (AREA)
- Remote Sensing (AREA)
- Geology (AREA)
- Environmental & Geological Engineering (AREA)
- General Life Sciences & Earth Sciences (AREA)
- Acoustics & Sound (AREA)
- Geophysics (AREA)
- Oceanography (AREA)
- Pressure Sensors (AREA)
- Micromachines (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201361785851P | 2013-03-14 | 2013-03-14 | |
US14/190,673 US20140260617A1 (en) | 2013-03-14 | 2014-02-26 | Fully differential capacitive architecture for mems accelerometer |
Publications (1)
Publication Number | Publication Date |
---|---|
SG10201400597SA true SG10201400597SA (en) | 2014-10-30 |
Family
ID=50241204
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
SG10201400597SA SG10201400597SA (en) | 2013-03-14 | 2014-03-12 | Fully differential capacitive architecture for mems accelerometer |
Country Status (4)
Country | Link |
---|---|
US (2) | US20140260617A1 (en) |
EP (1) | EP2778691B1 (en) |
CA (1) | CA2844780C (en) |
SG (1) | SG10201400597SA (en) |
Families Citing this family (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20140260618A1 (en) * | 2013-03-14 | 2014-09-18 | Agency For Science Technology And Research (A*Star) | Force feedback electrodes in mems accelerometer |
US20140260617A1 (en) * | 2013-03-14 | 2014-09-18 | Agency For Science Technology And Research (A*Star) | Fully differential capacitive architecture for mems accelerometer |
US10273147B2 (en) | 2013-07-08 | 2019-04-30 | Motion Engine Inc. | MEMS components and method of wafer-level manufacturing thereof |
EP3028007A4 (en) * | 2013-08-02 | 2017-07-12 | Motion Engine Inc. | Mems motion sensor and method of manufacturing |
BR112016015182B1 (en) * | 2013-12-30 | 2022-10-04 | Pgs Geophysical As | CONTROL SYSTEM AND METHOD FOR MARINE VIBRATORS OPERATING NEAR SOURCES OF IMPULSIVE SEISMIC SIGNALS |
WO2015154173A1 (en) | 2014-04-10 | 2015-10-15 | Motion Engine Inc. | Mems pressure sensor |
WO2015184531A1 (en) | 2014-06-02 | 2015-12-10 | Motion Engine Inc. | Multi-mass mems motion sensor |
CA3004760A1 (en) | 2014-12-09 | 2016-06-16 | Motion Engine Inc. | 3d mems magnetometer and associated methods |
CA3004763A1 (en) | 2015-01-15 | 2016-07-21 | Motion Engine Inc. | 3d mems device with hermetic cavity |
US20170370768A1 (en) * | 2015-01-22 | 2017-12-28 | The Board Of Trustees Of The University Of Illinois | Micro-electro-mechanical-systems based acoustic emission sensors |
WO2017061991A1 (en) * | 2015-10-06 | 2017-04-13 | Halliburton Energy Services, Inc. | Acoustic logging tool utilizing fundamental resonance |
US20210042395A1 (en) * | 2019-08-08 | 2021-02-11 | International Business Machines Corporation | Connector wear correlation and prediction analysis |
CN113603054B (en) * | 2021-07-26 | 2024-01-26 | 杭州士兰微电子股份有限公司 | MEMS sensor and preparation method thereof |
CN113970655B (en) * | 2021-12-23 | 2022-04-12 | 杭州麦新敏微科技有限责任公司 | MEMS accelerometer and forming method thereof |
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US2443471A (en) | 1945-03-29 | 1948-06-15 | Bell Telephone Labor Inc | Piezoelectric damping means for mechanical vibrations |
US4104920A (en) * | 1977-04-01 | 1978-08-08 | The Singer Company | Piezoelectric damping mechanism |
US4175723A (en) * | 1978-04-03 | 1979-11-27 | Great Lakes Carbon Corporation | Method and apparatus for neutralizing the effect of accelerating and decelerating forces |
US4565940A (en) | 1984-08-14 | 1986-01-21 | Massachusetts Institute Of Technology | Method and apparatus using a piezoelectric film for active control of vibrations |
US4849668A (en) | 1987-05-19 | 1989-07-18 | Massachusetts Institute Of Technology | Embedded piezoelectric structure and control |
JPH0672899B2 (en) * | 1988-04-01 | 1994-09-14 | 株式会社日立製作所 | Acceleration sensor |
US4932261A (en) * | 1988-06-20 | 1990-06-12 | Triton Technologies, Inc. | Micro-machined accelerometer with tilt compensation |
US5205171A (en) * | 1991-01-11 | 1993-04-27 | Northrop Corporation | Miniature silicon accelerometer and method |
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US20140260618A1 (en) * | 2013-03-14 | 2014-09-18 | Agency For Science Technology And Research (A*Star) | Force feedback electrodes in mems accelerometer |
US20140260617A1 (en) | 2013-03-14 | 2014-09-18 | Agency For Science Technology And Research (A*Star) | Fully differential capacitive architecture for mems accelerometer |
-
2014
- 2014-02-26 US US14/190,673 patent/US20140260617A1/en not_active Abandoned
- 2014-03-04 CA CA2844780A patent/CA2844780C/en not_active Expired - Fee Related
- 2014-03-11 EP EP14158906.9A patent/EP2778691B1/en not_active Not-in-force
- 2014-03-12 SG SG10201400597SA patent/SG10201400597SA/en unknown
- 2014-06-03 US US14/294,999 patent/US9506946B2/en active Active
Also Published As
Publication number | Publication date |
---|---|
US20140260617A1 (en) | 2014-09-18 |
CA2844780C (en) | 2019-10-15 |
EP2778691B1 (en) | 2015-11-18 |
CA2844780A1 (en) | 2014-09-14 |
EP2778691A1 (en) | 2014-09-17 |
US20150293142A1 (en) | 2015-10-15 |
US9506946B2 (en) | 2016-11-29 |
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