AU2001270026A1 - Accelerometer with folded beams - Google Patents

Accelerometer with folded beams

Info

Publication number
AU2001270026A1
AU2001270026A1 AU2001270026A AU7002601A AU2001270026A1 AU 2001270026 A1 AU2001270026 A1 AU 2001270026A1 AU 2001270026 A AU2001270026 A AU 2001270026A AU 7002601 A AU7002601 A AU 7002601A AU 2001270026 A1 AU2001270026 A1 AU 2001270026A1
Authority
AU
Australia
Prior art keywords
accelerometer
folded beams
beams
folded
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
AU2001270026A
Inventor
Ben W. Jones
Arjun Selvakumar
Duli Yu
Lianzhong Yu
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ion Geophysical Corp
Original Assignee
Ion Geophysical Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ion Geophysical Corp filed Critical Ion Geophysical Corp
Publication of AU2001270026A1 publication Critical patent/AU2001270026A1/en
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01V—GEOPHYSICS; GRAVITATIONAL MEASUREMENTS; DETECTING MASSES OR OBJECTS; TAGS
    • G01V1/00—Seismology; Seismic or acoustic prospecting or detecting
    • G01V1/16—Receiving elements for seismic signals; Arrangements or adaptations of receiving elements
    • G01V1/18—Receiving elements, e.g. seismometer, geophone or torque detectors, for localised single point measurements
    • G01V1/181—Geophones
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0067—Mechanical properties
    • B81B3/0072—For controlling internal stress or strain in moving or flexible elements, e.g. stress compensating layers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B7/00—Microstructural systems; Auxiliary parts of microstructural devices or systems
    • B81B7/0009—Structural features, others than packages, for protecting a device against environmental influences
    • B81B7/0016—Protection against shocks or vibrations, e.g. vibration damping
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2201/00—Specific applications of microelectromechanical systems
    • B81B2201/02—Sensors
    • B81B2201/0228—Inertial sensors
    • B81B2201/0235—Accelerometers
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0109—Bridges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/01—Suspended structures, i.e. structures allowing a movement
    • B81B2203/0145—Flexible holders
    • B81B2203/0163—Spring holders
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00—Basic microelectromechanical structures
    • B81B2203/05—Type of movement
    • B81B2203/053—Translation according to an axis perpendicular to the substrate
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0814—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for translational movement of the mass, e.g. shuttle type

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Remote Sensing (AREA)
  • Computer Hardware Design (AREA)
  • Toxicology (AREA)
  • General Health & Medical Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Acoustics & Sound (AREA)
  • Environmental & Geological Engineering (AREA)
  • Geology (AREA)
  • General Life Sciences & Earth Sciences (AREA)
  • Geophysics (AREA)
  • Mechanical Engineering (AREA)
  • Pressure Sensors (AREA)
AU2001270026A 2000-06-21 2001-06-21 Accelerometer with folded beams Abandoned AU2001270026A1 (en)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US21299700P 2000-06-21 2000-06-21
US60212997 2000-06-21
US21760900P 2000-07-11 2000-07-11
US60217609 2000-07-11
PCT/US2001/019796 WO2001098786A1 (en) 2000-06-21 2001-06-21 Accelerometer with folded beams

Publications (1)

Publication Number Publication Date
AU2001270026A1 true AU2001270026A1 (en) 2002-01-02

Family

ID=26907684

Family Applications (1)

Application Number Title Priority Date Filing Date
AU2001270026A Abandoned AU2001270026A1 (en) 2000-06-21 2001-06-21 Accelerometer with folded beams

Country Status (6)

Country Link
US (2) US6805008B2 (en)
EP (2) EP1311863A4 (en)
AU (1) AU2001270026A1 (en)
CA (1) CA2413965C (en)
NO (1) NO20026151L (en)
WO (1) WO2001098786A1 (en)

Families Citing this family (54)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE10116931A1 (en) 2001-04-05 2002-10-17 Bosch Gmbh Robert sensor
US7248703B1 (en) 2001-06-26 2007-07-24 Bbn Technologies Corp. Systems and methods for adaptive noise cancellation
US7274621B1 (en) 2002-06-13 2007-09-25 Bbn Technologies Corp. Systems and methods for flow measurement
US7138293B2 (en) * 2002-10-04 2006-11-21 Dalsa Semiconductor Inc. Wafer level packaging technique for microdevices
US7255196B1 (en) 2002-11-19 2007-08-14 Bbn Technologies Corp. Windshield and sound-barrier for seismic sensors
US6865944B2 (en) * 2002-12-16 2005-03-15 Honeywell International Inc. Methods and systems for decelerating proof mass movements within MEMS structures
US6817244B2 (en) * 2003-01-06 2004-11-16 Honeywell International Inc. Methods and systems for actively controlling movement within MEMS structures
US6718825B1 (en) 2003-01-17 2004-04-13 Honeywell International Inc. Methods and systems for reducing stick-down within MEMS structures
US6860151B2 (en) * 2003-02-07 2005-03-01 Honeywell International Inc. Methods and systems for controlling movement within MEMS structures
US6978673B2 (en) * 2003-02-07 2005-12-27 Honeywell International, Inc. Methods and systems for simultaneously fabricating multi-frequency MEMS devices
EP1491901A1 (en) * 2003-06-25 2004-12-29 Matsushita Electric Works, Ltd. Semiconductor acceleration sensor and method of manufacturing the same
US7284431B1 (en) * 2003-11-14 2007-10-23 Bbn Technologies Corp. Geophone
US7013730B2 (en) * 2003-12-15 2006-03-21 Honeywell International, Inc. Internally shock caged serpentine flexure for micro-machined accelerometer
US7012322B2 (en) * 2003-12-22 2006-03-14 Honeywell International Inc. Method for reducing harmonic distortion in comb drive devices
US7036373B2 (en) 2004-06-29 2006-05-02 Honeywell International, Inc. MEMS gyroscope with horizontally oriented drive electrodes
US7232701B2 (en) * 2005-01-04 2007-06-19 Freescale Semiconductor, Inc. Microelectromechanical (MEM) device with a protective cap that functions as a motion stop
US20070163346A1 (en) * 2006-01-18 2007-07-19 Honeywell International Inc. Frequency shifting of rotational harmonics in mems devices
US7516661B2 (en) * 2006-02-23 2009-04-14 Honeywell International Inc. Z offset MEMS device
DE102007002725A1 (en) * 2007-01-18 2008-07-31 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Housing for micromechanical and micro-optical components used in mobile applications
US20080253226A1 (en) * 2007-04-11 2008-10-16 Stig Rune Lennart Tenghamn System and method for marine seismic surveying
JP5165294B2 (en) * 2007-07-06 2013-03-21 三菱電機株式会社 Capacitance type acceleration sensor
US8011247B2 (en) * 2008-06-26 2011-09-06 Honeywell International Inc. Multistage proof-mass movement deceleration within MEMS structures
US8187902B2 (en) 2008-07-09 2012-05-29 The Charles Stark Draper Laboratory, Inc. High performance sensors and methods for forming the same
US8104346B2 (en) * 2008-11-10 2012-01-31 Westerngeco L.L.C. MEMS-based capacitive sensor
US8098546B2 (en) * 2009-07-08 2012-01-17 Geospace Technologies, Lp Geophone having improved sensitivity
US8208347B2 (en) * 2009-07-08 2012-06-26 Geospace Technologies, Lp Geophone having improved damping control
US8050144B2 (en) * 2009-07-08 2011-11-01 Geospace Technologies Lp Vertical geophone having improved distortion characteristics
US8322216B2 (en) * 2009-09-22 2012-12-04 Duli Yu Micromachined accelerometer with monolithic electrodes and method of making the same
US8722445B2 (en) 2010-06-25 2014-05-13 International Business Machines Corporation Planar cavity MEMS and related structures, methods of manufacture and design structures
US9010170B2 (en) 2010-08-16 2015-04-21 Westerngeco L.L.C. Method and apparatus to test an accelerometer
US9217805B2 (en) 2010-10-01 2015-12-22 Westerngeco L.L.C. Monitoring the quality of particle motion data during a seismic acquisition
CN103547895B (en) * 2011-02-07 2016-08-24 离子地球物理学公司 For the method and apparatus sensing underwater signal
US10292445B2 (en) 2011-02-24 2019-05-21 Rochester Institute Of Technology Event monitoring dosimetry apparatuses and methods thereof
US9339224B2 (en) 2011-02-24 2016-05-17 Rochester Institute Of Technology Event dosimeter devices and methods thereof
CN102602879B (en) * 2011-11-23 2016-01-06 中国计量学院 Two step corrosion manufacture methods of resonance type accelerometer resonance beam and brace summer
GB2498520A (en) * 2012-01-13 2013-07-24 Secr Defence Accelerometer
US8800371B2 (en) * 2012-03-08 2014-08-12 Industrial Technology Research Institute Electrostatic force generator and force measurement system and accelerometer having the same
US20150059430A1 (en) * 2012-04-20 2015-03-05 Panasonic Intellectual Property Management Co., Ltd. Inertial force sensor
JP5888411B2 (en) * 2012-04-27 2016-03-22 株式会社村田製作所 Acceleration sensor
CN103675346B (en) 2012-09-21 2018-03-06 中国科学院地质与地球物理研究所 A kind of accelerometer and its manufacturing process
CN103675345B (en) * 2012-09-21 2017-12-01 中国科学院地质与地球物理研究所 A kind of accelerometer and its manufacturing process
CN102879608B (en) * 2012-10-26 2014-12-24 中国科学院上海微系统与信息技术研究所 Capacitive acceleration transducer for bending elastic beam and manufacturing method
CN102879609B (en) * 2012-10-26 2013-11-27 中国科学院上海微系统与信息技术研究所 Capacitive acceleration transducer for H-shaped beam and manufacturing method thereof
US20140260617A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Fully differential capacitive architecture for mems accelerometer
US20140260618A1 (en) * 2013-03-14 2014-09-18 Agency For Science Technology And Research (A*Star) Force feedback electrodes in mems accelerometer
CN104166016B (en) 2013-05-16 2016-06-01 中国科学院地质与地球物理研究所 A kind of highly sensitive 3 axis MEMS jerkmeter and manufacturing process thereof
CN104296784B (en) * 2013-07-19 2017-02-15 中国科学院地质与地球物理研究所 MEMS detection device and manufacturing technology thereof
US9470806B2 (en) 2013-08-29 2016-10-18 Pgs Geophysical As Piezoelectric accelerometer
EP3147258A1 (en) * 2015-09-22 2017-03-29 AT & S Austria Technologie & Systemtechnik Aktiengesellschaft Connection panel for electronic components
US10345330B2 (en) 2015-09-25 2019-07-09 Apple Inc. Mechanical low pass filter for motion sensors
US10324105B2 (en) * 2015-09-25 2019-06-18 Apple Inc. Mechanical low pass filter for motion sensors
CN107045073B (en) * 2017-02-07 2019-07-09 中国科学院上海微系统与信息技术研究所 Single silicon-chip double-sided symmetrical folds girder construction micro-acceleration sensor and preparation method thereof
FR3090613B1 (en) * 2018-12-20 2021-01-22 Commissariat Energie Atomique JOINT FOR MICRO AND NANOELECTROMECHANICAL SYSTEMS WITH OUT-OF-PLAN DISPLACEMENT OFFERING REDUCED NON-LINEARITY
CN109704268A (en) * 2019-02-21 2019-05-03 厦门大学 A kind of stretchable immune substrate of electronic interferences deformation

Family Cites Families (25)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3877296A (en) * 1970-12-09 1975-04-15 Kinemetrics Inc Strong motion accelerograph with self-starter and electrical as well as light outputs
US3884085A (en) * 1972-04-05 1975-05-20 Robinson Halpern Company Accelerometer assembly
US4922756A (en) 1988-06-20 1990-05-08 Triton Technologies, Inc. Micro-machined accelerometer
US5095749A (en) * 1986-08-25 1992-03-17 Hanson Richard A Proofmass suspension assembly for accelerometers
US5331853A (en) * 1991-02-08 1994-07-26 Alliedsignal Inc. Micromachined rate and acceleration sensor
US5345823A (en) * 1991-11-12 1994-09-13 Texas Instruments Incorporated Accelerometer
US5412987A (en) * 1992-09-24 1995-05-09 Siemens Automotive L.P. Folded cantilever beam accelerometer
US5507182A (en) * 1993-02-18 1996-04-16 Nippondenso Co., Ltd. Semiconductor accelerometer with damperless structure
US5777226A (en) 1994-03-28 1998-07-07 I/O Sensors, Inc. Sensor structure with L-shaped spring legs
US5484073A (en) 1994-03-28 1996-01-16 I/O Sensors, Inc. Method for fabricating suspension members for micromachined sensors
WO1995026509A1 (en) * 1994-03-28 1995-10-05 I/O Sensors, Inc. Sensor structure with l-shaped spring legs
DE19509868A1 (en) * 1995-03-17 1996-09-19 Siemens Ag Micromechanical semiconductor component
US5852242A (en) * 1995-12-04 1998-12-22 I/O Sensors, Inc. Apparatus with mechanical and electric springs and method for its manufacture
JPH10173052A (en) * 1996-12-13 1998-06-26 Fujitsu Ltd Semiconductor device and its manufacture
US5831162A (en) * 1997-01-21 1998-11-03 Delco Electronics Corporation Silicon micromachined motion sensor and method of making
US5674775A (en) * 1997-02-20 1997-10-07 Taiwan Semiconductor Manufacturing Company, Ltd. Isolation trench with a rounded top edge using an etch buffer layer
US6077790A (en) * 1997-03-14 2000-06-20 Micron Technology, Inc. Etching process using a buffer layer
US6223598B1 (en) * 1997-06-18 2001-05-01 Analog Devices, Inc. Suspension arrangement for semiconductor accelerometer
JP3439135B2 (en) * 1998-10-05 2003-08-25 沖電気工業株式会社 Semiconductor device manufacturing method and semiconductor device
US6105428A (en) 1998-12-10 2000-08-22 Motorola, Inc. Sensor and method of use
US6128954A (en) * 1998-12-18 2000-10-10 Delco Electronics Corporation Spring for a resonance ring of an angular rate sensor
US6158815A (en) * 1998-12-24 2000-12-12 Toyo Tire & Rubber Co., Ltd. Seat having a seat cushion including a polyurethane foam pad onto a portion of which a stretchable, nonwoven fabric is laminated
US6035694A (en) * 1999-03-12 2000-03-14 I/O Of Austin, Inc. Method and apparatus for calibration of stray capacitance mismatch in a closed loop electro-mechanical accelerometer
KR100404560B1 (en) * 2001-01-06 2003-11-05 삼성전자주식회사 Method of manufacturing semiconductor device
US6393914B1 (en) * 2001-02-13 2002-05-28 Delphi Technologies, Inc. Angular accelerometer

Also Published As

Publication number Publication date
EP2136215A3 (en) 2014-01-01
US20040255675A1 (en) 2004-12-23
US6805008B2 (en) 2004-10-19
CA2413965A1 (en) 2001-12-27
EP2136215A2 (en) 2009-12-23
NO20026151D0 (en) 2002-12-20
EP1311863A1 (en) 2003-05-21
CA2413965C (en) 2011-01-11
WO2001098786A1 (en) 2001-12-27
NO20026151L (en) 2003-02-14
EP1311863A4 (en) 2003-07-30
US20020178817A1 (en) 2002-12-05

Similar Documents

Publication Publication Date Title
AU2001270026A1 (en) Accelerometer with folded beams
AU2001285338A1 (en) Folding softbox
AU2001280099A1 (en) 4-acylaminopyrazole derivatives
AU2001225481A1 (en) Honeycomb structure
AU2001230584A1 (en) 1h-imidazopyridine derivatives
AU2001228708A1 (en) Coin-validation arrangement
AU2001253093A1 (en) Three axis accelerometer
AU1022101A (en) Accelerometer
AU2001230537A1 (en) Pyridoxazine derivatives
AU2001281802A1 (en) 6-phenylpyrrolopyrimidinedione derivatives
AU2001278790A1 (en) 1h-imidazopyridine derivatives
AU2002241536A1 (en) True-time delay generator
AU2002212301A1 (en) Diazacycloalkanedione derivatives
AU2001285373A1 (en) Anti-pilfering packaging assembly
AU2002212959A1 (en) Cycloalkylfluorosulfonamide derivatives
AU2001274265A1 (en) Sulphonamide derivatives
AU2002215212A1 (en) 1-methylcarbapenem derivatives
AU2001230565A1 (en) Perfluoroisopropylbenzene derivatives
AU2001254661A1 (en) Aminosulfonylbiphenyl derivatives
AU2001241512A1 (en) Sulfonamide derivatives
AU2001242772A1 (en) 3-substituted-4-pyrimidone derivatives
AUPQ761900A0 (en) Structural beam
AU2001289782A1 (en) Pyrrolotriazolopyrimidinone derivatives
AU2001241084A1 (en) Imidazolylbenzophenone derivatives
AU2001279721A1 (en) Structural member