FR2954505B1 - MICROMECHANICAL STRUCTURE COMPRISING A MOBILE PART HAVING STOPS FOR OFFLINE SHIFTS OF THE STRUCTURE AND METHOD FOR CARRYING OUT THE SAME - Google Patents

MICROMECHANICAL STRUCTURE COMPRISING A MOBILE PART HAVING STOPS FOR OFFLINE SHIFTS OF THE STRUCTURE AND METHOD FOR CARRYING OUT THE SAME

Info

Publication number
FR2954505B1
FR2954505B1 FR0959412A FR0959412A FR2954505B1 FR 2954505 B1 FR2954505 B1 FR 2954505B1 FR 0959412 A FR0959412 A FR 0959412A FR 0959412 A FR0959412 A FR 0959412A FR 2954505 B1 FR2954505 B1 FR 2954505B1
Authority
FR
France
Prior art keywords
offline
shifts
stops
carrying
same
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Fee Related
Application number
FR0959412A
Other languages
French (fr)
Other versions
FR2954505A1 (en
Inventor
Philippe Robert
Arnaud Walther
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Commissariat a lEnergie Atomique et aux Energies Alternatives CEA
Original Assignee
Commissariat a lEnergie Atomique CEA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Commissariat a lEnergie Atomique CEA filed Critical Commissariat a lEnergie Atomique CEA
Priority to FR0959412A priority Critical patent/FR2954505B1/en
Priority to EP10195946.8A priority patent/EP2343556B1/en
Priority to US12/974,540 priority patent/US9061895B2/en
Priority to JP2010286052A priority patent/JP5985147B2/en
Publication of FR2954505A1 publication Critical patent/FR2954505A1/en
Application granted granted Critical
Publication of FR2954505B1 publication Critical patent/FR2954505B1/en
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00444—Surface micromachining, i.e. structuring layers on the substrate
    • B81C1/00468—Releasing structures
    • B81C1/00476—Releasing structures removing a sacrificial layer
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0035—Constitution or structural means for controlling the movement of the flexible or deformable elements
    • B81B3/0051—For defining the movement, i.e. structures that guide or limit the movement of an element
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00912—Treatments or methods for avoiding stiction of flexible or moving parts of MEMS
    • B81C1/0096—For avoiding stiction when the device is in use, i.e. after manufacture has been completed
    • B81C1/00984—Methods for avoiding stiction when the device is in use not provided for in groups B81C1/00968 - B81C1/00976
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/0802—Details
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P15/125—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values by capacitive pick-up
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0805—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration
    • G01P2015/0808—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate
    • G01P2015/0811—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass
    • G01P2015/0817—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with a particular type of spring-mass-system for defining the displacement of a seismic mass due to an external acceleration for defining in-plane movement of the mass, i.e. movement of the mass in the plane of the substrate for one single degree of freedom of movement of the mass for pivoting movement of the mass, e.g. in-plane pendulum
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01P—MEASURING LINEAR OR ANGULAR SPEED, ACCELERATION, DECELERATION, OR SHOCK; INDICATING PRESENCE, ABSENCE, OR DIRECTION, OF MOVEMENT
    • G01P15/00—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration
    • G01P15/02—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses
    • G01P15/08—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values
    • G01P2015/0862—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system
    • G01P2015/0871—Measuring acceleration; Measuring deceleration; Measuring shock, i.e. sudden change of acceleration by making use of inertia forces using solid seismic masses with conversion into electric or magnetic values being provided with particular means being integrated into a MEMS accelerometer structure for providing particular additional functionalities to those of a spring mass system using stopper structures for limiting the travel of the seismic mass
    • H—ELECTRICITY
    • H04—ELECTRIC COMMUNICATION TECHNIQUE
    • H04R—LOUDSPEAKERS, MICROPHONES, GRAMOPHONE PICK-UPS OR LIKE ACOUSTIC ELECTROMECHANICAL TRANSDUCERS; DEAF-AID SETS; PUBLIC ADDRESS SYSTEMS
    • H04R2201/00—Details of transducers, loudspeakers or microphones covered by H04R1/00 but not provided for in any of its subgroups
    • H04R2201/003—Mems transducers or their use

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
  • Pressure Sensors (AREA)
FR0959412A 2009-12-22 2009-12-22 MICROMECHANICAL STRUCTURE COMPRISING A MOBILE PART HAVING STOPS FOR OFFLINE SHIFTS OF THE STRUCTURE AND METHOD FOR CARRYING OUT THE SAME Expired - Fee Related FR2954505B1 (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
FR0959412A FR2954505B1 (en) 2009-12-22 2009-12-22 MICROMECHANICAL STRUCTURE COMPRISING A MOBILE PART HAVING STOPS FOR OFFLINE SHIFTS OF THE STRUCTURE AND METHOD FOR CARRYING OUT THE SAME
EP10195946.8A EP2343556B1 (en) 2009-12-22 2010-12-20 Micromechanical structure including a mobile part equipped with stops for out-of-plane movements of the structure, and the method for making said structure
US12/974,540 US9061895B2 (en) 2009-12-22 2010-12-21 Micromechanical structure comprising a mobile part having stops for out-of plane displacements of the structure and its production process
JP2010286052A JP5985147B2 (en) 2009-12-22 2010-12-22 MICROMACHINE STRUCTURE WITH MOBILE UNIT WITH STOP PART FOR OUT-PLANE DISPLACEMENT OF STRUCTURE AND MANUFACTURING PROCESS

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR0959412A FR2954505B1 (en) 2009-12-22 2009-12-22 MICROMECHANICAL STRUCTURE COMPRISING A MOBILE PART HAVING STOPS FOR OFFLINE SHIFTS OF THE STRUCTURE AND METHOD FOR CARRYING OUT THE SAME

Publications (2)

Publication Number Publication Date
FR2954505A1 FR2954505A1 (en) 2011-06-24
FR2954505B1 true FR2954505B1 (en) 2012-08-03

Family

ID=42670352

Family Applications (1)

Application Number Title Priority Date Filing Date
FR0959412A Expired - Fee Related FR2954505B1 (en) 2009-12-22 2009-12-22 MICROMECHANICAL STRUCTURE COMPRISING A MOBILE PART HAVING STOPS FOR OFFLINE SHIFTS OF THE STRUCTURE AND METHOD FOR CARRYING OUT THE SAME

Country Status (4)

Country Link
US (1) US9061895B2 (en)
EP (1) EP2343556B1 (en)
JP (1) JP5985147B2 (en)
FR (1) FR2954505B1 (en)

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FR2965349B1 (en) * 2010-09-23 2017-01-20 Commissariat Energie Atomique BOLOMETER WITH FREQUENCY DETECTION
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FR2983844B1 (en) 2011-12-12 2014-08-08 Commissariat Energie Atomique PIVOT MECHANICAL BONDING FOR MEMS AND NEMS MECHANICAL STRUCTURES
FR3000050B1 (en) 2012-12-20 2016-03-04 Tronic S Microsystems MICROELECTROMECHANICAL DEVICE HAVING AT LEAST TWO DEFORMABLE ELEMENTS OF DIFFERENT DIMENSIONS
FR3000194B1 (en) 2012-12-24 2015-03-13 Commissariat Energie Atomique SIMPLIFIED CALIBRATION GYROSCOPE AND METHOD FOR SIMPLIFIED CALIBRATION OF A GYROSCOPE
FR3000484B1 (en) 2012-12-27 2017-11-10 Tronic's Microsystems MICROELECTROMECHANICAL DEVICE COMPRISING A MOBILE MASS THAT IS ABLE TO MOVE OUT OF THE PLAN
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US10371715B2 (en) 2013-12-23 2019-08-06 Invensense, Inc. MEMS accelerometer with proof masses moving in an anti-phase direction
US8973439B1 (en) * 2013-12-23 2015-03-10 Invensense, Inc. MEMS accelerometer with proof masses moving in anti-phase direction normal to the plane of the substrate
JP2015123526A (en) * 2013-12-26 2015-07-06 ソニー株式会社 Function element, acceleration sensor, and switch
DE102014202819A1 (en) 2014-02-17 2015-08-20 Robert Bosch Gmbh Micromechanical structure for an acceleration sensor
JP2015161878A (en) * 2014-02-28 2015-09-07 セイコーエプソン株式会社 Actuator, optical scanner, image display device, and head mount display
FR3018916B1 (en) 2014-03-19 2017-08-25 Commissariat Energie Atomique MICROELECTROMECHANICAL AND / OR NANOELECTROMECHANICAL DIFFERENTIAL PRESSURE MEASURING SENSOR
FR3021309A1 (en) 2014-05-26 2015-11-27 Commissariat Energie Atomique CAPACITIVE CAPACITIVE MICROELECTRONIC AND / OR NANOELECTRONIC DEVICE WITH INCREASED COMPACITY
EP3038126A1 (en) * 2014-12-22 2016-06-29 DelfMEMS SAS MEMS structure with thick movable membrane
KR20160091143A (en) * 2015-01-23 2016-08-02 삼성전기주식회사 MEMS Sensor
ITUB20153580A1 (en) 2015-09-11 2017-03-11 St Microelectronics Srl MICROELETTROMECHANICAL SENSOR DEVICE WITH REDUCED SENSITIVITY TO STRESS AND ITS MANUFACTURING PROCEDURE
WO2017204858A1 (en) * 2016-05-26 2017-11-30 Mems Drive Inc. Shock caging features for mems actuator structures
FR3058409A1 (en) * 2016-11-10 2018-05-11 Commissariat A L'energie Atomique Et Aux Energies Alternatives ARTICULATED MICROELECTROMECHANICAL AND / OR NANOELECTROMECHANICAL DEVICE WITH OFF-PLAN SHIFT
FR3065956B1 (en) * 2017-02-23 2021-05-21 Safran MEMS OR NEMS DEVICE WITH STOP STACKING
JP6691882B2 (en) * 2017-03-03 2020-05-13 株式会社日立製作所 Acceleration sensor
CN106876265B (en) * 2017-03-29 2019-05-03 武汉华星光电技术有限公司 A kind of method of differentiation control etch depth
FR3082998B1 (en) * 2018-06-25 2021-01-08 Commissariat Energie Atomique DEVICE AND METHODS FOR TRANSFERRING CHIPS FROM A SOURCE SUBSTRATE TO A DESTINATION SUBSTRATE
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Also Published As

Publication number Publication date
FR2954505A1 (en) 2011-06-24
US9061895B2 (en) 2015-06-23
US20110147860A1 (en) 2011-06-23
EP2343556B1 (en) 2018-10-24
EP2343556A1 (en) 2011-07-13
JP2011148084A (en) 2011-08-04
JP5985147B2 (en) 2016-09-06

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