FI126516B - En mikromekanisk flernivåstruktur - Google Patents

En mikromekanisk flernivåstruktur Download PDF

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Publication number
FI126516B
FI126516B FI20155843A FI20155843A FI126516B FI 126516 B FI126516 B FI 126516B FI 20155843 A FI20155843 A FI 20155843A FI 20155843 A FI20155843 A FI 20155843A FI 126516 B FI126516 B FI 126516B
Authority
FI
Finland
Prior art keywords
rotor
mask
stator
device wafer
layer
Prior art date
Application number
FI20155843A
Other languages
English (en)
Finnish (fi)
Other versions
FI20155843A (sv
Inventor
Altti Torkkeli
Antti Iihola
Ville-Pekka Rytkönen
Matti Liukku
Original Assignee
Murata Manufacturing Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Murata Manufacturing Co filed Critical Murata Manufacturing Co
Priority to FI20155843A priority Critical patent/FI126516B/sv
Priority to TW105113943A priority patent/TWI636949B/zh
Priority to US15/147,197 priority patent/US9764942B2/en
Priority to JP2018511536A priority patent/JP6558495B2/ja
Priority to EP16725234.5A priority patent/EP3294664A1/en
Priority to PCT/IB2016/052630 priority patent/WO2016185313A1/en
Priority to CN201680027941.1A priority patent/CN107667067B/zh
Publication of FI20155843A publication Critical patent/FI20155843A/sv
Application granted granted Critical
Publication of FI126516B publication Critical patent/FI126516B/sv

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81B—MICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00—Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0064—Constitution or structural means for improving or controlling the physical properties of a device
    • B81B3/0086—Electrical characteristics, e.g. reducing driving voltage, improving resistance to peak voltage
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B81—MICROSTRUCTURAL TECHNOLOGY
    • B81C—PROCESSES OR APPARATUS SPECIALLY ADAPTED FOR THE MANUFACTURE OR TREATMENT OF MICROSTRUCTURAL DEVICES OR SYSTEMS
    • B81C1/00—Manufacture or treatment of devices or systems in or on a substrate
    • B81C1/00436—Shaping materials, i.e. techniques for structuring the substrate or the layers on the substrate
    • B81C1/00555—Achieving a desired geometry, i.e. controlling etch rates, anisotropy or selectivity
    • B81C1/00603—Aligning features and geometries on both sides of a substrate, e.g. when double side etching

Landscapes

  • Engineering & Computer Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Micromachines (AREA)
FI20155843A 2015-05-15 2015-11-16 En mikromekanisk flernivåstruktur FI126516B (sv)

Priority Applications (7)

Application Number Priority Date Filing Date Title
FI20155843A FI126516B (sv) 2015-11-16 2015-11-16 En mikromekanisk flernivåstruktur
TW105113943A TWI636949B (zh) 2015-05-15 2016-05-05 多層微機械結構
US15/147,197 US9764942B2 (en) 2015-05-15 2016-05-05 Multi-level micromechanical structure
JP2018511536A JP6558495B2 (ja) 2015-05-15 2016-05-09 マルチレベルマイクロメカニカル構造
EP16725234.5A EP3294664A1 (en) 2015-05-15 2016-05-09 A multi-level micromechanical structure
PCT/IB2016/052630 WO2016185313A1 (en) 2015-05-15 2016-05-09 A multi-level micromechanical structure
CN201680027941.1A CN107667067B (zh) 2015-05-15 2016-05-09 多级微机械结构

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FI20155843A FI126516B (sv) 2015-11-16 2015-11-16 En mikromekanisk flernivåstruktur

Publications (2)

Publication Number Publication Date
FI20155843A FI20155843A (sv) 2016-11-16
FI126516B true FI126516B (sv) 2017-01-13

Family

ID=57494788

Family Applications (1)

Application Number Title Priority Date Filing Date
FI20155843A FI126516B (sv) 2015-05-15 2015-11-16 En mikromekanisk flernivåstruktur

Country Status (1)

Country Link
FI (1) FI126516B (sv)

Also Published As

Publication number Publication date
FI20155843A (sv) 2016-11-16

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