ES533633A0 - Un modulo de aislamiento externo para usarse con un aparato de deposicion adaptado para depositar material semiconductor sobre un substrato - Google Patents
Un modulo de aislamiento externo para usarse con un aparato de deposicion adaptado para depositar material semiconductor sobre un substratoInfo
- Publication number
- ES533633A0 ES533633A0 ES533633A ES533633A ES533633A0 ES 533633 A0 ES533633 A0 ES 533633A0 ES 533633 A ES533633 A ES 533633A ES 533633 A ES533633 A ES 533633A ES 533633 A0 ES533633 A0 ES 533633A0
- Authority
- ES
- Spain
- Prior art keywords
- deposit
- substrate
- apparatus adapted
- semiconductive material
- external insulation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000009422 external insulation Methods 0.000 title 1
- 239000000463 material Substances 0.000 title 1
- 239000000758 substrate Substances 0.000 title 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/54—Apparatus specially adapted for continuous coating
- C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
- F16J—PISTONS; CYLINDERS; SEALINGS
- F16J15/00—Sealings
- F16J15/16—Sealings between relatively-moving surfaces
- F16J15/168—Sealings between relatively-moving surfaces which permits material to be continuously conveyed
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/20—Deposition of semiconductor materials on a substrate, e.g. epitaxial growth solid phase epitaxy
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S118/00—Coating apparatus
- Y10S118/90—Semiconductor vapor doping
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S277/00—Seal for a joint or juncture
- Y10S277/913—Seal for fluid pressure below atmospheric, e.g. vacuum
Landscapes
- Engineering & Computer Science (AREA)
- Chemical & Material Sciences (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Computer Hardware Design (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Materials Engineering (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Chemical Vapour Deposition (AREA)
- Photovoltaic Devices (AREA)
- Packages (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Physical Vapour Deposition (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US06/506,960 US4480585A (en) | 1983-06-23 | 1983-06-23 | External isolation module |
Publications (2)
Publication Number | Publication Date |
---|---|
ES533633A0 true ES533633A0 (es) | 1986-05-16 |
ES8607624A1 ES8607624A1 (es) | 1986-05-16 |
Family
ID=24016696
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
ES533633A Expired ES8607624A1 (es) | 1983-06-23 | 1984-06-22 | Un modulo de aislamiento externo para usarse con un aparato de deposicion adaptado para depositar material semiconductor sobre un substrato |
Country Status (10)
Country | Link |
---|---|
US (1) | US4480585A (es) |
EP (1) | EP0130768A3 (es) |
JP (1) | JPH0650722B2 (es) |
KR (1) | KR920008117B1 (es) |
AU (1) | AU2974984A (es) |
BR (1) | BR8403009A (es) |
CA (1) | CA1221827A (es) |
ES (1) | ES8607624A1 (es) |
IN (1) | IN166911B (es) |
MX (1) | MX160840A (es) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4545136A (en) * | 1981-03-16 | 1985-10-08 | Sovonics Solar Systems | Isolation valve |
KR910005158B1 (ko) * | 1987-06-05 | 1991-07-23 | 가부시기가이샤 히다찌세이사꾸쇼 | 진공연속 처리장치 |
US5157851A (en) * | 1991-10-02 | 1992-10-27 | United Solar Systems Corporation | Pinching gate valve |
US5298086A (en) * | 1992-05-15 | 1994-03-29 | United Solar Systems Corporation | Method for the manufacture of improved efficiency tandem photovoltaic device and device manufactured thereby |
US5374313A (en) * | 1992-06-24 | 1994-12-20 | Energy Conversion Devices, Inc. | Magnetic roller gas gate employing transonic sweep gas flow to isolate regions of differing gaseous composition or pressure |
US5946587A (en) * | 1992-08-06 | 1999-08-31 | Canon Kabushiki Kaisha | Continuous forming method for functional deposited films |
JP3181171B2 (ja) * | 1994-05-20 | 2001-07-03 | シャープ株式会社 | 気相成長装置および気相成長方法 |
US5997588A (en) * | 1995-10-13 | 1999-12-07 | Advanced Semiconductor Materials America, Inc. | Semiconductor processing system with gas curtain |
GB9522062D0 (en) * | 1995-10-27 | 1996-01-03 | Rolls Royce Plc | A seal and a chamber having a seal |
JP2000150611A (ja) * | 1998-11-06 | 2000-05-30 | Canon Inc | 試料の処理システム |
EP1182272A1 (fr) * | 2000-08-23 | 2002-02-27 | Cold Plasma Applications C.P.A. | Procédé et dispositif permettant le dépôt de couches métalliques en continu par plasma froid |
US20030044539A1 (en) * | 2001-02-06 | 2003-03-06 | Oswald Robert S. | Process for producing photovoltaic devices |
KR100392811B1 (ko) * | 2001-08-14 | 2003-07-28 | 주식회사 삼원진공 | 이중챔버형 다중 진공증착 장치 |
US6808741B1 (en) * | 2001-10-26 | 2004-10-26 | Seagate Technology Llc | In-line, pass-by method for vapor lubrication |
US20050256011A1 (en) * | 2004-01-23 | 2005-11-17 | Metal Oxide Technologies, Inc. | System and method for quality testing of superconducting tape |
CN101443929A (zh) * | 2004-11-10 | 2009-05-27 | 德斯塔尔科技公司 | 使用含碱层的过程和光电装置 |
WO2006053218A2 (en) * | 2004-11-10 | 2006-05-18 | Daystar Technologies, Inc. | Pressure control system in a photovoltaic substrate deposition |
US20090194027A1 (en) * | 2008-02-01 | 2009-08-06 | Applied Materials, Inc. | Twin-type coating device with improved separating plate |
JP4486146B2 (ja) * | 2008-09-30 | 2010-06-23 | 積水化学工業株式会社 | 表面処理装置 |
WO2011035157A2 (en) * | 2009-09-18 | 2011-03-24 | Applied Materials, Inc. | Apparatus and methods for forming energy storage and photovoltaic devices in a linear system |
US20110089225A1 (en) | 2009-10-15 | 2011-04-21 | Pcc Structurals Inc. | Low Turbulence Argon Purging System |
WO2017210590A1 (en) * | 2016-06-02 | 2017-12-07 | Applied Materials, Inc. | Gate valve for continuous tow processing |
Family Cites Families (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2887984A (en) * | 1954-06-24 | 1959-05-26 | Ohio Commw Eng Co | Apparatus for gas plating continuous length of metal strip |
US2975753A (en) * | 1958-11-18 | 1961-03-21 | Nat Res Corp | Vacuum coating apparatus |
US3294670A (en) * | 1963-10-07 | 1966-12-27 | Western Electric Co | Apparatus for processing materials in a controlled atmosphere |
US3602192A (en) * | 1969-05-19 | 1971-08-31 | Ibm | Semiconductor wafer processing |
FR2307202A1 (fr) * | 1975-04-07 | 1976-11-05 | Sogeme | Dispositif d'etancheite separant deux enceintes entre lesquelles circule un materiau en continu |
US4048955A (en) * | 1975-09-02 | 1977-09-20 | Texas Instruments Incorporated | Continuous chemical vapor deposition reactor |
US4065137A (en) * | 1976-08-24 | 1977-12-27 | Armstrong Cork Company | Plasma-process vacuum seal |
FR2409428A1 (fr) * | 1977-11-19 | 1979-06-15 | Dornier Gmbh Lindauer | Dispositif d'etancheite destine a empecher des gaz oxydants, explosifs ou toxiques de s'echapper d'un tunnel de traitement d'une matiere en bande |
US4268977A (en) * | 1979-12-03 | 1981-05-26 | Exxon Research & Engineering Company | Sealing apparatus for ovens |
US4400409A (en) * | 1980-05-19 | 1983-08-23 | Energy Conversion Devices, Inc. | Method of making p-doped silicon films |
CA1191107A (en) * | 1981-03-16 | 1985-07-30 | David A. Gattuso | Isolation valve |
US4450786A (en) * | 1982-08-13 | 1984-05-29 | Energy Conversion Devices, Inc. | Grooved gas gate |
-
1983
- 1983-06-23 US US06/506,960 patent/US4480585A/en not_active Expired - Lifetime
-
1984
- 1984-06-04 IN IN458/DEL/84A patent/IN166911B/en unknown
- 1984-06-06 CA CA000456010A patent/CA1221827A/en not_active Expired
- 1984-06-19 BR BR8403009A patent/BR8403009A/pt unknown
- 1984-06-21 KR KR1019840003513A patent/KR920008117B1/ko not_active IP Right Cessation
- 1984-06-21 AU AU29749/84A patent/AU2974984A/en not_active Abandoned
- 1984-06-22 ES ES533633A patent/ES8607624A1/es not_active Expired
- 1984-06-22 JP JP59129031A patent/JPH0650722B2/ja not_active Expired - Lifetime
- 1984-06-22 MX MX201759A patent/MX160840A/es unknown
- 1984-06-25 EP EP84304289A patent/EP0130768A3/en not_active Withdrawn
Also Published As
Publication number | Publication date |
---|---|
KR920008117B1 (ko) | 1992-09-22 |
US4480585A (en) | 1984-11-06 |
KR850000774A (ko) | 1985-03-09 |
AU2974984A (en) | 1985-01-03 |
EP0130768A2 (en) | 1985-01-09 |
EP0130768A3 (en) | 1986-06-18 |
BR8403009A (pt) | 1985-06-11 |
MX160840A (es) | 1990-05-30 |
CA1221827A (en) | 1987-05-19 |
ES8607624A1 (es) | 1986-05-16 |
JPS6015918A (ja) | 1985-01-26 |
IN166911B (es) | 1990-08-04 |
JPH0650722B2 (ja) | 1994-06-29 |
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