ES477282A1 - Method for sputtering cadmium stannate films - Google Patents

Method for sputtering cadmium stannate films

Info

Publication number
ES477282A1
ES477282A1 ES477282A ES477282A ES477282A1 ES 477282 A1 ES477282 A1 ES 477282A1 ES 477282 A ES477282 A ES 477282A ES 477282 A ES477282 A ES 477282A ES 477282 A1 ES477282 A1 ES 477282A1
Authority
ES
Spain
Prior art keywords
cadmium stannate
sputtering
cadmium
stannate films
films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
ES477282A
Other languages
Spanish (es)
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Wyeth Holdings LLC
Original Assignee
American Cyanamid Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by American Cyanamid Co filed Critical American Cyanamid Co
Publication of ES477282A1 publication Critical patent/ES477282A1/en
Expired legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C03GLASS; MINERAL OR SLAG WOOL
    • C03CCHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00Surface treatment of glass, not in the form of fibres or filaments, by coating
    • C03C17/22Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
    • C03C17/23Oxides
    • C03C17/245Oxides by deposition from the vapour phase
    • C03C17/2453Coating containing SnO2
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/06Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the coating material
    • C23C14/08Oxides
    • C23C14/086Oxides of zinc, germanium, cadmium, indium, tin, thallium or bismuth

Landscapes

  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • General Chemical & Material Sciences (AREA)
  • Metallurgy (AREA)
  • Physical Vapour Deposition (AREA)
  • Conductive Materials (AREA)
  • Manufacturing Of Electric Cables (AREA)
  • Photovoltaic Devices (AREA)
  • Coating By Spraying Or Casting (AREA)

Abstract

Cadmium stannate films are sputtered in an oxygen plasma onto a substrate, using a target of cadmium- tin metal alloy having a mole ratio cadmium to tin of 1.7:1 to 2.5:1. Either RF or DC sputtering may be employed and an inert gas may be used with the oxygen. The substrates may be silica or glass.
ES477282A 1978-01-30 1979-01-30 Method for sputtering cadmium stannate films Expired ES477282A1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US87345178A 1978-01-30 1978-01-30

Publications (1)

Publication Number Publication Date
ES477282A1 true ES477282A1 (en) 1979-10-16

Family

ID=25361663

Family Applications (1)

Application Number Title Priority Date Filing Date
ES477282A Expired ES477282A1 (en) 1978-01-30 1979-01-30 Method for sputtering cadmium stannate films

Country Status (11)

Country Link
JP (1) JPS54113096A (en)
AU (1) AU521645B2 (en)
BE (1) BE873761A (en)
BR (1) BR7807832A (en)
CA (1) CA1111373A (en)
DE (1) DE2853875A1 (en)
ES (1) ES477282A1 (en)
FR (1) FR2415864A1 (en)
GB (1) GB2013724B (en)
IT (1) IT1113734B (en)
NL (1) NL7811077A (en)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3103509C2 (en) * 1981-02-03 1986-11-20 Günter Dr. Dipl.-Phys. 7801 Buchenbach Kleer Target for producing thin films, method for producing the target and using the target
JPS63114159U (en) * 1987-01-19 1988-07-22
US4806221A (en) * 1987-03-26 1989-02-21 Ppg Industries, Inc. Sputtered films of bismuth/tin oxide
GB2256282A (en) * 1991-04-02 1992-12-02 Elmwood Sensors Electrochromic device.
JPH04127042U (en) * 1991-05-14 1992-11-19 富士通テン株式会社 Mounting device for automotive components
US6761985B2 (en) 2000-10-05 2004-07-13 Battelle Memorial Institute Magnetic transparent conducting oxide film and method of making
TWI310408B (en) * 2004-12-23 2009-06-01 Ind Tech Res Inst Cadmium tin oxide multi-layer laminate and its producing method
WO2009135114A2 (en) * 2008-05-01 2009-11-05 First Solar, Inc. Transparent conductive materials including cadmium stannate
US9276142B2 (en) 2010-12-17 2016-03-01 First Solar, Inc. Methods for forming a transparent oxide layer for a photovoltaic device
US8476105B2 (en) 2010-12-22 2013-07-02 General Electric Company Method of making a transparent conductive oxide layer and a photovoltaic device
CN114657423B (en) * 2022-03-15 2023-03-24 先导薄膜材料(广东)有限公司 CdSn alloy target material and preparation method thereof

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB732891A (en) * 1949-03-25 1955-06-29 Megatron Ltd Improvements in and relating to the production of thin layers of chemical compounds on surfaces
US4040927A (en) * 1975-11-19 1977-08-09 Honeywell Inc. Cadmium tellurite thin films

Also Published As

Publication number Publication date
BR7807832A (en) 1979-07-31
IT7947571A0 (en) 1979-01-10
FR2415864B1 (en) 1983-11-18
DE2853875A1 (en) 1979-08-02
JPS54113096A (en) 1979-09-04
NL7811077A (en) 1979-08-01
AU521645B2 (en) 1982-04-22
BE873761A (en) 1979-07-30
CA1111373A (en) 1981-10-27
FR2415864A1 (en) 1979-08-24
AU4081778A (en) 1980-04-24
IT1113734B (en) 1986-01-20
GB2013724B (en) 1982-10-06
GB2013724A (en) 1979-08-15
JPS6146921B2 (en) 1986-10-16

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Legal Events

Date Code Title Description
FD1A Patent lapsed

Effective date: 20001009